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Patent 2328942 Summary

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(12) Patent: (11) CA 2328942
(54) English Title: COPLANAR OSCILLATOR CIRCUIT STRUCTURES
(54) French Title: STRUCTURES DE MONTAGES OSCILLATEURS COPLANAIRES
Status: Expired and beyond the Period of Reversal
Bibliographic Data
(51) International Patent Classification (IPC):
  • H1P 7/08 (2006.01)
  • H3B 5/18 (2006.01)
(72) Inventors :
  • MOHWINKEL, CLIFFORD A. (United States of America)
  • STONEHAM, EDWARD B. (United States of America)
(73) Owners :
  • ENDWAVE CORPORATION
(71) Applicants :
  • ENDWAVE CORPORATION (United States of America)
(74) Agent: SMART & BIGGAR LP
(74) Associate agent:
(45) Issued: 2007-07-17
(86) PCT Filing Date: 1998-04-24
(87) Open to Public Inspection: 1999-11-04
Examination requested: 2003-04-10
Availability of licence: N/A
Dedicated to the Public: N/A
(25) Language of filing: English

Patent Cooperation Treaty (PCT): Yes
(86) PCT Filing Number: PCT/US1998/008234
(87) International Publication Number: US1998008234
(85) National Entry: 2000-10-16

(30) Application Priority Data: None

Abstracts

English Abstract


An oscillator circuit (20) having a flip chip metalization pattern and base
substrate metalization pattern is defined such that a
common-drain oscillator is configured with the common drain (38) interposed
between the source (40) and gate (36) terminals, providing
an effective RF common reference with reduced parasitic inductance elements
which otherwise degrade oscillator power and phase noise
at high frequencies.


French Abstract

L'invention concerne un montage oscillateur (20) comportant un réseau d'interconnexions de puces à bosses et un réseau d'interconnexions de substrat de base. Un oscillateur à drain commun est pourvu d'un drain commun (38) interposé entre les bornes de la source (40) et de la grille (36), ce qui permet d'obtenir une référence commune de RF effective avec des éléments à inductance parasite réduite qui, sinon, détériorent la puissance de l'oscillateur et le bruit de phase à hautes fréquences.

Claims

Note: Claims are shown in the official language in which they were submitted.


What is claimed is:
1. Millimeter-wave and microwave circuit structures comprising:
an insulating substrate surface (22a) having a connection region (24a);
first, second, and third coplanar conductors (32, 34, 30) mounted on the
surface, each conductor having a proximal portion (32a, 34a, 30a) extending
into the
connection region, the first and second conductors (32, 34) having respective
distal
portions (32b, 34b) extending in different directions from the connection
region, and
the third conductor (30) having a first distal portion(30b) extending adjacent
to the
distal portion (32b) of the first conductor and a second distal portion (30c)
extending
adjacent to the distal portion (34b) of the second conductor, the first and
second distal
portions (30b, 30c) of the third conductor being isolated from ground; and
at least one active device (26) having an input signal control terminal (36),
an
inverting output signal-carrying terminal (38) and a non-inverting output
signal-carrying
terminal (40), the signals in the output signal-carrying terminals dependent
on the input
signal in the input signal control terminal, the active device being
positioned in the
connection region with the input signal control terminal (36) coupled to the
first
conductor (32), the non-inverting output signal carrying terminal (40) coupled
to the
second conductor (34) and the inverting output signal carrying terminal (38)
coupled to
the third conductor (30).
2. Millimeter-wave and microwave circuit structures as set forth in claim 1,
wherein the
first conductor (32) and the second conductor (34) are both disposed on one
side of
the third conductor (30).
3. Millimeter-wave and microwave circuit structures as set forth in claim 1,
wherein the
first conductor (32) and the second conductor (34) are disposed on opposite
sides of
the third conductor (30), the third conductor thereby passing between the
control
terminal (36) and the non-inverting terminal (40).
4. Millimeter-wave and microwave circuit structures as set forth in claim 1,
further
comprising:
a fourth coplanar conductor (30') mounted on the surface(22a), the fourth
conductor having a proximal portion (30a') extending into the connection
region (24a),
32

