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Patent 1106980 Summary

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(12) Patent: (11) CA 1106980
(21) Application Number: 304470
(54) English Title: CELLULAR INTEGRATED CIRCUIT AND HIERARCHICAL METHOD
(54) French Title: CIRCUIT INTEGRE CELLULAIRE ET METHODE HIERARCHIQUE
Status: Expired
Bibliographic Data
(52) Canadian Patent Classification (CPC):
  • 356/12
  • 356/133
(51) International Patent Classification (IPC):
  • H01L 27/10 (2006.01)
  • H01L 23/528 (2006.01)
  • H01L 27/118 (2006.01)
(72) Inventors :
  • ANDO, HISASHIGE (United States of America)
  • LAI, HUNG C. (United States of America)
  • ZASIO, JOHN J. (United States of America)
(73) Owners :
  • FUJITSU LIMITED (Japan)
(71) Applicants :
(74) Agent: MCFADDEN, FINCHAM
(74) Associate agent:
(45) Issued: 1981-08-11
(22) Filed Date: 1978-05-31
Availability of licence: N/A
(25) Language of filing: English

Patent Cooperation Treaty (PCT): No

(30) Application Priority Data:
Application No. Country/Territory Date
847,478 United States of America 1977-11-01
801,907 United States of America 1977-05-31

Abstracts

English Abstract






ABSTRACT OF THE DISCLOSURE

Integrated circuit formed from a semiconductor
body having a rectangular grid pattern formed on the body.
The grid pattern 18 defined by lines extending at right
angles to each other along X and Y axes. A plurality of
basic cells are provided which have a plurality of active
elements therein. Each of the basic cells is selected from
a limited number of basic cells of different designs. Each
of the basic cells is disposed within a rectangular area no
greater than a predetermined size and overlying a plurality
of grid lines on both the X and Y axes so that each basic
cell overlies a plurality of intersections of the grid lines
which define predetermined grid points. Each basic cell
includes a power bus, a ground bus, input leads and an output
having a predetermined arrangement with respect to certain
grid points. The power bus and ground bus and the input
leads and output of each basic cell are connected to the basic
cell. Leads are provided for connecting the basic cells to
form larger integrated circuit units which are called unit
cells. The unit cells are connected to form still larger
integrated circuits called a function block (FB).


Claims

Note: Claims are shown in the official language in which they were submitted.



The embodiments of the invention in which an exclu-
sive property or privilege is claimed are defined as follows:

1. In a cellular integrated circuit, a semiconductor
body having a surface, a rectangular grid pattern formed on
the surface of the body and being defined by grid lines exten-
ding at right angles to each other along X and Y axes, a plu-
rality of basic cells formed in the semiconductor body, each
of the basic cells having a plurality of active elements
therein, each of said basic cells being selected from basic
cells of a limited number of different designs, each of the
basic cells being disposed within a rectangular area which is
no greater than a predetermined size and overlying a plurality
of grid lines on both the X and Y axes so that each basic
cell overlies a plurality of intersections of grid lines which
define predetermined grid points, each basic cell including a
power bus, a ground bus, an input lead and an output connected
to the basic cell and having a predetermined arrangement with
respect to certain grid points, the improvement wherein there
is provided a first group of leads carried by said semiconductor
body for interconnecting said basic cells to form a plurality
of unit cells, each of said unit cells being larger than each
of said basic cells, each of said unit cells being disposed
in a second rectangular area, a second group of leads carried
by said semiconductor body for interconnecting said unit cells
into a plurality of functional blocks, each of said functional
blocks being larger than each of said unit blocks, each of
said functional blocks being disposed in a third rectangular
area, and a third group of leads carried by said semiconductor
body for interconnecting said functional blocks into an
integrated circuit system.




21



2. A cellular integrated circuit as in claim 1 wherein
said output of each basic cell is disposed within the rec-
tangular area of each basic cell in a region which is remote
from the outer perimeter of the rectangular area.


3. A cellular integrated circuit as in claim 1 wherein
at least certain of the basic cells are of the same design
but have patterns which are flipped around an X or a Y axis
of the basic cells.


4. In a method for forming a cellular integrated cir-
cuit upon the surface of the semiconductor body by the use of
a rectangular grid pattern which is defined by lines extending
at right angles to each other along X and Y axes, designing
a limited number of basic cells with each basic cell being
of a different design and with each basic cell having a
plurality of active elements therein, designing each basic
cell so that it occupies a rectangular area on the rectangular
pattern which is no greater than a predetermined size,
designing each basic cell so that it overlies a plurality
of grid lines on both the X and Y axes of the rectangular
grid pattern and overlies a plurality of intersections of
the grid lines which define predetermined grid points within
the rectangular area, designing each basic cell so that it
includes a power bus, a ground bus, an input lead and an
output which are connected to the active elements in the basic
cell and which are in registration with certain grid points
within the rectangular area for the basic cell, forming
selected basic cells on the semiconductor body, forming the
power bus, the ground bus, the input leads and the output
for the basic cells on the semiconductor body, forming
interconnections on the semiconductor body to interconnect
the basic cells into larger integrated circuits in the form

22


of unit cells, and forming additional interconnections on
the semiconductor body to form the unit cells into functional
blocks.

