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Patent 2157033 Summary

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Claims and Abstract availability

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(12) Patent: (11) CA 2157033
(54) English Title: DEVICE FOR LACQUERING OR COATING OF PLATES OR DISKS
(54) French Title: DISPOSITIF DE REVETEMENT DE PLAQUES OU DE PANNEAUX
Status: Term Expired - Post Grant Beyond Limit
Bibliographic Data
(51) International Patent Classification (IPC):
  • B05C 11/105 (2006.01)
  • B05C 09/02 (2006.01)
  • B05C 09/12 (2006.01)
  • B05C 11/08 (2006.01)
  • B05D 01/00 (2006.01)
  • B05D 01/26 (2006.01)
  • C23C 02/00 (2006.01)
  • H01L 21/00 (2006.01)
(72) Inventors :
  • MUHLFRIEDEL, EBERHARD (Germany)
  • KUBELBECK, ARMIN (Germany)
  • GERISCH, TORSTEN (Germany)
  • APPICH, KARL (Germany)
  • SZEKERESCH, JAKOB (Germany)
  • KALLIS, MARTIN (Germany)
(73) Owners :
  • HAMATECH APE GMBH & CO. KG
  • STEAG MICRO-TECH GMBH STERNENFELS
(71) Applicants :
  • HAMATECH APE GMBH & CO. KG (Germany)
  • STEAG MICRO-TECH GMBH STERNENFELS (Germany)
(74) Agent: ROBIC AGENCE PI S.E.C./ROBIC IP AGENCY LP
(74) Associate agent:
(45) Issued: 2003-06-17
(86) PCT Filing Date: 1993-08-26
(87) Open to Public Inspection: 1994-11-10
Examination requested: 1995-08-25
Availability of licence: N/A
Dedicated to the Public: N/A
(25) Language of filing: English

Patent Cooperation Treaty (PCT): Yes
(86) PCT Filing Number: PCT/DE1993/000777
(87) International Publication Number: DE1993000777
(85) National Entry: 1995-08-25

(30) Application Priority Data:
Application No. Country/Territory Date
PCT/DE93/00392 (Germany) 1993-05-05

Abstracts

English Abstract


In a device for lacquering or coating plates (17)
or disks via a capillary slot (24) that is filled
with a liquid coating medium, the plate (17) to be
coated is advanced across with the surface to be
coated facing downwardly so that due to the
capillary effect a thin layer is deposited on the
plate (17).


Claims

Note: Claims are shown in the official language in which they were submitted.


WHAT IS CLAIMED IS
1. A device for lacquering or coating a thin flat part,
comprising:
- an upwardly facing capillary gap for coating a
downwardly facing surface of the thin flat part with a
coating of a liquid coating medium contained in said
capillary gap; and
- a linear transport device for placing said thin flat
part above said capillary gap in such a way that said thin
flat part is at a predetermined distance of less than
0,2 mm above said capillary gap to prevent contact between
mechanical parts of said capillary gap and said thin flat
part during coating process, and for advancing said
downwardly facing surface above said capillary gap and at
said predetermined distance such that a thin layer of said
liquid coating medium is deposited on said downwardly
facing surface by capillary and adhesion effects.
2. The device according to claim 1, wherein the capillary
gap comprises two parallel elements both immersed into the
liquid coating medium contained in a channel.
3. The device according to claim 1 or 2, wherein during
the coating process the capillary gap has a width which is
less than 0,5 mm.
4. The device according to any one of claims 1 to 3,
further comprising adjusting means for adjusting the width
of the capillary gap during operation of the device.
10