the fourth conductor having respective first and second distal portions (30b',
30c')
extending in different directions from the connection region, and the fourth
conductor
having the first distal portion (30b') extending adjacent to the distal
portion (32b) of the
first conductor and the second distal portion (30c') extending adjacent to the
distal
portion (34b) of the second conductor; and
a second active device (28) with a second input signal control terminal (36),
a
second inverting output signal-carrying terminal (39), and a second non-
inverting
output signal-carrying terminal (40), the signals in the second output signal-
carrying
terminals dependent on the signal in the second input signal control terminal,
the
second input signal control terminal (36) being coupled to the first conductor
(32), the
second non-inverting output signal-carrying terminal (40) being coupled to the
second
conductor (34) and the second inverting output signal-carrying terminal (39)
being
coupled to the fourth conductor (30').
5. Millimeter-wave and microwave circuit structures as set forth in claim 4,
wherein the
third and fourth coplanar conductors (30, 30') are connected by another
coplanar
conductor (30d) passing between the first and second conductors (32, 34).
6. Millimeter-wave and microwave circuit structures as set forth in claim 4,
wherein the
fourth conductor (30') and the third conductor (30) are connected.
7. Millimeter-wave and microwave circuit structures as set forth in claim 6,
wherein the
fourth conductor (30') is contiguous with the third conductor (30).
8. Millimeter-wave and microwave circuit structures as set forth in claim 1,
wherein the
distal portion (32b) of the first conductor and one distal end (30b) of the
third conductor
are connected to a resonator circuit (42).
9. Millimeter-wave and microwave circuit structures as set forth in claim 8,
wherein a
portion of the first conductor (32) and one distal end of the third conductor
(30) are
configured as a part of the tuning circuit (42).
33

10. Millimeter-wave and microwave circuit structures as set forth in claim 1,
wherein
the distal end of the second conductor (34b) and one distal end (30c) of the
third
conductor are connected to a feedback circuit (44).
11. Millimeter-wave and microwave circuit structures as set forth in claim 10,
wherein
a portion of the second conductor (34) and one distal end (30c) of the third
conductor
are configured as a part of the feedback circuit (44).
12. Millimeter-wave and microwave circuit structures as set forth in claim 1,
wherein
the distal end (32b) of the first conductor and one distal end (30b) of the
third
conductor are connected to a tuning circuit (42), and the distal end (34b) of
the second
conductor and the other distal end (30c) of the third conductor are connected
to a
feedback circuit (44).
13. Millimeter-wave and microwave circuit structures as set forth in claim 12,
wherein
the resonator circuit (42) and feedback circuit (44) are arranged such that
the structure
is an oscillator.
14. Millimeter-wave and microwave circuit structures as set forth in claim 10,
11, 12 or
13 wherein the feedback circuit (307) includes a coplanar capacitor (312,
316).
15. Millimeter-wave and microwave circuit structures as set forth in claim 4,
wherein
the conductors (30, 32, 34) connected to the first device (26) comprise part
of a first
oscillator circuit, and the conductors (30', 32, 34) connected to the second
device (28)
comprise part of a second oscillator circuit.
16. Millimeter-wave and microwave circuit structures as set forth in claim 15,
wherein
the signals of the first and second oscillators are locked such that the
oscillators
oscillate in phase.
17. Millimeter-wave and microwave circuit structures as set forth in claim 15,
wherein
the first and second oscillator circuits are coupled such that the oscillators
oscillate in
push pull.
34

18. Millimeter-wave and microwave circuit structures as set forth in claim 1,
whereinthe active device (26) is selected from the group consisting of field
effect
transistors, bipolar transistors, heterojunction transistors, resonant
tunneling
transistors, real-space transfer devices, permeable base transistors, solid
state triodes,
vacuum triodes, controlled avalanche triode devices, and superconducting
triode
devices.
19. Millimeter-wave and microwave circuit structures as set forth in claim 1,
wherein
the circuit is a common-drain oscillator (20).
20. Millimeter-wave and microwave circuit structures as set forth in claim 8
or 10,
wherein the resonator or feedback circuit (42, 44) is selected from the group
consisting
of coplanar slotline circuits, coplanar waveguide circuits, coplanar
transmission line
circuits and coplanar feedback circuits.