5. A method as in claim 4 wherein at least certain of
the basic cells are flipped about either an X or a Y axis.
6. A method as in claim 4 wherein a plurality of FB's
are provided together with the step of forming additional
interconnections on the semiconductor body to interconnect
the functional blocks into a large integrated circuit system.

7. A method as in claim 4 wherein the limited number
of basic cells is 7.
8. The integrated circuit as in claim 1 wherein said
basic cells are formed in the semiconductor body in spaced
apart areas on said surface, and wherein there is provided
an insulating layer formed on said surface and overlying said
basic cells, said power bus and said ground bus being carried
by said insulating layer in a spaced apart parallel relation-
ship, said input lead being carried by said insulating material
and crossing said power bus and said ground bus to form
intersections therewith, said input lead and said power and
ground buses extending at right angles with respect to each
other, said basic cells, said power bus, and said ground bus
being arranged so that at least one intersection overlies each
basic cell, said output lead being carried by said insulating
layer and conducting means extending from each basic cell
through the insulating layer and making electrical connections
between said power bus, said ground bus, said input lead and
said output lead.

23

9. An integrated circuit as in claim 8 wherein a
plurality of input leads are provided and wherein said input
leads are arranged in a spaced parallel relationship.


10. An integrated circuit as in claim 8 together with
interconnecting leads formed on and carried by said insulating
layer and serving to interconnect said basic cells to form
a larger integrated circuit.


11. An integrated circuit as in claim 8 wherein said
input leads are comprised of polycrystalline silicon.


12. An integrated circuit as in claim 8 wherein
said basic cell is formed of a complementary MOS circuit.


13. An integrated circuit as in claim 8 together with
at least one additional ground bus, at least one additional
power bus, and at least one additional input lead, and
wherein the power buses and the ground buses are parallel to
each other and the input leads are parallel to each other.


14. An integrated circuit as in claim 8 wherein
the semiconductor body is of the N type and is provided with
a P-type well formed therein and wherein at least portions of
at least two basic cells are disposed in said P-type well and
share said P-type well.



15. The integrated circuit as in claim 1 wherein said
basic cells are formed in the semiconductor body in spaced
apart areas on said surface, and wherein there is provided
an insulating layer formed on said surface and overlying said
basic cells, said power bus and said ground bus being carried
by said insulating layer and being in spaced apart parallel
relationship with respect to each other, at least one input
lead carried by said insulating layer and crossing said power

24


bus and said ground bus to form intersections, said rectangular
grid overlying said spaced apart areas, characterized in
that each of said basic cells have contact pads which are
positioned at predetermined Cartesian coordinates of said
rectangular grid, at least one output lead connected to said
basic cells and means forming conducting connections between
said contact pads of said basic cells and said power bus,
ground bus, said input lead and said output lead.


16. An integrated circuit as in claim 15 wherein said
basic cells are selected from circuits comprising an inverted
circuit, a NAND circuit, an AND-OR inverter circuit, a NOR
circuit and a transmission gate circuit.


17. An integrated circuit as in claim 15 wherein at
least two of the basic cells have a relationship such that
one has an arrangement which is substantially identical to
the other with the exception that its pattern has been flipped
through 180°.


18. An integrated circuit as in claim 1 wherein said
semiconductor body has its surface arrayed in a grid pattern
defined by a plurality of parallel first grid lines spaced
apart by a first dimension and extending parallel to a first
axis and by a plurality of parallel second grid lines spaced
apart by a second dimension and extending parallel to a second
axis, said first and second axes intersecting at an angle
whereby said first and second grid lines intersect to define
grid points,
said basic cells each having an area overlying a
plurality of said grid points, each having first, second, and
third regions for making electrical connections to the basic
cell, each having first and second regions located to overlie
first and second ones of said plurality of grid points,



respectively, characterized in that each has said third region
spaced from selected ones of said grid lines 50 as to be lo-
cated not to overlie said grid points,
an insulating layer formed on said surface to
overlie said basic cells and having openings at selected grid
points,
first and second conductorscarried by said in-
sulating layer, said first and second conductors colinear
with first and second ones of said grid lines, respectively,
said first and second conductors extending to overlie said
first and second ones of said plurality of grid points,-
respectively, and to connect through openings in said
insulating layer to said first and second regions, respectively.


19. The circuit structure of claim 18 wherein said
first and second conductors are power and ground buses,
respectively, parallel to said second axis, wherein said
third region is an input region parallel to said first axis
and wherein each of said basic cells include a fourth region
for an electrical output connection.


20. The circuit structure of claim 19 wherein said
fourth region overlies a selected grid point and where said
structure further includes an additional conductor colinear
with a grid line so as to overlie said selected grid point
and connect through said insulating layer to contact said
fourth region at said selected grid point.


21. The circuit structure of claim 19 wherein said
third region for each of said basic cells is colinear with
a line parallel to and spaced by a predetermined offset from
selected ones of said grid lines parallel to said first axis,
said predetermined offset less than said first dimension.