5. The device according to claim 4, wherein a means is
provided for enlargement of the width of the capillary gap
after each coating process.
6. The device according to claim 5, wherein said means
for the enlargement of the width of the capillary gap
provides the enlargement of said width of 2 to 3 mm.
7. The device according to claim 5, wherein mans is
provided for reducing the width of the capillary gap
immediately before each coating process to thus press a
predetermined amount of the liquid coating medium upwardly
out of the capillary gap to thereby start the coating
process.
8. The device according to claim 1, wherein an automatic
loading station and an automatic unloading station are
provided.
9. The device according to any one of claims 1 to 8,
wherein the linear transport device comprises a holding
device for holding the thin flat part.
10. The device according to any one of claims 1 to 9,
wherein said thin flat part is a plate.
11. The device according to any one of claims 1 to 9,
wherein said thin flat part is a disk.
12. A method for lacquering or coating a thin element with
a coating medium, comprising step of:
- providing a capillary gap having an upper end and a
lower end,
11

- supplying said lower end with said coating medium,
- attaching an uncoated thin element to a holding device
with the surface to be coated facing downwardly,
- linearly advancing said surface to be coated across
the upper end of said capillary gap in order to deposit a
thin layer of said coating medium on said surface by
capillary and adhesion effects, without allowing said thin
element to come into physical contact with the upper end of
said capillary gap, a distance of less than 0,2 mm being
maintained during a coating process between the upper end
of said capillary gap and said surface to be coated.
13. The method according to claim 12, wherein said
capillary gap has a width which is increased after
overcoming the coating process to decrease the level of
said coating medium in the capillary gap.
14. The method according to any one of claims 12 and 13,
wherein said capillary gap has a width which is reduced at
the beginning of performing the coating process in order to
press a predetermined amount of medium upwardly out of the
slot to thereby start the coating process.
15. The method according to any one of claims 12 and 13,
wherein the coated thin element is unloaded from said
holding device which is part of a linear transporting
means, when said holding device reaches an unloading
station.
16. The device according to any one of claims 1 to 11,
wherein said transport device is displaceable towards said
capillary slot which is stationary.
12

17. A method for lacquering or coating a thin plate, said
method comprising the steps of:
a) providing a channel and filling said channel with a
liquid coating medium;
b) arranging in said channel two elements at a distance
from each other for forming therebetween a predetermined
gap so that said predetermined gap can be supplied with
said liquid coating medium from said channel;
c) advancing said plate towards said predetermined gap
with a surface to be coated facing downwardly;
d) decreasing said distance between said two elements to
reduce said predetermined gap into a capillary gap and to
press an amount of the liquid coating medium out of said
capillary gap;
e) linearly moving said plate across the capillary gap
for depositing a film of the liquid coating medium on the
plate by a capillary effect and by adhesion;
f) enlarging said distance between said two elements to
increase said capillary gap into said predetermined gap in
order to cancel the capillary effect and preserve the
liquid coating medium; and
g) repeating the steps c) through f).
18. The method according to claim 17, further comprising
the step of maintaining a selected filling level of the
channel.
19. The method according to claim 18, further comprising
the steps of:
- supplying said liquid coating medium to said channel
from a supply tank via a temperature control unit and a
filter.
13

20. The method according to claim 17, 18 or 19, further
comprising the step of arranging in a direction of guiding
the plate an automatic loading station upstream of said
predetermined gap and an automatic unloading station
downstream of said predetermined gap for performing said
method in a fully automated manner.
21. The method according to any one of claims 12 to 15,
wherein said surface to be coated is placed across the
upper end of said capillary gap by maintaining the holding
device stationary and is coated by displacing said
capillary gap under it.
22. The method according to any one of claims 12, 13, 14,
15 and 20, further comprising the steps of:
- supporting the plate on the holding device; and
- moving said capillary gap relative to said holding
device so that step of coating is performed with said
holding device being stationary and said capillary gap
being moved across the plate.
23. The device according to any one of claims 1 to 11,
wherein said linear transport device comprises means for
displacing said capillary gap below said thin flat part
which is maintained stationary.
24. Use of a device according to any one of claims 1 to
11, and 16 for manufacturing LCD monitors.
25. Use of a device according to any one of claims 1 to
11, and 16, for manufacturing masks for semi-conductors.
14