Description

Note: Descriptions are shown in the official language in which they were submitted.


CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
COPLANAR OSCILLATOR CIRCUIT STRUCTURES
Inventors: Clifford A. Mohwinkel, Edward B. Stoneham -
Technical Field
The invention relates to an integrated circuit flip chip circuit containing
multiple
active devices mounted on a base substrate having metalization patterns
connected to
the integrated circuit. More specifically, it relates to millimeter wave
integrated
oscillator circuits and particularly coplanar oscillator circuit structures
constructed of
multiple interconnected replicated cells including metalization pattems having
reduced
parasitic coupling to a common terminal.
Backaround Art
In almost all oscillators employing three-terminal active devices, a signal
path is
required from an input to an output. The input to the three-terminal active
device
oscillator defines an input voltage or current phase and two output current-
carrying
terminals which generally have either in-phase or opposed-phase (inverting)
currents
at low frequency, effectively direct current (DC). In the case of a microwave
FET the
control input is the gate and the inverting output is the drain. In a large
common-
source FET, which is typically used to provide significant output power, the
gate
terminal is typically connected to circuitry which has a return path which
extends a
significant distance before returning to make connection with the drain
(inverting)
terminal. Any parasitic inductances or capacitances associated with the
current paths
connected to the gate and inverting terminal can limit the oscillator
frequency response
achievable.
Prior art oscillator circuits have used wire bonds to connect active devices
to
resonator and feedback circuits defined on substrates. At millimeter
frequencies even
the shortest wire bond can be 1/10 of a wavelength. A wire bond also acts like
a loop
having a relatively high parasitic inductance since it is spaced relatively
far from the
conductor or conductors carrying return current. Such a loop can introduce
unacceptable radiation loss.
Leaded devices have leads typically on 600 to 2500 micron centers. The leads
of these devices also pass through glass-to-metal, ceramic or plastic seals
which are
lossy at microwave frequencies. It is an advantage to eliminate leaded devices
and
1

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
wire bonds to reduce losses and parasitic inductance. Flip chip or bump bonded
chips
have extremely low and uniform parasitic inductances.
Other prior art circuit structures have used substrates on which are defined
the
relevant stripline or microstrip conductor resonant and feedback circuits to
be
connected to active three terminal devices. Microstrip circuits usually have
extra
dielectric losses and stored magnetic energy (i.e. parasitic inductance) in
the fields
between the signal lines on one side of the substrate and the ground plane on
the
other side of the substrate. It is an advantage to eliminate microstrip
circuits for high
frequency oscillators. Coplanar circuits have generally lower dielectric loss
because
less of the field is coupled to the dielectric and lower radiation loss
because fields are
concentrated between more closely spaced adjacent conductors.
Common-drain circuit configurations are often used in high frequency circuits
because of the improved gain-frequency characteristic provided. Parasitic
inductances
and capacitances in circuit paths associated with the common terminal of a FET
oscillator contribute to large delays and inductances associated with the gate-
drain
circuit. This causes frequency limitations due to the delay and inductance.
Losses in
the current paths connected to the common terminal can also result in excess
phase
noise.
It is known that large FET devices configured from arrays of small FET devices
give lower phase noise in oscillators than do the small FET devices by
themselves due
to the fact that injection-locked signals from elements of a FET array combine
coherently while noise combines statistically. However, assembling larger
devices
from arrays of small FETs can result in relatively iong signal paths to and
from the
device terminals. Longer paths have higher parasitic inductances and increased
radiation losses which reduce the benefits of the larger structures.
Combined circuit structures are known in which individual devices of
integrated
circuit device arrays are each connected to one or more subsets of tuning or
impedance-matching circuits to combine input and/or output signals for
impedance-
matching or power combining. An example of replicated circuit subsets
connected in a
circuit is described in U.S. Patent No. 5,623,231 issued to Mohwinkel et al.
incorporated herein by reference.
Mohwinkel et al. shows a common-source microwave amplifier chip having a
plurality of FETs and a plurality of associated terminals disposed at selected
locations
2