26


22. The circuit structure of claim 21 wherein each of
said basic cells includes a plurality of additional regions
parallel to said third region and spaced from said third
region and spaced apart from each other by said first dimen-
sion whereby none of said additional regions overlies any
of said plurality of grid points.


23. The circuit structure of claim 18 wherein said
angle is 90 degrees.




27

Description

Note: Descriptions are shown in the official language in which they were submitted.


6~&'~


Integrated circuits have heretofore been provided
which have been characterized as utilizing large scale inte-
gration (LSI). However, the utilization of LSI has several
limitations. Although LSI has greatly reduced the cost per
unit of logic, there is still a great need to reduce the cost
of such logic. In addition, there is a need to increase the
speed at which the active devices in the integrated circuits
communicate with each other. There is, therefore, a need for
developing a larger scale LSI which, for example, can be
called extremely large scale integration that can be utilized
to implement these requirements.
The cellular integrated circuit consists of a semi-
conductor body which can be in the form of a semiconductor
wafer. A rectangular grid pattern is formed on the body
which defines a plurality of rectangular areas on the body.
A plurality of grid points are disposed in a predetermined
arrangement within each rectangular area. A plurality of
basic cells having active elements therein are formed in the
body. Each of the basic cells conforms to one of a limited
number of basic designs. Each of the basic cells is disposed
in a rectangular area and overlies a plurality of grid points.
Each of the basic cells has power and ground buses in a pre-
determined arrangement with respect to certain grid points.
Each basic cell has input leads and an output lead. The power
and ground buses and the input and output leads in each basic
cell are connected to the basic cell. Leads are provided for
interconnecting the basic cells to form a larger integrated
circuit.
In general, it is an object of the present invention
to provide a cellular integrated circuit and hierarchical
method for making the same which utilizes basic cells having a
plurality of active elements therein with each basic cell




conforming to one of a limited number of basic cells.
Another object of the invention is to provide an
integrated circuit and method of the above character in which
the basic cells are disposed on a rectangular grid pattern
defined by grid lines on X and Y axes in rectangular areas
of a predetermined size or less and overlie grid points on
intersections of the grid lines disposed within the rectan-
gular areas.
Another object of the invention is to provide an
integrated circuit and method of the above character in which
the basic cells are utilized as building blocks in a hier-
archical structure.
Another object of the invention is to provide an
integrated circuit and method of the above character in which
the spacing between the grid lines can be changed to change
the size of the basic cells.
Another object of the invention is to provide an
integrated circuit and method of the above character in which
the basic cell size can be changed without changing the inter-

connections or routings between the basic cells.
Another object of the invention is to provide anintegrated circuit and method of the above character which
makes it possible for an individual designer to handle more
complex integrated circuits.
Another object of the invention is to provide an
integrated circuit and method of the above character which
provides a lower cost per unit of logic and increased per-
formance.
Another object of the invention is to provide an
integrated circuit and method of the above character which

has a very low failure rate.


6C~


Additional objects and features of the invention
will appear from the following description in which the
preferred embodiments have been set forth in conjunction with
the accompanying drawings.
- FIGURE la is a top plan view of a basic cell incor-
porating the present invention and showing an inverter.
FIGURE lb is a cross-sectional view taken along
the line lb-lb of Figure la.
FIGURE lc is a logic diagram of the inverter shown
in Figure la.
FIGURE ld is a cross-sectional view taken along the
line ld-ld of Figure la.
FIGURE le is a circuit diagram showing the two CMOS
transistors which make up the inverter shown in Figures
la, lb and lc.
FIGURE 2a is a top plan view of another basic cell
showing a two input NAND gate and Figure 2b shows the
logic diagram therefor.
FIGURE 3a is a top plan view of another basic cell
which consists of a two input two-wide AND-OR-~VERTER
and Figure 3b shows the logic diagram therefor.
FIGURE 4a is a top plan view of a unit cell which
shows a two input exclusive OR which is composed of two
types of basic cells, basic cells 1 and 5.
FIGURE 4b is a block diagram of the unit cell shown
in Figure 4a.
FIGURE 4c is a cross-sectional view taken along the
line 4c-4c of Figure 4a.
FIGURE 5a is a plan view of another unit cell which
serves as an arithmetic and logic unit (ALU) for even

bits.
FIGURE 5b is a block diagram of the unit cell

~6~


shown in Figure 5a.
FIGURE 5c is a cross-sectional view taken along the
line 5c-5c of Figure 5a.
FIGURE 6a is a plan view of the physical layout of
a our bit ALU which has been identified as a FB with
certain portions broken away.
FIGURE 6b is a block diagram of the physical layout
shown in Figure 6a.
FIGURE 7 is a block diagram of an eight bit ALU.
FIGURE 8 is a simplified block diagram of an inte-
grated circuit incorporating the present invention
showing the highest level in the hierarchy.
The cellular integrated circuit incorporating the
present invention is shown in Figures 1-8 of the drawings.
In Figure la, there is shown a plan view of a portion of the
cellular integrated circuit incorporating the present inven-
tion. The portion shown in Figure la consists of a basic
cell which is only one of seven basic cells which are utilized
in the present invention. The basic cell which is shown in
Figure la has been identified as basic cell BCl. The seven
basic cells consist of the following:
BCl Inverter
BC2 2 Input NAND
BC3 3 Input NAND
BC4 4 Input NAND
BC5 2 Input 2 Wide AND - OR Inverter
BC6 2 Input NOR
BC7 Transmission gate
The basic cells BC2 and BC5 are shown in Figures 2a
and 3a, respectively, to show the general manner of construc-

