Note: Descriptions are shown in the official language in which they were submitted.
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ANAMORPHIC SCAN LENS FOR LASER SCANNER
CROSS REFERENCE TO RELATED APPLICATION
This patent application claims the benefit of the filing date of U.S.
provisional application Ser. No. 60/052,800, filed July 8, 1997.
BACKGROUND OF THE INVENTION
Field of the Invention
This invention relates to laser scanners and to optical systems for sweeping
an image along a scan line, and more specifically, to flying spot (raster)
scanners
used for precise electronic imaging applications.
Description of Related Art
Photolithography is commonly employed to produce repeatable patterns on
devices such as integrated circuits, flat panel displays, and printed circuit
boards.
A conventional photolithography process begins with coating a device with a
layer
of photoresist. An image projection system, for example, using an object
reticle or
2 0 a sequential scanning, illuminates selected regions of the photoresist
with light that
changes the properties of the illuminated regions. Using the changed
properties,
the photoresist is developed by removing the illuminated or not-illuminated
regions (depending on the type of photoresist) to create a patterned mask for
processing of the device. A variety or different photolithography devices have
been developed for image projection.
A laser raster scanner (also known as a raster output scanner, flying spot
scanner, or flat-bed scanner) is a photolithography device which scans one or
more
focused and spatially modulated laser beams in a series of scan lines covering
a
surface being patterned. The laser raster scanning systems can be used as a
reticle
3 o making tool or as a direct-imaging device, eliminating steps associated
with
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manufacture and use of reticles. Whether a laser raster scanner illuminates a
region
depends on the laser beam's intensity as the beam passes the region. Such
laser
raster scanners use imaging systems adapted for light having wavelengths at
which
a photoresist has high sensitivity. This generally occurs in the ultraviolet
region of
the spectrum.
A basic architecture for a laser raster scanner includes the f 8 lens system
that may or may not include a rotating polygon mirror to sweep the beam and/or
prepolygon optical system. Distinguishing features of scanner architectures
are
described below.
A first distinguishing feature is spectral performance, in particular the
spectral center line and spectral bandwidth. Most laser scanners are designed
for
monochromatic light, but a few scanners are color corrected for 3-color
visible
applications. Achromatizing a refractive system for a raster scanner is
complicated
because such systems generally use high-index glasses to aid in aberration
control.
Z5 These glasses tend to limit the spectral range of the scanner to visible
and near
infra-red wavelengths. Designs that are useful in the ultraviolet are
typically
refractive, using all-fused silica optical elements and have very narrow
spectral
bandwidths. U.S. Pat. Ser. No. 4,832,429 describes scanner optics that uses
three-
spherical-mirrors after a polygon mirror. However, that system suffers from
2 0 problems mentioned below that are typical of rotationally-symmetric, non-
telecentric systems.
A second distinguishing feature of scanner optics is use of passive motion
compensation (PMC). With PMC, a scan lens has an anamorphic architecture to
re-image the polygon facet in the cross-scan (sagittal) direction. Most
scanners for
2 5 xerographic laser printers use PMC to remove facet wobble of low-cost ball-
bearing polygon minors. Without PMC, scan lenses alternatively use
rotationally
symmetric optics, and the polygon mirror must be taller to accommodate the
height
of a four-fold symmetric input beam clear aperture (e.g., round or square).
The
polygon minor is therefore more massive and requires more drive power for
3 0 rotation. In addition, without PMC, removing facet signature requires
costly
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precision polygon mirrors with air bearing spindles, active component
correction
(acousto-optic or active mirror servo systems), or specialized, limited-use
architectures involving multiple reflections from the polygon mirror, for
example,
as described in U.S. Pat. Ser. No. 4,662,709.
A third distinguishing feature is the method used to inject a beam onto a
polygon mirror and into the scan lens. The predominant method is tangential
injection in which an input beam is in the plane of the swept scan line. Figs.
lA
and 1 B respectively illustrate top and side views of a scan lens system 100
using
tangential injection. In system 100, an input beam 105 reflects from a folding
mirror I I 0 so that input beam 1 OS and a reflected beam 11 S are in a plane
that is
perpendicular to the rotation axis of a polygon mirror 120 and includes the
optical
axis of post-polygon lens elements 130 and 140. Non-PMC scan lenses use
tangential injection unless specialized architectures are used (e.g., U.S.
Pat. Ser.
No. 4,682,842) since sagittal input places the scan line above or below the
tangential meridian of the polygon mirror, and introduces scan line bow with
rotationally-symmetric optics due to the distortion present in the lens for f
0
linearity correction.
Figs. 2A and 2B respectively illustrate top and side views of a scan lens
system 200 using sagittal injection. In system 200, an input beam 205 reflects
2 0 from a folding minor 2 i 0 so that input beam 205 and a reflected beam 215
are in a
plane containing the rotation axis of a polygon mirror 220 and the optical
axis of
post-polygon lens elements 230 and 240. A sagittal injection makes scan line
"bow" or deviation from a straight scan line difficult to control. The
classical
optical aberration referred to as distortion introduces bow in the scan line
at an
image plane 250. Distortion is introduced to scan lenses to provide the f 8
correction. and is fundamentally non-zero for any scan line that does not lie
on the
tangential meridian of the image plane. This bow is inherent to sagittal
injection in
which the image plane is off axis.