CA 02328942 2007-04-05
on a common face of the chip. An associated circuit is formed on a base
substrate, which has a plurality of terminals corresponding to the device
terminals on the chip. Input signal lines and output signal lines on the
substrate
are connected to associated terminals, with multiple input and output lines
being
combined.
Mohwinkel et al. shows common-source amplifiers with signal inputs from
combined circuits connected to gate terminals of multiple FET pairs. Signal
outputs from drain terminals of the FET pairs are combined on output signal
lines. If metalization patterns were connected from drain to gate to make
oscillators for such circuits, the patterns may have lengthy paths.
An example of a common-drain microwave circuit is shown in U. S. Patent
No. 4,135,168 issued to Wade. Wade shows a common-drain FET circuit having
source and gate connections to associated circuits on nearby substrates. The
drain connection is made to a large heat sink post that is not part of, nor is
coplanar to, the metalization of the source and gate circuits. The extended
return
paths for currents from gate to drain and from source to drain results in
significant series inductances and shunt capacitances.
In summary, large conventional common-source devices have problems
associated with losses and parasitic inductances associated with the large
physical layouts required to connect resonator and feedback circuits to the
input
and output terminals. In conventional common-drain circuits, the physical
layout
is also characterized by a long signal path for the return currents from gate
to
drain and from source to drain.
Prior art millimeter or microwave planar circuits have shown undesirable
bond wire and/or microstrip radiation loss associated with the inductance and
capacitance of long RF connections in gate-drain and source-drain circuits. It
would be an advantage to have a low-parasitic common-drain circuit structure
that could be used to construct oscillators having shorter connections and
lower
parasitics.
3

CA 02328942 2007-04-05
~
Summary of the Invention
Accordingly, the present invention provides millimeter-wave and
microwave circuit structures comprising: an insulating substrate surface
having a
connection region; first, second, and third coplanar conductors mounted on the
surface, each conductor having a proximal portion extending into the
connection
region, the first and second conductors having respective distal portions
extending in different directions from the connection region, and the third
conductor having a first distal portion extending adjacent to the distal
portion of
the first conductor and a second distal portion extending adjacent to the
distal
portion of the second conductor, the first and second distal portions of the
third
conductor being isolated from ground; and at least one active device having an
input signal control terminal, an inverting output signal-carrying terminal
and a
non-inverting output signal-carrying terminal, the signals in the output
signal-
carrying terminals dependent on the input signal in the input signal control
terminal, the active device being positioned in the connection region with the
input signal control terminal coupled to the first conductor, the non-
inverting
output signal carrying terminal coupled to the second conductor and the
inverting
output signal carrying terminal coupled to the third conductor.
The coplanar common-drain oscillator circuit structure of the present
invention provides markedly reduced parasitic inductances and capacitances
associated with the return lines of gate-drain and source-drain circuits.
Given a
particular three-terminal device type, this invention enables construction of
oscillators that operate at higher
3a