tion utilized in the basic cells. The other cells have not
been shown because with the teaching herein disclosed, one



skilled in the art would have no difficulty in fabricating
the same. The basic cells BCl through BC7 constitute the
lowest order element which is utilized in the hierarchy which
is involved in fabricating the cellular integrated circuit of
the present invention. These basic cells are utilized as
building blocks in the hierarchy as hereinafter described.
All of the basic cells are fabricated in a semiconductor
wafer 11 of a conventional type. For example, a silicon
semiconductor wafer of either a three-inch or four-inch dia-

meter is preferably used in order to maks possible the fabri-
cation of an extremely large scale integrated circuit utilized
in the hierarchical method herein described.
It should be possible to utilize the herein -
described integrated circuit design and the hierarchical
method also herein described in conjunction with different
types of circuitry and or devices. At this point in time,
there are three types of circuits or devices which are parti-
cularly adapted for the present integrated circuit and method
which can be identified as complimentary metal oxide semi-

conductor (CMOS), N channel MOS (NMOS) and I2L. As is wellknown to those skilled in the art, I2L is bipolar circuitry
whereas CMOS and NMOS are both MOS types of circuitry.
In evaluating the different types of circuits, it
was found that the various types of circuits had various trade
offs. In analyzing the circuits it was found that a CMOS
requires approximately 1.3 times the amount of transistors
than does NMOS to build the same functional block. In CMOS,
there are wiring restrictions which require that almost all of
the corresponding gates of the N channel transistor and the P
channel transistor be connected together (except the trans-
mission gate) and that all of the corresponding drains of the

N channel transistors and the P channel transistors should be


5~

connected together by conductors to obtain the output node.
In the case of NMOS, the gate of the load transis-
tors should be connected to the output node. This is not a
severe restriction because the output node can be connected
with the polysilicon layer and the diffusion layer or the
aluminum layer.
In comparing the processing steps between CMOS and
NMOS, approximately two more steps were required for CMOS than
NMOS with the same number of masks (8) being required.
In analyzing other features of the various circuits,
it is found that the CMOS gates have several advantageous DC
characteristics. The CMOS gates or inverters provide more
noise immunity than NMOS. With CMOS excellent current sourc-
ing capabilities can be obtained. In addition the P channel
load transistors operate in the open drain mode which is more
effective than the source follower mode in the case of the
NMOS load transistor. The DC function of the CMOS circuit is
~; not influenced by changes in the power supply voltage. CMOS
gates have the advantage of a small power consumption because
of the negative standby requirement. This is a particularly
important feature where the system is designed in which the
' probability for the device to operate is small as for example
less than 15%. CMOS gates are superior to NMOS gates when the
clock rate of the system is relatively slow in comparison with
the intrinsic gate switching speed.
In logic implementation and in circuit design, the
CMOS circuitry is advantageous because it is not necessary to
compensate for the "on" voltage level. It is easy to balance
the rise time and the fall time. In addition it makes it
possible to utilize a low "on" and high "off" impedance trans-
mission gate. In NMOS circuitry, the circuitry can be made

with fewer transistors than CMOS. In the case of circuit


~ 6~g~

density, the NMOS is superior to CMOS but on the other hand
the device area occupied by CMOS and NMOS is approximately the
same. However, in the case of simple gates, the CMOS gate
may occupy as much as 1.6 times the area of an NMOS gate.
Weighing all of the various considerations, CMOS circuitry
and devices have been utilized in the embodiment of the inven-
tion shown in the drawings.
The general construction and fabrication of CMOS
devices is well known to those skilled in the art and there-

fore will not be described in detail.
The number of basic cells has been kept relativelysmall because in order to achieve maximum flexibility the
number of indivisible elements i.e. the basic cell should be
small. In connection with the present design of the inte-
grated circuit, it also is desired to keep the basic cell
relatively small in respect to the area which it occupies on
the wafer. By way of example in the present design, it has
been found desirable to limit the size of the basic cell so
that the largest basic cell would not exceed an area of 9 grid
spacings by 6 grid spacings or a total of 54 square grid
spaces. This makes it possible to precisely tailor the power
input for the basic cells. It should be appreciated however
that if desired the basic cell can be made larger or smaller
without departing from the design concept herein disclosed.
All of the basic cells are also designed on a
rectangular grid pattern which is defined by the horizontal
grid markings or lines 12 and the vertical grid markings or
lines 13 shown in Figure la lying on X and Y axes respectively.
The scale of the grid markings is arranged in such a manner so
that the scale can be increased or decreased to change the
size of the grid for purposes hereinafter described. The

spacing between the horizontal grid markings 12 and the


~6~

vertical grid markings 13 can be the same or different as
desired. In the present embodiment, the spacing between the
grid markings have the relationship of 8 to 10 with the rela-
tionship of lb corresponding to the spacing between the
vertical grid markings 13 and the spacing 8 corresponding to
the spacing between the horizontal grid markings 12 for pur-
pose hereinafter described. More specifically the spacing
between the vertical grid markings 13 is 10~ and the spacing
between the horizontal grid markings 12 is 8~ in the present
invention.
The grid pattern has also been designed so that each
intersection of the grid lines can be established by Cartesian
coordinates as for example the Cartesian coordinates in the
units shown in Figure la to locate the four corners of the
rectangle 14 in wllich the basic cell is formed. It is noted
that the seven basic cells BCl through BC7 do not exceed an
area of 9 horizontal grid spacings by 6 vertical grid spacings
or a total 54 square grid spaces. However, it should be appre-