26. Use of a device according to any one of claims 1 to
11, and 16 for manufacturing semi-conductor substrates and
ceramic substrates.
27. Use of a method according to any one of claims 12, 13,
14, 15, 17, 18, 19, 20, 21, and 22 for manufacturing LCD
monitors.
28. Use of a method according to any one of claims 12, 13,
14, 15, 17, 18, 19, 20, 21, and 22 for manufacturing masks
for semi-conductors.
29. Use of a method according to any one of claims 12, 13,
14, 15, 17, 18, 19, 20, 21, and 22 for manufacturing semi-
conductor substrates and ceramic substrates.
30. The method according to any one of the claims 17 to
20, wherein said two elements are parallel.
15

Description

Note: Descriptions are shown in the official language in which they were submitted.


n
CA 02157033 2002-05-17
DEVICE FOR LACQUERING OR COATING
OF PLATES OR DISKS
The present invention relates to a device for lacquering or
coating of thin elements, particularly plates or disks with
an open channel and in particular with an open channel that
is narrowed to a capillary, especially for coating glass
plates for LCD production.
In the field of thin layer technology, especially for the
production of LCD monitors, masks for semi-conductor
manufacture, semi-conductor or ceramic substrates etc., the
following problem is often encountered: Rectangular or
round plates must be provided with a uniform layer of
lacquer or other initially liquid media such as color
filters or special protective layers.
It is therefore an object of the present invention to
improve the known lacquering and coating devices and
methods and to simplify their constructive design.
According to one aspect of the present invention, there is
provided a device for lacquering or coating a thin flat
part, comprising:
- an upwardly facing capillary gap for coating a
downwardly facing surface of the thin flat part with a
coating of a liquid coating medium contained in said
capillary gap; and
- a linear transport device for placing said thin flat
part above said capillary gap in such a way that said thin
flat part is at a predetermined distance of less than
0,2 mm above said capillary gap to prevent contact between
1

i
CA 02157033 2002-05-17
mechanical parts of said capillary gap and said thin flat
part during coating process, and for advancing said
downwardly facing surface above said capillary gap and at
said predetermined distance such that a thin layer of said
liquid coating medium is deposited on said downwardly
facing surface by capillary and adhesion effects.
According to another aspect of the present invention, there
is provided a method for lacquering or coating a thin
element with a coating medium, comprising step of:
- providing a capillary gap having an upper end and a
lower end,
- supplying said lower end with said coating medium,
- attaching an uncoated thin element to a holding device
with the surface to be coated facing downwardly;
- linearly advancing said surface to be coated across
the upper end of said capillary gap in order to deposit a
thin layer of said coating medium on said surface by
capillary and adhesion effects, without allowing said thin
element to come into physical contact with the upper end of
said capillary gap, a distance of less than 0,2 mm being
maintained during a coating process between the upper end
of said capillary gap and said surface to be coated.
By the expression "placing" or "means for placing" one
should understand the fact that either the holding device
supporting the thin element is displaceable towards the
capillary slot or the holding device is stationary and it
is the capillary slot which is displaced towards and under
the surface to be coated of the thin element.
2

i
CA 02157033 2002-05-17
According to another aspect of the present invention, there
is also a method for lacquering or coating a thin plate,
said method comprising the steps of:
a) providing a channel and filling said channel with a
liquid coating medium;
b) arranging in said channel two elements at a distance
from each other for forming therebetween a predetermined
gap so that said predetermined gap can be supplied with
said liquid coating medium from said channel;
c) advancing said plate towards said predetermined gap
with a surface to be coated facing downwardly;
d) decreasing said distance between said two elements to
reduce said predetermined gap into a capillary gap and to
press an amount of the liquid coating medium out of said
capillary gap;
e) linearly moving said plate across the capillary gap
for depositing a film of the liquid coating medium on the
plate by a capillary effect and by adhesion;
f) enlarging said distance between said two elements to
increase said capillary gap into said predetermined gap in
order to cancel the capillary effect and preserve the
liquid coating medium; and
g) repeating the steps c) through f).
In a preferred embodiment, it is possible to place the
surface to be coated accross the upper end of said
capillory slot by maintaining the holding device and
therefore the thin element stationary and displacing the
capillary slot under it. In such situation, the means for
placing the thin element above said capillary slot
comprises means for displacing said capillary slot below
said thin element which is maintained stationary.
3

n
CA 02157033 2002-05-17
According to the present invention, there is also provided
use of the devices and the methods of the present invention
in the manufacture of LCD monitors, of masks for semi-
conductors and semi-conductor substrates and ceramic
substrates.
The preferred embodiments are explained below in general
terms.
The thin element, for example a plate, with the surface to
be lacquered facing downwardly is guided across the channel
that is designed such that it acts as a capillary and thus
supplies
3a