CA 02328942 2000-10-16
WO 99/56341 PCTIUS98/08234
frequencies with wider voltage tuning ranges and lower phase noise than that
of
previously realized oscillators.
- -
A first embodiment of the present invention is an elemental or single three-
terminal flip chip active device bonded to a planar substrate. A resonant
circuit
(resonator) having first and second coplanar conductors is formed on the
substrate.
The first and second conductors are coupled to the gate (control) terminal and
the
drain (inverting) terminals respectively by flip chip bonds to respective
first and second
proximal ends within a connection region. A feedback circuit having a third
and a
fourth coplanar conductor is also formed on the substrate. The third and
fourth
conductors are connected to the source (non-inverting) terminal and the common
drain
terminal respectively by other flip chip bonds to respective third and fourth
proximal
ends within the connection region. The first conductor and third conductors
are
disposed on one side of the second conductor and fourth conductors joined to
the
common drain.
A second embodiment of the elemental oscillator has the first (gate) and third
(source) coplanar conductors disposed on opposite sides of the coplanar second
and
fourth conductors joined to the common drain.
The first and second conductors of both embodiments form part of the resonator
coupled to the gate/drain device terminals. The third and fourth conductors of
both
embodiments form part of the feedback circuit coupled to the source/drain
device
terminals. In both instances, there are minimal parasitic inductances and
capacitances
associated with the coupling of the resonant and feedback circuits to the
respective
gate/drain and source/drain terminal pair.
Larger oscillators may be assembled by replication and mirroring of copies of
elemental oscillators and joining the copies together at adjacent sides. FETs
with
large active gate width are important for increasing output power and reducing
phase
noise. Impedance matching and power combining are provided by the combinations
of
elemental resonant and feedback circuits into coupled arrays of coplanar
circuits on
the substrate connected to corresponding arrays of three-terminal flip chip
devices.
One embodiment of the invention is an array of flip chip bonded common-drain
FETs having source and gate electrodes of adjacent pairs of devices. The
source and
gate electrodes of adjacent pairs are connected to respective spaced apart
common
source and gate terminals on opposite sides of the array. The electrodes of
the drains
4

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
of the connected pairs are disposed on opposite sides of the adjacent pairs.
The pairs
of source and gate connected devices may be disposed in a linear array with
each pair-
having at least one drain electrode connected to a device terminal common to
the drain
electrode of the adjacent pair.
Combined circuit resonator and feedback (or gate/drain and source/drain)
coplanar circuits are formed on an insulating substrate with a plurality of
conductor
terminals in each. Each combined resonator and feedback circuit may be
constructed
of a number of adjacent interconnected cells. The cells may be duplicates or
replicates of one another or may also be modified from cell to adjacent cell.
For this
discussion, the term cell is taken to mean one of a number of interconnected
sub-
circuit structures, including coplanar patterns formed on the substrate.
Each cell of each coplanar circuit may have a signal conductor terminal
between
adjacent signal or common-drain return terminals. Each cell of each circuit
thus has a
common-drain return terminal between it and each adjacent cell.
The device terminals and conductor terminals are arranged such that when the
flip chip array device terminals are bonded to the substrate conductor
terminals, the
resonator terminals are connected to two corresponding gate/drain terminals.
The
feedback terminals of the corresponding feedback cell are connected to the
corresponding source/drain terminals of the respective pair. The common-drain
return
terminals of the resonator and feedback cells are connected to the respective
common-
drains of the respective device pairs.
The cells of the resonator and feedback circuits of individual device pairs
may
thus be arrayed for impedance-matching or power combining or splitting
purposes at
either the resonator or feedback circuit. Dividing FETs into smaller composite
pairs
connected to such combined circuits allows higher frequency performance
capability
since the dimensions of the interconnected device pairs are smaller and hence
have
less device-level parasitic capacitance and inductance.
Common drain or common signal return lines between adjacent cells now act as
part of the impedance-matching network for each device pair, and provide the
advantage of minimizing stray parasitic inductance and capacitance.
Specific examples of the invention are shown in which the common-drain
terminals between adjacent pairs are separate or are connected by common
coplanar
ground segments on the same substrate as the resonator and feedback circuits.
5