,r, ciated that the basic cells need not necessarily have the same
geometrical shape. They can have different rectangular shapeswith the only design constraint being that they do not exceed
the maximum desired area of 54 square grid spaces as pointed
out above.
Within the rectangle formed on the grid pattern
there are also provided a plurality of grid points 16 which
are located within the basic cell and which also lie on
intersections of the vertical and horizontal grid lines of the
grid pattern. These grid points on intersections of the grid
lines 12 and 13 are indicated by crosses 16 as shown in Figure
la. The positions of these crosses 16 also can be located by
Cartesian coordinates. Thus, it can be seen that each basic

cell will overlie certain grid points 16.


~`6~

Each of the basic cells is provided with two spaced
apart and parallel power connections or leads 21 and 22 with
the lead 21 being a power lead or bus and lead 22 being a
ground lead or bus. It is also provided with one or more
input leads and one or more output terminals or leads. Thus,
the basic cell shown in Figure la is provided with at least a
single input lead 23 and a single output lead 24. It can be
seen from the arrangement shown that the ground and power
leads extend in a vertical direction whereas the input and the
output leads extend in a horizontal direction at right angles
to the ground and power buses which intersect in the regions
occupied by the basic cells. In the basic cell shown in
Figure la, it can be seen that the basic cell has a length of
9 and a width of 3 to provide a basic dimension of 27
A cross-sectional view of the basic cell in Figure
la is shown in Figure lb. As shown in Figure lb it consists
of a conventional CMOS type construction in which the silicon
semiconductor body 11 is doped with an N-type impurity. To
provide an N-type region the body 11 has a surface 27 on which
there is deposited a field oxide layer 28. Large openings or
windows 29 and 30 are formed in the field oxide layer 28 to
expose the surface 27. A P-type well or region 31 is formed
by ion implantation in the body 11 through the field oxide
layer 28 and is defined by a PN junction 32 which extends to
the surface 27. A thin gate oxide layer 33 is grown on the
surface 27 in the opening 29. A polycrystalline layer is then
formed on the gate oxide layer 33 and etched to provide a
polycrystalline gate 34. N+ source and drain regions 36 and
37 are implanted using the gate 34 and the field oxide 28 as
a mask. A channel region 38 is formed between the source and
drain regions 36 and 37 and underlies the gate 34.




A glass layer 39 is cleposited on the field oxide
layer 28 and into the opening 29. Contact openings 41 and 42
are formed through the glass layer 39 and the gate oxide
layer 33 to expose the surface 27 overlying the source and
drain regions 36 and 37. Alayer of metallization of a suit-
able material such as aluminum is provided on the glass layer
39 and extends through openings 41 and 42 to make contact to
the source and drain regions 36 and 37 to provide source and
drain leads 43 and 44 which also can be identified as the
input lead 22 and the output lead 24 respectively.
Another cross-sectional view of the basic cell in
Figure la is shown in Figure ld. As shown in Figure ld the
P-type well 31 is defined by the PN junction 32 which extends
to the surface 27 between the openings 29 and 30. The opening
; 30 is for making a P channel transistor element. P-type
source region and drain region 40 are also formed by ion im-
plantation using the polycrystalline gate and the field oxide
28 as a mask.
In Figure la, the output lead 24 is within the
interior of the rectangle 14. Access to the output lead 24
can be readily obtained by providing a second layer of insula-
ting material (not shown) forming a via through the second
layer of insulating material to the output pad or lead 24
and forming a second layer of metallization on the second
layer of insulating material to form a connection to the via.
Access can also be obtained through a via between the first
layer metallization and the drain region 37 as shown in
Figures 4a, 5a and 6a and as hereinafter described. Because
CMOS circuitry is being utilized, the leads can be relatively
thin, particularly since there is minimal static power consump-
tion by the circuit. In other words there is no standby

power requirement.