2157Q~~
the liquid coating medium or lacquer automatically and with an
especially uniform velocity. The capillary effect is achieved
by providing a narrow slot which preferably is less than
0.5 mm wide. Due to -the capillary effect, the lacquer or other
liquid coating medium advances automatically upwardly with a
constant velocity ag<~inst the force of gravity in the slot and
exits at the channel surface. Above the slot the stream of
lacquer contacts as a narrow line the plate surface to be
coated and is deposited thereon.
It is advantageous to generate the capillary by providing two
4

2151C1:~3
vertically extending ithin plates that are immersed in the open
channel filled with a liquid coating medium, whereby the
distance between them can be adjusted in an infinitely variable
manner. Thus, between the two plates over the entire length of
the channel a slot with a width that corresponds mast suitably
to the desired capillary effect can be formed. Accordingly, the
capillary geometry can be adjusted to the various types of
plates to be coated.
It is especially advantageous to guide the plate to be
lacquered or coated with a uniform and low velocity at a very
small distance, for e:~ample, less than 0.2 mm, across the upper
end of the capillary slot. Accordingly, the lacquer, after
exiting from the upper end of the capillary contacts directly
the plate surface. Due to an adhesion effect, the lacquer is
attached to the plane surface and is carried away from the
channel surface with the plate. The result is that the
following lacquer, in addition to its upward movement due to
the capillary effect, is pulled from the channel and, as a
function of the velocity of the plate, is deposited in a
defined layer thickness on the plate. Due to the adhesion
effect of the lacquer at the plate surface there is also no
risk that the lacquE~r after exiting from the capillary slot
could flow laterally, resulting in a decrease of the
uniformness of the layer thickness.
It is expedient and advantageous to open the capillary slot
between the plates after each lacquering process to between
2 mm and 3 mm. This prevents the automatic upward movement of
the lacquer, which is. undesirable between lacquering processes.
It has been shown that during longer residence within the
capillary slot the lacquer changes its properties. Such changes
are disadvantageous for the lacquering process. However, when
the capillary slot :is widened to between 2 mm and 3 mm, the
lacquer remains unchanged.
5

2~5~U3~
Expediently and advantageously, the slot between the plates is
narrowed directly before starting the lacquering process to
reach the capillary width. Accordingly, the lacquer located
between the plates :is in a first step pressed mechanically
upwardly until it exits from the channel and contacts the plate
surface waiting to 1'oe coated. Thus, the coating process is
started, which is sulbsequently commenced due to the capillary
effect within the slot that is now of a capillary width, the
movement of the plate, and the adhesion effect, as described
to above.
According to another preferred embodiment of the present
invention, it is no longer necessary to feed the plates with a
leading corner and at a small upward angle to the horizontal
across the lacquering channel. Furthermore, it is no longer
required that a liquid meniscus forms above the channel so that
a lacquer supply via a compensation tank becomes obsolete.
Further details and advantageous embodiments of the invention
20 may be taken from examples presented in the following and
represented in the drawings, which examples are not to be
understood as a limiitation of the invention. In the drawings:
Fig. 1 shows a side view of the inventive design of a
lacquering and coating device; and
Fig. 2 shows a cross-section of the channel with capillary
slot according to Fig. 1 at the beginning of a coating
process.
30 Fig. 1 shows a first embodiment of an inventive coating device
10. A channel 12 as well as supports 13 and 14 for a linear
transport device 15 are connected to a frame 11. The movable
portion of the linear transport device 15 is facing
downwardly: To it a rotatable holding device 16 for a plate 17
to be coated is connected. The plate 17 is, for example, a
glass plate to be coated with lacquer for manufacturing
6