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
Examples are also shown of resonator and feedback circuits which may "
altemately omit connection to one (or more) common-drain terminals in order to
form -
related resonator and feedback functions having different numbers of active
pairs.
One embodiment of a common-drain oscillator of the present invention includes
a gate resonator cell having an interdigitated capacitor. A particular
embodiment of
one gate resonator cell of this invention includes a coplanar frame which can
be
compared to a three-dimensional cavity resonator. The term planar cavity or
coplanar
cavity is used here as a two-dimensional analog of the three dimensional
cavity well
known in the high frequency oscillator art. A coplanar frame defines an
opening (the
coplanar analog to a three dimensional cavity) which encloses a coplanar
capacitor
formed of spaced apart elongate conductor segments arranged in two
interdigitated
capacitively coupled sets. The proximal ends of one set individually connect
to
separate input signal control terminals. Each input signal control terminal
connects to
the gate (i.e. controlling) electrodes of one adjacent FET pair in a composite
array of
FETs. The source (i.e. controlled ) electrodes of each pair of such gate-
connected
FETs are joined to at least one of the feedback terminals of a combined source-
drain
circuit.
The pairs of gate and source connected devices are arranged in an array such
that the drain (i.e. controlled) electrodes of each device of the pair are
oppositely offset
from the pair and generally orthogonal to the gate and source terminals of the
pair.
The drain electrodes of adjacent pairs of devices are connected to a common
device
drain terminal therebetween. A coplanar common-drain connection segment joins
all
the common-drain terminals. The drain segment is part of the coplanar cavity
frame
thus forming part of the resonator for the oscillator.
The source terminals are disposed on one side of the common-drain segment
and the gate terminals on the other. The source terminals are connected to
coplanar
feedback signal conductors parallel to and spaced apart from coplanar source
return
conductors of the source circuit. The source return conductors are connected
to the
common-drain segment forming controlled impedance functions for the source
circuit
with minimal parasitic.
A central coplanar conductor forming an inductive element at the frequency
range of interest, is connected between a junction of the distal ends of the
second set
of capacitor segments and one electrode of a tuning varactor. The other
electrode of
6

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
the varactor is connected to the cavity frame.
The capacitor, the inductive element, the varactor and the FET inputs thus
fQrm- -
the resonator to a grounded drain oscillator circuit.
The capacitor segments, the FETs, and the frame are configured to provide a
resonant coplanar cavity at a selected frequency, and further configured to
provide
equal signal current splitting between the central conductor and the gate
electrodes.
The parallel division of signal currents from the central conductor by the
coupled
capacitive segments provides improved oscillator output power and phase noise
performance for the composite array.
Brief Descriation of Drawincis
For a further understanding of the objects and advantages of the present
invention, reference is made to the following detailed description, taken in
conjunction
with the accompanying drawings, in which like parts are given like reference
numerals
and wherein;
Fig. 1 is a simplified plan view of an elemental coplanar common-drain
oscillator
circuit in accordance with the present invention.
Fig. 2 is a plan view of an alternate embodiment of an elemental coplanar
common-drain oscillator circuit.
Fig. 3 illustrates a plan view of a pair of devices connected in a common-
drain
oscillator coplanar circuit array in accordance with the invention.
Fig. 4 illustrates an embodiment of a combined cell oscillator circuit array
50 in
accordance with this invention.
Fig. 5 depicts an alternative example of a coplanar common-drain oscillator
array in accordance with the present invention.
Fig. 6 portrays yet another embodiment of a coplanar common-drain oscillator
array in accordance with this invention.
Fig. 7 shows an embodiment of a common-drain oscillator circuit array in
accordance with the present invention, having an RF open circuit terminated
gate-drain
resonator.
Fig. 8 shows an embodiment of a common-drain oscillator circuit array in
accordance with the present invention, having an RF short circuit terminated
gate-drain
resonator.
7