Figs. 3A and 3B illustrate a fourth distinguishing feature, telecentricity. As
3 0 illustrated in Fig. 3A, a telecentric scanner 300 has the chief ray of a
swept beam
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305 substantially perpendicular in both meridians to an image plane 310 across
the
length of a scan line. Both anamorphic and rotationally symmetric telecentric
designs exist are known and described, for example, in U.S. patents Ser. No.
4,056,307 and 4,527,858, respectively. Telecentricity is extremely important
in
high-precision, high-resolution scanning systems. A system may be considered
"telecentric" if the chief ray is perpendicular within a third the subtended
cone
angle of the focused ray bundle to the final image plane in both meridians
across
all fields and scan positions.
A non-telecentric scan lens 350 as shown in Fig. 3B has a scan beam 355
with a chief ray that meets an image plane 360 at a substantial angle to
perpendicular. The variations in the chief ray angle across the scan field for
a non-
telecentric scanner causes two problems. First, the spot size on image plane
360
grows at the edges of a scan line, due to oblique projection of the focused
spot onto
the image plane. Second, small shifts in focal plane location cause absolute
pixel
placement errors. For a chief ray angle in the cross-scan direction, focal
plane
shifts result in pixel placement errors that mimic magnification errors. If
the chief
ray angle is in the cross scan direction, out-of focus scan lines may appear
bowed.
(This type of bow is not to be confused with bow due to the optical aberration
of
distortion present in f 0 lenses.)
2 0 A fifth distinguishing feature is performance with multiple beam (data
channel) input to the scan lens system. Multiple beams allow faster writing
speeds
with reasonable electronic data rates and polygon mirror rotational
velocities.
With a single beam system, distortion can be added to the design to provide f
0
linearization of the fast-scan beam position. With a multiple beam system, f 8
2 5 linearization is not necessarily sufficient to control the fixed channel-
to-channel
spacing across the scan line. Localized separation between first and last
channels
(i.e. fixed magnification in both slow and fast axes) must be maintained
across the
scan line to prevent pixel placement errors within the multiple beam field of
view.
The variation in beam magnification in the fast-scan direction is referred to
as
?. .._....~ _.. ........ ... _...._._.._-....__a___.._.r.
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differential distortion. Variation in magnification in the slow scan direction
is
referred to as differential bow.
A sixth distinguishing feature of laser scanner architecture is the number of
resolvable spots in the scan line. Precision applications typically require
spot
diameters from 25 microns down to 2 microns, with absolute pixel placement
accuracy down to a tenth of the spot diameter. A precision, refractive
telecentric
lens system may achieve up to 20,000 resolvable spots per scan line. In
contrast, a
typical non-telecentric xerographic scanners may have about 9,000 resolvable
spots
in a scan line, although more spots are achievable if significant spot size
variation
across the scan line is allowed.
A precision scan lens is sought which provides the features and
performance desirable for a high resolution, radiometrically efficient
scanner.
SUMMARY OF THE INVENTION
An embodiment of the invention provides an improved scanning system
that incorporates the best of the above features within a performance range
suitable
for photolithographic applications. In particular, an optical system in
accordance
with an exemplary embodiment of the invention includes a telecentric scan lens
having a sagittal injection and passive motion compensation (PMC) and achieves
2 0 high radiometric efficiency for ultraviolet laser light, low differential
distortion for
multichannel beams, and up to I 5,000 resolvable spots per scan line.
Radiometric
efficiency is important because ultraviolet laser power is expensive, and the
speed
of the scanning system is related to the power delivered to the image plane.
The
exemplary embodiment utilizes a catadioptric architecture that maximizes
2 5 transmission efficiency by using a combination of reflective optics in
conjunction
with refractive elements that have high transmission of UV light. In addition,
the
exemplary system corrects aberrations over multiple UV wavelengths, thereby
optimizing the use of available laser power.
In accordance with a further aspect of the invention, the optical system for
3 0 a scanner incorporates anamorphic passive motion compensation. For high-
end
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6
scanning applications, PMC is useful because PMC reduces the heat load on the
system since a polygon mirror for the system can be thinner to require less
power
for rotation at high speeds. In addition, PMC also reduces system cost because
PMC permits use of less precise motor-polygon assemblies.
The projected size of the spot on the polygon mirror in the tangential
(collimated input) plane is minimized with zero-degree tangential offset input
to
the polygon mirror. This allows use of a smaller polygon mirror, which in turn
allows greater rotational velocities yielding faster imaging times. In
addition,
sagittal input combined with PMC creates a bi-laterally symmetric optical
system
that allows aberrations to be corrected for greater numerical apertures and
scan
angles than tangential input systems, yielding more resolvable spots in a scan
line.
The invention provides for sagittal input in a unique manner that
fundamentally
minimizes cross-scan distortion.