~157U33
subsequently a mask or an LCD monitor. The plate 17 is
attached to the holding device 16, for example, by a vacuum
suction effect. For this purpose, the holding device 16 is
provided with corresponding non-represented vacuum bores.
Within the context of the invention it is also possible to use
other holding devices that are known to a person skilled in the
art.
The channel 12 is shown in cross-section in Fig. 1 and in an
enlarged view in Fig. 2. The cavity 18 of the open channel 12
is partially filled with lacquer. Two thin plates 19 and 20 are
immersed from above in the lacquer filling. The plate 19 is
fixedly connected at the location 33 to the upper edge of the
channel 12. It is not displaceable. On the ather hand, the
plate 20 is connected to a linear displacement unit 22 by means
of a suitable device. Via this displacement unit 22, the plate
2o can be moved back and forth in the direction of the arrow
23. Accordingly, the width of the slot 24 between the plates 19
and 20 can be adjusted in an infinitely variable manner
especially to a spacing between the plates that results in a
slot 24 with capillary action that is less than 0.5 mm wide.
For achieving optimal lacquering or coating results, the
corresponding liquid coating medium sho~.ild preferably have a
certain temperature and should preferably be very clean.
Accordingly, it is supplied from a supply tank 28 via a
temperature control unit 29 and a filter 30 to the channel 12.
Conveying can be achieved by generating a pressure (gas
cushion) within the ;supply tank 28 or by providing a suitable
arrangement of the supply tank 28 so that the liquid is
conveyed by the geodetical height difference to the channel 12.
However, other suitable solutions for liquid conveyance are
known to a person sk:i.lled in the art.
For a fully automatE~d version of the coating device, at the
location indicated at 31 an automated loading device and at the
7

-e.215 7 0 3 3
location 32 an automated unloading devic,~ are provided. The
loading device 31 rf~moves a plate l7 to be coated fram a
magazine connected at a certain location and conveys the plate
to the plate holding dlevice 16. The unloading device 32 removes
the plate 17 from the holding device 16 and loads it into
another magazine connected at a certain location.
Mode of opefation of the lacquering and coating device l0
l0 In a first step, the plate 17 is automatically or manually
connected to the holding device 16. By rotating the holding
device 16, its position can still be corrected. The holding
device 16, at this time, is located at the location indicated
at 31 in Fig. 1. After the plate 17 has been correctly
positioned at the holding device 16, the linear transport
device 15 is set in motion in the direction of arrow 26; i.e.,
in direction toward the open channel 12.
Plate 17 is thus advanced from one side to the upper edge of
20 the slot 24. As soon as the leading edge 25 of the plate l7 is
positioned directly above the slot 24, the~plate 20 within the
channel 12 is advanced toward the plate 19 such that a suitable
capillary width is provided between the plates. Due to the
narrowing of the capi:Llary slot 24, a small amount of liquid is I
forced out at the upper side of the capillary slot 24 against
the leading edge of t:he surface to be coated of the plate 17.
Thus, the coating process has begun. The plate 17 is now
advanced further at a uniform velocity by the linear transport
device 15 in the direction of arrow 26. Due to adhesion, a thin
30 liquid layer is deposited on the plate surface. The required
liquid flow is supplied by the capillary action of the
capillary slot 24. ~'
It is possible to support the plate on a balding device 16, and
to move the capillary slot 24 relative to the holding device so
that the step of coating is performed with said holding device
8

257033
being stationary and the capillary slot being moved across the
plate.
The coating process .i.s terminated as soon as the rear edge 27
of the plate 17 has passed the capillary slot 24. The two
plates 19 and 20 are now moved apart to a distance of 2 to 3 mm
for the aforementioned reasons until the next coating process
is to be performed. The coated plate 17 is advanced to the
location indicated at 32 where it may be automatically or
l0 manually removed from the holding device 16.
9