-- 10 --

~L~

With the arrangement shown it can be seen that all
of the crucial parts of the circuitry of the basic cell are
laid out in such a manner that they overlie crosses 16. This
is true in respect to the power and ground buses 21 and 22 and
the output lead 24. Placing the output lead 24 within the
interior of the rectangular area gives flexibility in the
interconnection of the basic cells to form a unit cell and
other larger integrated circuits as hereinafter described.
Figure le is a circuit diagram of the inverter shown
in Figures la, lb, lc and ld and shows that the inverter
consists of two complementary N channel and P channel CMOS
transistors.
` In Figures 2a and 2b there is shown a two input NAND
gate which utilizes the same basic geometry as the basic cell
in Figure la. As can be seen, the rectangle 51 which is
utilized for the basic cell BC2 is larger than the rectangle
14 for the basic cell BCl. From the Cartesian coordinates
provided it can be seen that the rectangle has a length of 9
and a width of 4 to provide total area of 36. The same single
power and ground buses 21 and 22 are provided. Two spaced
apart and parallel horizontal input leads 52 and 53 are pro-
vided and an output lead 54~ The inputs have also been labeled
with the numbers 1 and 2 and the output with number 3. From
examination of Figure 2a it can be seen that the same type of
organization is utilized in the basic cell BC2 as in the basic
cell BCl.
In Figures 3a and 3b there is shown a two input two-
wide AND-OR-INVERTER. A still larger rectangle 56 is provided
for this basic cell BC5 which has again the length of 9 and a
width of 6 for a total area of 54. The same type vertical
power and ground buses 21 and 22 are provided. Four separate

spaced apart parallel and horizontal input leads 57 have been


-- 11 --



provided which have been numbered 1 through 4 as shown. An
output lead or bus 58 has been provided which has been
numbered 5.
From the three basic cells hereinbefore described, a
single power bus and a single ground bus are provided for each
basic cell which extend in a vertical direction at right
angles to the input buses and intersect therewith as appearing
in the drawings. In almost all cases, the output lead or
contact is provided within the interior of the rectangle.
It should be appreciated that although all of the
output leads have been shown within the interior of the basic
cells, if desired, it is possible to place the input and out-
,.~
` put connections for the basic cells near the outer perimeters
of the basic cells. However, this has a disadvantage in that
it makes the basic cell larger than when the output is placed
within the interior of the rectangular basic cell. It should
be noted with respect to the basic cells which are shown in
Figures la, 2a, and 3a that there are areas in the basic cells
between the inputs and on the right and left hand sides as
viewed in the drawings which can be utilized for connection
areas through which connections can be made directly to the
sources and drains as by forming vias through the insulating
layers overlying the same.
In Figures 4a and 4b there is shown the construction
of a unit cell UC7 which is the next higher level in the hier-
archy utilized in connection with the present integrated
circuit design. The unit cell is comprised of a plurality of
basic cells. As can be seen, the unit cell UC7 shown in
Figure 4a uses a considerably larger rectangle 61 which has a
dimension of 11 in one direction and 9 in another for a total

area of 99. The spacings between the horizontal grid lines
and vertical grid lines represent 10 microns and 8 microns,


- 12 -

$2'~

respectively, and this would represent a distance of 88 microns
in one direction and 90 microns in another direction.
From Figure 4a it can be seen that the various basic
cells utilized in the unit cell UC7 use the same power bus 21
and the same ground bus 22. Two inputs 62 which have been -
provided have been identified with the numerals 1 and 2. In
addition, three output leads 63 have been provided which carry
the numerals 3, 4, and 5. When the designations X and Y are
utilized, this indicates that the basic cell has been flipped
or turned over with respect to the horizontal axis, the X
axis, or the vertical axis, the Y axis, respectively. Thus,
generally speaking there are four basic positions for each
basic cell and one is the position shown in Figure la and the
second is when it is flipped about the X or horizontal axis.
A third position is obtained by flipping about the Y or verti-
cal axis and the fourth is obtained by flipping about both
the X and Y axas which is equivalent to rotating the entire
cell by 180 degrees.
Being able to flip the basic cells is advantageous
because it makes it possible to share some regions in the
basic cells. When a region can be shared, the two combined
regions will take less area than two separate regions. More
specifically the upper small rectangles 64 and 75 include two
basic cells l(BC-l) and 2(BC-lx) in the upper portions there-
of. The basic cells l(BC-l) and 2(BC-lx) are the same as the
basic cell BCl except the basic cell l(BC-l) has an origin of
(1,6) in the rectangular area 61 and the basiccell 2(BC-lx)
in the lower portions of the rectangles 64 and 75 has an
origin of (1,8) and being turned or flipped over with respect
to the X axis. Furthermore, it is noted that the basic cells
l(BC-l) and 2(BC-lx) share the single source area 66 for the

N channel transistors to be formed in the small rectangle 64


3'6~

and share the single source area 67 for the P channel tran-
sistors to be formed in the small rectangle 65. For this
reason the basic cell 2(BC-lx) has been flipped or turned over.
The basic cell 3(BC-5x) in the lower portion of the area 61 is
turned over to avoid an intersection of the output leads 3 and
5. It is more advantageous to make a single P-type well or
region rather than two separate P-type wells in the semi-
conductor body.
Referring to Figure 4c there is shown a cross-

sectional view of the unit cell UC7 of Figure 4a. In Figure4c the P-well region 68 is formed by the procedure described
above to make it small. Basically each basic cell requires
-~ one P-well thereby enlarging the required cell area. Accor-
ding to the present embodiment of the invention, there a
single P-well is formed which has provided therein all N-
channel transistor areas of each basic cell. The PN junction
-~ 69 ends at the surface of the semiconductor body and deter-
mines the boundary of the P-well 68. The other portions of
the active devices, the transistors, are not described because
they are the same as in the previous embodiments hereinafter
described.
In Figures 5a and 5b there is shown the physical
layout and the logic diagram for an arithmetic and logic unit
(ALU) which is a one bit (even bit) ALU which has been iden-
tified as cell UC16. The unit shown has four mode control
inputs. The unit can make arithmetic and logical operations
such as addition, substraction and logical AND, NOR, etc.
As can be seen the ALU as shown in Figure 5a is
formed in a rectangle 71 which is 22 units wide along the X
axis and 31 units high along the Y axis. Multiplying the
units along the X axis by 8 and the units along the Y axis by