The telecentricity (perpendicularity of the chief ray in both meridians to the
image plane) of the scan lens removes variation in spot placement as a
function of
image defocus. This eases the requirement on work piece flatness and focal
plane
alignment with the exposed media.
In one embodiment to the invention, an optical path from a rotating
polygon mirror of a scan lens encounters a spherical lens, a cylindrical lens
2 0 element; a first sphero-cylindrical lens element; a concave spherical
mirror; a
convex cylindrical mirror; and a second sphero-cylindrical lens element. The
scan
lens also includes injection optics for a beam to the polygon mirror. The
injection
optics, like the post-polygon optics, can be anamorphic. In one embodiment of
the
invention the injection optics include a concave cylindrical mirror positioned
to
receive a beam of collimated light at a non-zero angle with a radius of
curvature of
the concave cylindrical mirror; a cylindrical lens, and a folding mirror. The
optical
materials and coatings in the scanner are matched to the spectral sensitivity
of the
photo-sensitive media and for photoresist exposure, are suitable for
ultraviolet light
having wavelengths of about 340 to 390 nm.
r _... .._~ ._. ... . . . _ .
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7
One embodiment of an optical system in accordance with the invention
includes: a cross-scan cylinder mirror, a cross-scan cylinder lens, a folding
mirror
that provides sagittal input of the beam to a rotating polygon mirror, a
spherical
meniscus lens, a plano-cylinder lens, a first sphero-cylinder lens, a primary
spherical mirror, a secondary cylindrical mirror, and a second sphero-cylinder
lens.
BRIEF DESCRIPTION OF THE DRAWINGS
Figs. lA and 1 B show a scan lens with tangential injection of a beam to a
polygon mirror.
Figs. 2A and 2B show a scan lens with sagittal injection of a beam to a
polygon minor.
Figs. 3A and 3B respectively show telecentric and non-telecentric scan
lenses.
Figs. 4A and 4B show a top view and a side view of a laser scanner in
accordance with an embodiment of the invention.
Figs. SA and SB respectively show a side view and a top view of scan
optics in accordance with an embodiment of the invention.
Fig. 6 shows a schematic representation of sagittal input for an embodiment
of the invention.
2 0 Figs. 7A, 7B, 7C, and 7D shows performance curves for an exemplary
embodiment of the invention.
Use of the same reference symbols in different figures indicates similar or
identical items.
2 5 DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
A scan lens system in accordance with an exemplary embodiment of the
invention is an unobscurred catadioptric optical system incorporating
anamorphic
elements to implement passive motion compensation. In addition, all of the
refractive optical elements have high transmission of UV light, and may be
3 0 modified to use other materials such as calcium fluoride for deep UV light
or high-
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index glasses for improved performance with the visible light. Furthermore,
the
system implements sagittal input in a manner that is consistent with but not
limited
to an unobscurred catadioptric design. In addition, the system is telecentric
at the
image plane, and is color-corrected for multiple ultraviolet wavelengths.
Furthermore, the system implements f 8 correction. Finally, the system is
capable
of imaging up to 12 independent channels while maintaining stated performance
criteria, and is capable of resolving over 15,000 pixels per line with pixel
spacing
equal to the full width at half maximum (fwhm) spot diameter.
A raster scanner 400 in accordance with an embodiment of the invention
2 0 shown in Figs. 4A and 4B includes a laser 410 with required beam shaping
optics.
a mufti-channel modulator 420, scan optics 430, and a precision stage 490 for
holding a workpiece. Laser 410 generates a collimated light beam 415 which
modulator 420 converts into a modulated beam 425 containing separate
collimated
sub-beams. In an exemplary embodiment, laser 410 is a UV argon ion laser, and
beam 425 contains ultraviolet light of wavelengths 363.8 nm, 351.4 nm, and
351.1
nm and is split into two or more separate sub-beams. Modulation of beam 425
changes the intensities of the individual sub-beams typically turning sub-
beams on
and off, but gray scale intensity control can also be employed to provide an
optimum irradiance profile to the beam eventually written to the
photosensitive
media. A co-filed U.S. provisional patent application, entitled "ACOUSTO-
OPTIC MODULATOR ARRAY WITH REDUCED RF CROSSTALK", Atty.
Docket No. P-4296-US, describes a modulator for the exemplary embodiment of
the invention.
Beam 425 from modulator 420 has a diameter that defines a stop size for
scan optics 430. Scan optics 430 forms an image of beam 425 and sweeps that
image across a scan line in an image plane. An optional optical relay 480
reforms
the image from scan optics 430 on a workpiece held by stage 490 so that a
final
image of the modulated beam sweeps along a scan direction at the surface of
the
workpiece. Precision stage 490 moves the workpiece perpendicular to the scan
line
3 0 direction. Movement of the workpiece can be continuous during scanning or
may
_._...__~..~__.... ~.._. _ _._,__.~..._...._.?