Representative Drawing
A single figure which represents the drawing illustrating the invention.
Administrative Status

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Event History

Description Date
Inactive: Expired (new Act pat) 2013-08-26
Letter Sent 2011-01-11
Letter Sent 2011-01-11
Letter Sent 2011-01-11
Inactive: Correspondence - MF 2010-08-10
Inactive: IPC from MCD 2006-03-11
Inactive: IPC from MCD 2006-03-11
Inactive: IPC from MCD 2006-03-11
Inactive: IPC from MCD 2006-03-11
Inactive: IPC from MCD 2006-03-11
Inactive: IPC from MCD 2006-03-11
Inactive: IPC from MCD 2006-03-11
Grant by Issuance 2003-06-17
Inactive: Cover page published 2003-06-16
Inactive: Final fee received 2003-03-28
Pre-grant 2003-03-28
Letter Sent 2003-02-03
Notice of Allowance is Issued 2003-02-03
Notice of Allowance is Issued 2003-02-03
Inactive: Approved for allowance (AFA) 2003-01-21
Amendment Received - Voluntary Amendment 2002-05-17
Inactive: S.30(2) Rules - Examiner requisition 2001-11-29
Inactive: Application prosecuted on TS as of Log entry date 2001-05-01
Inactive: Status info is complete as of Log entry date 2001-03-08
Letter Sent 2000-01-10
Letter Sent 2000-01-05
Inactive: Multiple transfers 1999-11-25
Inactive: Multiple transfers 1999-11-25
Amendment Received - Voluntary Amendment 1999-11-05
Amendment Received - Voluntary Amendment 1997-12-19
Inactive: S.30(2) Rules - Examiner requisition 1997-08-22
All Requirements for Examination Determined Compliant 1995-08-25
Request for Examination Requirements Determined Compliant 1995-08-25
Application Published (Open to Public Inspection) 1994-11-10

Abandonment History

There is no abandonment history.

Maintenance Fee

The last payment was received on 2002-08-09

Note : If the full payment has not been received on or before the date indicated, a further fee may be required which may be one of the following

  • the reinstatement fee;
  • the late payment fee; or
  • additional fee to reverse deemed expiry.

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Please refer to the CIPO Patent Fees web page to see all current fee amounts.

Owners on Record

Note: Records showing the ownership history in alphabetical order.

Current Owners on Record
HAMATECH APE GMBH & CO. KG
STEAG MICRO-TECH GMBH STERNENFELS
Past Owners on Record
ARMIN KUBELBECK
EBERHARD MUHLFRIEDEL
JAKOB SZEKERESCH
KARL APPICH
MARTIN KALLIS
TORSTEN GERISCH
Past Owners that do not appear in the "Owners on Record" listing will appear in other documentation within the application.
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Document
Description 
Date
(yyyy-mm-dd) 
Number of pages   Size of Image (KB) 
Representative drawing 2003-01-21 1 14
Abstract 1994-11-09 1 51
Description 1994-11-09 4 264
Claims 1994-11-09 2 77
Drawings 1994-11-09 1 22
Abstract 2001-04-29 1 17
Description 2001-04-29 9 464
Claims 2001-04-29 5 238
Drawings 2001-04-29 1 35
Description 2002-05-16 10 446
Claims 2002-05-16 6 194
Representative drawing 1998-07-02 1 5
Commissioner's Notice - Application Found Allowable 2003-02-02 1 160
Correspondence 2003-03-27 1 30
Fees 2003-07-16 1 29
PCT 1995-08-24 37 1,673
Fees 1999-07-11 1 33
Fees 2001-07-29 1 31
Fees 2002-08-08 1 29
Fees 1997-07-28 1 43
Fees 1998-07-26 1 39
Fees 2000-08-02 1 31
Correspondence 2010-08-09 1 45
Correspondence 2011-01-10 1 24
Correspondence 2011-01-10 1 24
Correspondence 2011-01-10 1 24
Fees 1996-07-22 1 47
Fees 1995-08-24 1 51