10 and utilizing the 8 by 10 system hereinbefore described,


- 14 -

v


gives the total area for the rectangle 71 as 54,560 square
microns. Utilizing Cartesian coordinates the exact location
of the UC16 can be ascertained on the wafer. A description
of the components which make up the unit cell 16 is shown on
the right and left hand sides of the rectangle 71. For example,
the first component or basic cell on the right side has been
identified as l(BC-lx) with Cartesian coordinates of 12 and 31.
These coordinates give the location of the origin of the basic
cell. The indication also indicates that the basic cell 1 has
been flipped about the X axis. The origin will then be in the
upper left hand corner of the basic cell.
The second component or basic cell is on the left
side and is identified as 2(BC-lxy) with Cartesian coordinates
of 10 and 31 and with a basic cell flipped about the X and Y
axes. The third component is on the right hand side and is
identified as 3(BC-5x). It is flipped about the X axis and
has its origin at the Cartesian coordinates 12 and 25. As can
be seen, each component or basic cell of the unit cell UC16
has been identified with its coordinates and its orientation
with respect to X and Y axes. The mode selection lines have
been identified as S0, Sl~ S2 and S3. The numbers 3, 4, 5 and
6 also associated with these mode selection lines are also
set forth in Figure 5b. The other lines have also been iden-
tified by additional numbers. The lines 3 to 7 are for metal
leads to be formed on an insulating layer. The insulating
layer will cover the entire surface of the wafer or semi-
conductor body to insulate the ground bus, the power bus, the
input leads, the output lead and other interconnecting leads
from the basic cells.
As can be seen, the components 1, 3, 6 and 11 are
flipped about X axis in the right hand side of the rectangle
71 and the components 2, 4, 5, 8, 10 and 9 are flipped about



at least Y axis in the left hand side of the rectangle 71 so
that the same type of circuit elements are closely arranged
back-to-back wlth each other. This arrangement results in
using only one P-well region including the same type of circuit
elements in the rectangle 71.
To clarify this arrangement a cross-sectional view
of Figure 5a is shown in Figure 5c. In Figure 5c, a single
P-well 72 is including same type of circuit elements to which
ground buses 22R and 22L are contacted. The P~ junction 73
between the P-well 72 and N type wafer extends to the surface
of the wafer. The vertical lines shown in Figure 5a are
formed from a suitable metal layer such as aluminum provided
- on the glass layer 74. A second glass layer 75 covers the
entire surface of the wafer on which the horizontal lines 3 to
7 are formed in the following steps.
In Figure 6a and 6b there is shown the physical
layout in the logic diagram for functional block FB27 which
represents a still higher level in the hierarchy and shows a
4-bit ALU. It consists of two unit cells UC15 and two unit
cells UC16 and one basic cell BCl. In Figure 6b there are
shown pin numbers of differing physical sizes. The larger
pin numbers are for the FB whereas the smaller pin numbers are
the unit cell pin numbers.
In Figure 7, there is shown an 8-bit arithmetic/-
logic unit (ALU). It consists of two FB27's of the type
shown in Figures 6a and 6b. As is also shown it is provided
with a carry in lead and a mode control lead as labeled. In
addition there are provided ALU control lines as shown which
are connected into the FB27's. These ALU control lines deter-

mine whether addition or substraction is performed by the FB'sThe mode control lines determine whether an arithmetic or

logical operation is to be performed by the ALU as shown in


- 16 -

6i $~ -

Figure 7. At the top of each FB shown in Figure 7 there are
provided four A-operand lines and four B-operand lines. Thus,
eight inputs are provided for each FB. Four output or result
lines are provided for each FB and in addition, each FB is
provided with a carry/borrow out line. Use of all these lines
is well known to those skilled in the art and therefore will
not be described in detail.
In Figure 8 there is shown a block diagram of a
complete system. As shown therein, it consists of four
functional blocks, two registers 81 and 82, and ALU 83, and a
bus control 84. Data supplied on the input 86 is placed in
the registers 81 and 82 and will be added or subtracted in
accordance with the ALU control and the results will be
placed in either one of the registers 81 or 82 in accordance
with the bus control 84.
The block diagram in Figure 8 in a simplified form
characterizes the highest level of the system using the hier-
archy of the present method. As is well known to those skilled
in the art, such a system could include a number of additional
blocksas for example an indirect address register, a compara-
tor, a control storage register, a storage address register,
a clock control, a decoder, etc. As can be appreciated,
Figure 8 mainly discloses a typical system which can utilize
the cellular integrated circuit and hierarchical method of the
present invention. It also can be seen from the foregoing
description that the system and method utilizes basic cells
that serve as building blocks in a hierarchical structure and
method. The basic cell size has been limited so that the same
power and ground lines can be utilized for all the basic cells
which are in a row in the wafer. The basic cells have been
designed in such a manner that they can be expanded or con-