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only occur each time scan optics 430 completes a scan line. As the image
sweeps
across the scan line, sub-beams in beam 425 are turned on and off to control
which
regions in the scan line at the surface of the workpiece are illuminated. In
the
exemplary embodiment, the sub-beams have a sub-beam line width of about S~m.
Scan optic 430 includes receiving optics 440, folding mirror 450, a polygon
mirror 460, and post-polygon optics 470. Receiving optics 440 performs initial
shaping of beam 425 to generate a converging beam 445 which folding mirror 450
directs to polygon mirror 460. Receiving optics 440 and folding mirror 450 are
sometimes referred to as injection optics since they inject the modulated beam
onto
polygon mirror 460. To move the image along the scan direction, rotation of
polygon minor 460 changes the tangential incidence angle of a beam 455 from
folding minor 450 and the tangential reflection angle of a beam 465 reflected
from
polygon mirror 460. Scan lens 470 focuses beam 465 to reduce the separation
between separate sub-beams and focus each sub-beam. Scan lens 470 has
anamorphic focusing which reduces or eliminates perpendicular offsets of an
image
from a desired scan line due to facet signature or wobble in rotating polygon
mirror
460.
Figs. SA and 5B respectively show a side view and a top view of scan
optics 430 in accordance with an embodiment of the invention. Referring to
Fig.
2 o SA, a collimated mufti-channel light beam bundle enters scan lens 430 and
is
reflected by a folding mirror 510 into the pre-polygon optics consisting of a
cylindrical mirror 520 and a bi-cylindrical refractive element 530. The
purpose of
the pre-polygon cylindrical optics provides motion compensation through use of
a
mufti-element focusing system to accommodate the relatively large numerical
aperture. The focused beam bundle 535 then impinges a second folding mirror
450
sometimes referred to as the injection minor, sending a beam bundle 455 into
polygon mirror 460 at a sagittal angle. To minimizes bow, system 430 uses an
optical system with a polygon rotation axis 462 perpendicular to the scan
lens'
optical axis, centers the focused beam bundle on the optical axis through a
polygon
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facet, and re-images to the scan line such that the scan line is also centered
on the
optical axis.
A sagittal input system 600 of the class used in exemplary embodiment is
schematically illustrated in Fig. 6. In system 600, pre-polygon optics 610
focuses
5 an input beam 605 which a folding minor 620 directs onto a facet 630 of a
polygon
mirror. Post-polygon optics 640 re-images polygon facet 630 at the focal plane
of
the scanner as with tangential input systems. However, system 600 accomplishes
injection and re-imaging using an off axis section of the corrected clear
aperture of
the system rather than using laser beams that are symmetrically centered about
the
10 optical axis. Let the focused light from the polygon mirror have a
subtended angle
of (3. The aberration-corrected acceptance cone of the cross-scan optical
system is
designed to be 2(3 + 28, where 8 is a displacement angle as required for beam
635
to clear folding mirror 620. Beam 625 can be injected into the polygon facet
630
using injection mirror 620 at an angle below the centerline by (3/2 + S. The
converging beam is substantially focused on the optical centerline of post-
polygon
optics 640 at the polygon facet 630, and reflects at an angle (3/2 + s above
the
optical centerline, such that reflected beam 635 clears the top of injection
mirror
620 and enters post-polygon scan optics 640.
Distortion-induced bow is introduced in a scan line when the scan line fails
2 0 to intercept the tangential meridian of the optics 640. Since the polygon
facet is re-
imaged at the scan line in the cross-scan plane to intercept the optical axis,
and the
polygon axis is perpendicular to said optical axis, there is no bow in the
scan line
due to distortion. For mufti-channel systems, this is the minimum-bow
configuration since the channels cannot be brought closer to the optical axis
and
2 5 distortion-induced bow is minimized. Mention should be made at this point
that
the off axis nature of the optimized aperture is critical in implementing a
centered,
catadioptric architecture. By increasing the incident angle to the polygon
mirror
still further, the ray bundle describing the used aperture of the laser beam
moves
farther away from the optical centerline, thus allowing clearance for a
secondary
3 0 mirror typical to this construct.
..._.._..__. ~___..._. _...... _.... __.~..._~.__._._, ._T
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Referring back to Figs. SA and SB, beam bundle 455 reflects off of rotating
mufti-facet polygon mirror 460. Beam bundle 455 in the tangential direction
underfills a facet of polygon mirror 460. Since sagittal offset is used, the
projected
beam bundle size on the polygon face in the tangential direction is minimized,
and
the diameter of polygon mirror 460 can be reduced accordingly. In the
exemplary
embodiment, the polygon diameter is 5.33 inches in diameter, yielding a scan
efficiency of 85% with a I2-facet polygon mirror. Note should be made that the
sagittal input method of this invention can be used with active facet-tracking
schemes as well, allowing further reduction in polygon diameter. Active facet
tracking shifts the beam bundle to maintain the position of the beam bundle at
the
center of a polygon facet while the polygon mirror rotates.
In the exemplary embodiment, polygon mirror 460 has twelve facets which
rotate about a rotation axis 462 at about 7500 rpm. Fig. SB illustrates a
facet 461
of polygon mirror 460 and a resulting direction for respective reflected beam
bundle 465. When facet 461 is in the position show in Fig. SB, an image is
formed
in image plane near a first end 596 of the a scan line. After polygon mirror
460
rotates so that beam bundle is reflected of 15 an opposite end of facet (i.e.
rotates
slightly less than 30° in the exemplary embodiment), the final image
forms on an
opposite end 597 of the scan line. Polygon mirror 460 may be mounted on
2 0 precision air bearings to minimize wobble during rotation. However, the
passive
motion compensation reduces the effects from wobble and keeps an image from
forming off the desired scan line. Accordingly, polygon mirror 460 can use
roller
bearings or other less expensive bearings and still achieve high performance.
In
addition, the passive motion compensation reduces the required facet height
thus
2 5 reducing air resistance and allowing use of a lower thermal load motor to
drive the
polygon mirror 460.
After passing over injection minor 450, beam bundle 465 enters the post-
polygon scan optics. All post-polygon optics are centered on the optical axis,
thus
creating a bilaterally symmetric architecture. This symmetry in the design is
3 0 crucial to preventing unwanted bow in the final scan line The first post-
polygon
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12
optical elements, spherical meniscus lens 540 and piano-cylinder lens 550,
which
form a doublet, and a sphero-cylinder lens 560 are refractive elements of
fused
silica or BK7, which both effectively transmit light having wavelengths down
to
350 nm. For visible wavelengths, other glasses can be used with added
performance capability, especially if high-index glasses are used. System 400
can
also work effectively at shorter wavelengths (at least down to 190 nm) if
calcium
fluoride is substituted for BK7.
Beam bundle 564 from lens 560 reflects off of a primary spherical mirror
570, while passing over a secondary cylindrical mirror 570. Beam bundle 575
from mirror 570 reflects off of cylinder mirror 570 so that a beam bundle 585
passes through a sphero-cylinder lens 590, which is designed such that its
clear
aperture does not encroach into beam bundle 575. Lens 590 focuses a beam
bundle
595 at the scan lens' focal plane. Since an off axis section of the centered
lens 590
is used, the chief ray of the incident bundle 595 is not perpendicular to the
optical
axis of the post-polygon lens elements. However, by redefining the focal plane
to
be normal to the chief ray of the bundle 595, the telecentricity requirement
for the
architecture is now met.
The appendix provides an optical listing of the exemplary embodiment of
the invention. Figs. 7A, 7B, 7C, and 7D show performance curves for the
2 0 exemplary embodiment. In particular, Fig. 7A is a plot of the diameter at
which
the intensity of a spot falls to 1/e2 over a range of scan angles
corresponding to a
scan line. As indicated in Fig. 7A, the exemplary embodiment provides spots
with
a variation less than one tenth of the spot diameter. Fig. 7B indicates the
ratio of
the spots' major and minor axes for sub-beams 2, 3, 4, and 5 respectively in
upper-
2 5 left, upper-right, lower-right, and lower-left corners of a beam bundle.
For each
sub-beam, the spot is nearly circular across the range of polygon angles. Fig.
7C
indicates the differential distortion between sub-beams in the upper-left and
lower-
left and the differential distortion between sub-beams in the upper-right and
lower-
right of the beam bundle. As indicated, differential is less than about 0.5%.
Fig.
3 0 7D indicates the cross-scan position of sub-beams 2, 3, 4, and 5 across
the range of
_. __ _ _. _...~- _ ~
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polygon angles corresponding to a scan line. The position of diagonally
located
sub-beams 2 and 4 or 3 and 5 track each other to provide uniform spacing
between
scan lines formed by sub-beams if the sub-beams are oriented along a diagonal
running from top-left to bottom-right (or from top-right to bottom left) of a
square
cross-section (i.e., aperture) for a beam bundle.
Although the present invention has been described with reference to
particular embodiments, the description is only an example of the invention's
application and should not be taken as a limitation. Various adaptations and
combinations of features of the embodiments disclosed are within the scope of
the
invention as defined by the following claims.
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Appendix
This appendix tingof the ary
contains exempl embodiment
an of
optical
lis
the invention. parameters Code
The listing as in V"
formatted the "
and defines
optical available esearch
design from Associates.