tracted within the predetermined area without changing the




interconnection or routings between the basic cells. It also
can be seen that this concept makes it possible for an indivi-
dual designer to handle more complex integrated circuits. It
also makes it possible to provide systems which have a lower
cost per unit of logic and increased performance. In addition,
it makes possible a very low failure rate.
The various embodiments of the present invention
described in connection with Figures 1 through 8 each include
a semiconductor body having a surface arrayed in a grid pat-

tern. The grid pattern is defined by a plurality of parallelfirst grid lines spaced apart by a first dimension and exten-
ding parallel to a first axis and by a plurality of parallel
second grid lines spaced apart by a second dimension and ex-
tending parallel to a second axis. In Figure la, for example,
the first grid lines are the ones spaced apart and extending
through the grid markings 13 parallel to the X axis. Simi-
larly, the second grid lines, like grid line 32, extend
parallel to the Y axis through the grid markings 13. The X
and Y axes typically define Cartesian coordinates and hence
intersect at an angle of 90 degrees. Therefore, the first
grid lines intersect the second grid lines to define grid
points such as grid points 16 of Figure la. While an angle
of 90 degrees between axes is preferred for simplicity, angles
other than 90 degrees can also be employed.
Each of the cellular integrated circuit structures
of the type described in Figures 1 through 8 includes a
plurality of basic cells formed in the semiconductor body and
having an area overlying a plurality of grid points. Each
basic cell has first, second and third regions for making
electrical connection to the basic cell. For example, in
Figure lb, the region 40 has its top surface exposed for making

contact with the power bus 21 through an opening in the


- 18 -



insulating layer 33. In a similar manner, region 36 is
exposed through an opening in the insulating layer 33 to make
electrical connection to the ground bus 22. The regions 36
and 40 are located to overlie first and second ones of the
plurality of grid points. Those grid points are the same ones
which the power bus 21 and the ground bus 22 overlie as
shown in Figure la. The basic cells also have a third region
spaced from selected ones of the grid lines so as to be
located not to overlie any of the grid points. In Figure la,
for example, the input region 23 is such a third region. ~ote
that the region 23 in Figure 1 does not overlie any of the
grid points 16 but rather is offset therefrom b~ some pre-
determined offset. The predetermined offset in Figure la is
approximately equal to one-half the dimension between the grid
lines parallel to the X axis. Such a predetermined offset
for the third region is significant in that any via hole con-
nection made at a grid point does not contact the third
region.
The power buses 21 and 22 are examples of conductors
which are colinear with grid lines. While the input region 23
(third region) is located not to overlie the grid points, the
relationship between that region and the conductors may be
interchanged. For example, the input region 23 may be made
colinear with one of the grid lines while one or more of the
conductors 21 and 22 may be located with a predetermined off-
set from a grid line so as not to overlie any of the grid
points. With such an interchange, via holes through the
insulating layer do not cause unwanted contact between the
conductors and the third region.
Some embodiments disclosed also include a plurality
of linear regions or conductors spaced apart from each other
by the same spacing as the grid lines but having a predeter-

-- 19 --

2`~

mined offset therefrom. In Figure 3a, for example, the input
regions 57 are such plurality of regions. None of the regions
57 overlie any of the grid points.
The basic cells discussed in connection with Figures
1 through 8 also include a fourth region which serves for
making an electrical output connection. The fourth region is
conveniently located to overlie grid points. Additionally,
an output conductor, such as conductor 54 in Figure 2a,
located colinear with one or more grid lines may have via
hole connections to the output fourth region without undesi-
rably contacting the input regions (such as input regions 52
and 53 in Figure 2a).
While the invention has been particularly shown
and described with reference to the preferred embodiments
thereof, it will be understood by those skilled in the art
that those changes in form and details may be made therein
without departing from the spirit and the scope of the
invention.




- 20 -

Representative Drawing

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Administrative Status

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Administrative Status

Title Date
Forecasted Issue Date 1981-08-11
(22) Filed 1978-05-31
(45) Issued 1981-08-11
Expired 1998-08-11

Abandonment History

There is no abandonment history.

Payment History

Fee Type Anniversary Year Due Date Amount Paid Paid Date
Application Fee $0.00 1978-05-31
Owners on Record

Note: Records showing the ownership history in alphabetical order.

Current Owners on Record
FUJITSU LIMITED
Past Owners on Record
None
Past Owners that do not appear in the "Owners on Record" listing will appear in other documentation within the application.
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Document
Description 
Date
(yyyy-mm-dd) 
Number of pages   Size of Image (KB) 
Drawings 1994-03-18 9 237
Claims 1994-03-18 7 274
Abstract 1994-03-18 1 28
Cover Page 1994-03-18 1 13
Description 1994-03-18 20 809