software Optical
R
di_flld:scanlens
model
RDY THI RMD GLA CCY THC
GLC
> OBJ: INFINITY INFINITY 100 100
1: INFINITY 0.000000 100 100
1 STO: INFINITY 6.698586 100 100
O
3: INFINITY 0.000000 100 100
XDE: 0.000000YDE: 0.000000 ZDE:0.000000
XDC: 100 YDC: 100 ZDC:100
ADE: 0.000000BDE: -45.000000CDE:0.000000
1 ADC: loo BDC: loo cnc:loo
5
4: INFINITY 0.000000 100 100
REFL
CUM: 0.000000THM: 0.250000 GLM:
5: INFINITY 0.000000 100 100
2 XDE: 0.000000YDE: 0.000000 ZDE:0.000000
O
XDC: 100 YDC: 100 ZDC:100
ADE: 0.000000BDE: -45.000000CDE:0.000000
ADC: 100 BDC: 100 CDC:100
2 6: INFINITY -1.599090 100 100
5
7: INFINITY 0.000000 100 100
XDE: 0.433726YDE: 0.000000 ZDE:0.000000
XDC: 100 YDC: 100 ZDC:100
ADE: 0.000000BDE: 0.000000 CDE:0.000000
3 ADC: 100 BDC: 100 CDC:100
O
8: INFINITY 0.000000 100 100
9: INFINITY 1.859901 100 0
REFL
CYL:
3 RDX: 4.69080CCX: 100
5
XDE: 0.000000YDE: 0.000000 ZDE:0.000000 DAR
XDC: 100 YDC: 100 ZDC:200
ADE: 0.000000BDE: 0.000000 CDE:0.000000
ADC: 100 BDC: 0 CDC:0
4 CUM: 0.000000THM: 0.250000 GLM:
O
10: INFINITY 0.000000 100 100
11: INFINITY 0.215000 SILICA_SPECIAL100 100
CYL:
4 RDx: -1.17400ccx: loo
5
XDE: 0.000000YDE: 0.000000 ZDE:0.000000
XDC: 1 YDC: 100 ZDC:100
ADE: 0.000000$DE: 0.000000 CDE:0.000000
ADC: 100 BDC: 100 CDC:2
5 TRN: 0.999000.99900
O 0.99900
12: INFINITY 1.178672 100 100
CYL:
RDX: 0.31352CCX: 100
5 XDE: 0.000000YDE: 0.000000 ZDE:0.000000
5
XDC: 1 YDC: 100 ZDC:100
ADE: 0.000000BDE: 0.000000 CDE:0.000000
ADC: 100 BDC: 100 CDC:2
G 13: INFINITY 0.000000 100 100
O
XDE: 0.000000YDE: 0.000000 ZDE:0.000000
XDC: 100 YDC: 100 ZDC:100
........ ___..~........._._._ .. _ _ ... .........___..,~,....._........ _.
CA 02296595 2000-O1-OS
WO 99/03012 PCT/US98/12464
_ 15
ADE: 0.000000BDE:-44.194664CDE:0.000000
ADC: 100 BDC:3 CDC:100
14: INFINITY 0.000000 100 lOC
REFL
CUM: 0.000000THM:0.000000 GLM:
15: INFINITY 0.000000 100 lOC
XDE: 0.000000YDE:0.000000 ZDE:0.000000
XDC: 100 YDC:100 ZDC:100
ADE: 0.000000BDE:-44.194664CDE:0.000000
1 ADC: 100 BDC:3 CDC:100
~
16: INFINITY -0.365347 100 100
17: INFINITY 0.000000 100 100
XDE: -0.025416YDE:0.000000 ZDE:0.000000
1 xDC: loo YDC:loo zDC:loo
5
ADE: 0.000000BDE:-1.610672 CDE:0.000000
ADC: 100 BDC:100 CDC:100
18: INFINITY -2.690033 100 100
2 19: INFINITY 2.690033 100 100
~
XDE: 0.000000YDE:0.000000 ZDE:0.000000
XDC: 100 YDC:100 ZDC:100
ADE: 0.000000BDE:0.000000 CDE:0.000000
ADC: 100 BDC:100 CDC:100
25
20: INFINITY -2.690033 L 100 100
REE
XDE: 0.000000YDE:0.000000 ZDE:0.000000 DAR
XDC: lOD YDC:100 ZDC:100
ADE: 0.000000BDE:0.000000 CDE:0.000000
3 ADC: 100 BDC:100 CDC:100
O
CUM: 0.000000THM:2.872000 GLM:
21: INFINITY 2.690033 100 100
XDE: 0.000000YDE:0.000000 ZDE:0.000000
3 xDC: loo YDC:loo zDC:loo
5
ADE: 0.000000BDE:0.000000 CDE:0.000000
ADC: 100 BDC:100 CDC:100
22: INFINITY 0.500000 100 100
4 23: INFINITY 0.000000 100 100
O
24: -2.59900 0.175000 BK7_SCHOTT 100 100
25: -4.43700 0.767805 100 100
26: INFINITY 0.000000 100 100
27: INFINITY 0.000000 100 100
4 28: INFINITY 0.175000 SILICA_SPECIAL 100 100
5
CYL:
RDX: INFINITYCCX:100
TRN: 0.999000.99900
0.99900
5 29: -5.36900 0.005002 100 100
~
CYL:
RDX: INFINITYCCX:100
30: INFINITY 1.684027 100 100
5 31: INFINITY 0.000000 100 100
5
32: -2.10100 0.450000 BK7_SCHOTT 100 100
CYL:
RDX: INFINITYCCX:100
33: -2.85500 0.743925 100 100
34: INFINITY 0.000000 100 100
35: INFINITY 0.782681 100 100
36: INFINITY 0.000000 100 100
37: INFINITY 2.348458 100 100
6 38: -6.47950- 2.348458 100 100
5 REFL
CUM: 0.000000THM:1.000000 GLM:
39: INFINITY 0.000000 100 100
40: INFINITY- 0.782681 100 100
CA 02296595
2000-O1-OS
WO PCT/US98/12464
99/03012
_ 16
41: INFINITY0.000000 100100
42: -5.123000.278189 100100
REFL
CYL:
RDX: INFINITYCCX: 100
CUM: -0.254000THM: 0.250000GLM:
43: INFINITY0.000000 100100
44: INFINITY0.000000 100100
45: INFINITY0.000000 100100
L 46: INFINITY0.005000 100100
O
XDE: 0.000000YDE: 0.000000ZDE: 0.000000
XDC: 100 YDC: 100 ZDC: 100
ADE: 0.000000BDE: 0.464345CDE: 0.000000
ADC: 100 BDC: 100 CDC: 100
47: INFINITY0.165000 UBK7 _SCHOTT 100100
CYL:
RDX: 0.31352 CCX: 100
2 48: -33.411000.222961 100100
O
49: INFINITY0.000000 100100
XnE: -0.006000YDE: 0.000000ZDE: 0.000000
XDC: 100 YDC: 100 ZDC: 100
ADE: 0.000000BDE: 10.221860CDE: 0.000000
2 Anc: loo Bnc: loo cnc: loo
5
50: INFINITY0.000000 100100
51: INFINITY0.000000 100100
52: INFINITY0.001147 100100
3 IMG: INFINITY0.000000 100100
O
SPECIFICATIONDATA
EPD 0.27500
PUX 0.75000
3 PuY o.7sooo
5
PUI 0.13500
DIM IN
WL 363.80 351.40 351.10
REF 2
4 wTw loo loo loo
0
xAN o.ooooo o.olzzo -o.olzzoo.ol2zo -o.olz2o
YAN 0.00000 -0.07700 -0.077000.07700 0.07700
vux o.ooooo o.ooooo o.oooooo.ooooo o.ooooo
vLx o.ooooo o.ooooo o.oooooo.ooooo o.ooooo
4 wY o.ooooo o.ooooo a.oooooo.ooooo o.ooooo
5
VLY 0.00000 0.00000 0.000000.00000 0.00000
PFR 1.0000 0.0000 0.00000.0000 0.0000
PTP 0.0000 0.0000 0.00000.0000 0.0000
POR 0.0000 0.0000 0.00000.0000 0.0000
5 PRO LIN LIN LIN LIN LIN
O
APERTURE /EDGE TIONS
DATA DEFINI
CA
REX 820 0.229872
5 REY S20 0.769500
5
CIR 824 0.500000
CIR S25 0.750000
REX S28 0.500000
REY 828 1.000000
G REX 829 0.500000
O
REY S29 1.000000
REX 832 0.500000
REY S32 1.425000
REX S33 0.500000
6 REY 833 1.688000
5
REX 838 0.500000
REY 838 3.700000
REX 842 0.350000
___,.....___.T. _.._.. _.w__._._-........._.... T
CA 02296595 2000-O1-OS
WO 99/03012 PCT/US98/12464
17
REY S42 1.650000
REX 547 0.080000
REY 547 1.700000
REX 548 0.080000
REY 548 1.700000
REFRACTI~/E INDICES
GLASS CODE 363.80 351.40 351.10
SILICP._SPECIAL 1.474723 1.476662 1.476712
0 BK7_SCHOTT 1.536487 1.538878 1.538940
UBK7 SCHOTT 1.536443 1.538826 1.538887
No solves definedsystem
in
1 No pickups definedsystem
5 in
ZOOM DATA
POS 1 POS 2 POS 3 POS 9 POS 5 POS 6 POS 7
2 ADE 519 0.00000 0000 5.00000
O 3.0 7.00000 9.00000
11.00000
12.75000
ADC 519 100 100 100 100 100 100 100
ADE 521 0.00000 0000 -5.00000
-3.0 -7.00000
-9.00000
-11.00000
-12.75000
ADC 521 100 100 100 100 100 100 100
2 This is a decentered
5 system. If elements
with power are
decentered or tilted, the
first order
properties
are probably
inadequate in describing
the system
characteristics.
POS 1 POS 2 POS POS 4 POS 5 POS 6 POS
3 7
30
INFINITE CONJUGATES
EFL 3.4075 3.4075 3.40753.4075 3.4075 3.4075 3.4075
BFL 0.0071 0.0071 0.00710.0071 0.0071 0.0071 0.0071
FFL 11.9020 11.9020 11.902011.9020 11.9020 11.902011.9020
3 FNO 12.3909 12.3909 12.390912.3909 12.3909 12.390912.3909
5
IMG DIS 0.0011 0.0011 0.00110.0011 0.0011 0.0011 0.0011
OAL 13.1596 13.1596 13.159613.1596 13.1596 13.159613.1596
PARAXIAL IMAGE
HT 0.0046 0.0046 0.00460.0046 0.0046 0.0046 0.0046
4 ANG 0.0770 0.0770 0.07700.0770 0.0770 0.0770 0.0770
0
ENTRANCE PUPIL
DIA 0.2750 0.2750 0.27500.2750 0.2750 0.2750 0.2?50
THI 0.0000 0.0000 0.00000.0000 0.0000 0.0000 0.0000
EXIT PUPIL
4 DIA 0.0787 0.0787 0.07870.0787 0.0787 0.0787 0.0787
5
THI 0.9827 0.9827 0.98270.9827 0.9827 0.9827 0.9827
STO DIA 0.2750 0.2750 0.27500.2750 0.2750 0.2750 0.2750
5 0 Position 1
Local surface respectsurface
coordinates to 1
with
SURF XSC YSC 2SC ASC BSC CSC
5 5 1 0.000000.ooooa 0.00000 0.0000 0.0000 0.0000
STO 0.000000.00000 0.00000 0.0000 0.0000 0.0000
3 0.000000.00000 6.69859 0.0000 -45.0000 0.0000
4 0.000000.00000 6.69859 0.0000 -45.0000 0.0000
5 0.000000.00000 6.69859 0.0000 -90.0000 0.0000
6 0 6 0.000000.00000 6.69859 0.0000 -90.0000 0.0000
7 -1.599090.00000 6.26486 0.0000 -90.0000 0.0000
SUBSTITUTE SHEET (RULE 26)
CA 02296595 2000-O1-OS
WO 99/03012 PCT/LTS98/12464
_ 18
8 -1.59909 0.000006.26486 0.0000 -90.0000 0.0000
9 -1.59909 0.000006.26486 0.0000 -90.0000 0.0000
0.26081 0.000006.26486 0.0000 -90.0000 0.0000
11 0.26081 0.000006.26486 0.0000 -90.0000 0.0000
12 0.47581 0.000006.26486 0.0000 -90.0000 0.0000
23 1.65448 0.000006.26486 -180.0000-45.8053 180.0000
14 1.65448 0.000006.26486 -180.0000-45.8053 180.0000
1.65448 0.000006.26486 -180.0000-1.6107 180.0000
16 1.65448 0.000006.26486 -180.0000-1.6107 180.0000
1 17 1.66962 0.000006.63078 -180.00000.0000 180.0000
~
18 1.66962 0.000006.63078 -180.00000.0000 180.0000
19 1.66962 0.000009.32081 -180.00000.0000 180.0000
1.66962 0.000006.63078 -180.00000.0000 180.0000
21 1.66962 0.000009.32081 -180.00000.0000 180.0000
1 22 1.66962 0.000006.63078 -180.00000.0000 180.0000
5
23 1.66962 0.000006.13078 -180.00000.0000 180.0000
24 2.66962 0.000006.13078 -180.00000.0000 180.0000
1.66962 0.000005.95578 -180.00000.0000 180.0000
26 1.66962 0.000005.18797 -180.00000.0000 180.0000
27 1.66962 0.000005.18797 -180.00000.0000 180.0000
28 1.66962 0.000005.18797 -180.00000.0000 180.0000
29 1.66962 0.000005.01297 -180.00000.0000 180.0000
1.66962 0.000005.00797 -180.00000.0000 180.0000
31 1.66962 0.000003.32394 -180.00000.0000 180.0000
2 32 1.66962 0.000003.32394 -180.00000.0000 180.0000
5
33 1.66962 0.000002.87394 -180.00000.0000 180.0000
34 1.66962 0.000002.13002 -180.00000.0000 180.0000
1.66962 0.000002.13002 -280.00000.0000 180.0000
36 1.66962 0.000001.34734 -180.00000.0000 180.0000
37 1.66962 0.000001.34734 -180.00000.0000 180.0000
38 1.66962 0.00000-1.00112-180.00000.0000 180.0000
39 1.66962 0.000001.34739 -180.00000.0000 180.0000
1.66962 0.000001.34734 -180.00000.0000 180.0000
41 1.66962 0.000002.13002 -180.00000.0000 180.0000
3 42 1.66962 0.000002.13002 -180.00000.0000 180.0000
5
43 1.66962 0.000001.85183 -180.00000.0000 180.0000
44 1.66962 0.000001.85183 -180.00000.0000 180.0000
1.66962 0.000001.85183 -180.00000.0000 180.0000
46 1.66962 0.000001.85183 -180.0000-0.4643 180.0000
47 1.66966 0.000001.84683 -180.0000-0.4643 180.0000
48 1.67100 0.000001.68183 -180.0000-0.4643 180.0000
49 1.67880 0.000001.45893 -180.0000-10.6862 180.0000
2.57561 0.00000-1.26583-180.00000.0000 180.0000
51 1.67880 0.000001.45893 -180.0000-10.6862 180.0000
4 52 1.67880 0.000001.45893 -180.0000-10.6862 180.0000
5
IMG 1.67902 0.000001.45780 -180.0000-10.6862 180.0000
. ....._.....~._ ... ,.. .. .~..._.._.-..._..__..__. _ ___v.._._ _ _..._._...
~._. .._ . .