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
Fig. 9 is an equivalent circuit schematic of the gate-drain resonator circuit
of Fig.
10. - -
Fig. 10 is a plan view of an interdigitated capacitor coplanar cavity
resonator of
an embodiment of a common-drain oscillator in accordance with this invention.
Fig. 11 depicts a double resonator embodiment of a common-drain interdigitated
capacitor coplanar cavity resonator oscillator in accordance with this
invention.
Modes for Carrying Out the Invention
The present invention provides a circuit structure in which one portion of a
first
conductor is connected to the control input of an active device and is
positioned
adjacent to another conductor connected to an inverting terminal of the active
device.
Another portion of the first conductor is positioned adjacent to yet another
conductor
connected to the non-inverting terminal of the active device. Such a structure
is shown
generally as 20 in Fig. 1. Circuit structure 20 includes an insulating
substrate 22
having a planar surface 22 a. A flip chip integrated circuit 24 (drawn as
though
transparent) defines a connection region 24 a, inside the periphery of circuit
24 and
indicated by dashed lines. The circuit 24 includes a three-terminal active
device 26
configured to be flip chip bonded to the surface 22 a.
Three continuous coplanar conductors are formed on the surface 22 a and
connected between respective terminals. A second conductor 32, is spaced away
from
and disposed adjacent to one side of a first conductor 30. The first conductor
30
extends from a proximal flip chip connection 30 a at a flip chip device
terminal 38 to
opposed distal ends 30 b and 30 c on opposite sides of the device 26.
Conductor 32
extends from a proximal end 32 a to a distal end 32 b in the same direction as
the
distal end 30 b of the first conductor 30.
Another conductor 34 is disposed adjacent to the conductor 30. Conductor 34
extends from a proximal end 34 a spaced away from and adjacent to terminal 30
a to a
distal end 34 b in the same direction as the distal end 30 c of the conductor
30.
Proximal end 34 a is flip chip bonded to device terminal 40 within the
connection
region 24 a. Conductors 32 and 34 are disposed on the same side of conductor
30.
The device 26 includes an input signal control electrode 26 a, an inverting
signal carrying electrode 26 b, controlled by the electrode 26 a and a non-
inverting
signal carrying electrode 26 c controlled by the control signal at electrode
26 a. The
8

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
inver ting electrode 26 b carries a signal having an inverted relationship to
the control
signal of electrode 26 a. The electrodes 26 a, 26 b and 26 c are connected to
the
device terminals 36, 38 and 40 which are flip-chip bonded to the conductor
terminals
32 a, 30 a, and 34 a respectively.
The device 26 could be a GaAs FET, a bipolar junction transistor, a PBT, an
HBT or the like. In the case where the device 26 is a FET, the input signal
control
terminal 36 is the gate, the inverting terminal 38 is the drain and the non-
inverting
terminal 40 is the source. In the following discussion, a GaAs FET is assumed.
The description of the present invention is cast in terms of a control
electrode
which controls the current in an inverting and non-inverting electrode. The
description
can equally be cast in terms of voltage control as an electrical circuit may
be
represented in either voltage or current source equivalent by means of
Thevenin's
theorem ("Principles of Circuit Synthesis", Kuh and Pederson, page 51,1959,
McGraw-
Hill Book Company, New York).
The terminals 36, 38 and 40 are located within the connection region 24 a. The
outline or periphery of a flip chip device defines the area over which flip
chip bonding
of the device may be accomplished.
The size, shape and spacing of the coplanar conductors 30, 32 and 34 may be
arranged to present controlled impedance characteristics to the device
terminal pairs
36, 38 and 38, 40 respectively. The terminal 38 is a common terminal to the
coplanar
circuits formed by the adjacent pairs of conductors (30 a, 30 b), (32 a, 32 b)
and (30 a,
c) , (34 a, 34 b). There is thus minimal parasitic inductance and capacitance
associated with the coplanar circuit paths from proximal ends 30 a, 32 a to
distal ends
30 b, 32 b and from 30 a, 34 a to distal ends 30 c, 34 b.
25 Two coplanar conductor circuits 42, 44 are configured on the substrate 22
by
conventional means such as plating, masking and etching or by deposition and
patterning. The first circuit 42 is connected as an extension of the coplanar
conductor
ends 30 b and 32 b. The second circuit 44 is connected as an extension of the
coplanar conductor ends 30 c and 34 b.
30 In a common drain FET oscillator embodiment of the present invention, the
circuit 42 may be a resonator circuit, and the circuit 44 may be a feedback
circuit
having a common drain connection at the terminal 30 a. This provides minimal
parasitic inductance and capacitance between the device 26 and the two
circuits 42,
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44 by arranging the coplanar connecting conductors 30, 32 and 30, 34 as part
of the
coplanar circuits.
Bias connections are not shown, but may be accomplished with bond wires or
air bridges or other conductive traces having RF blocking circuit elements
between the
respective terminals and suitable power supplies.
The coplanar conductors 30, 32 and 30, 34 may be electromagnetically coupled
one to another to form part of the respective resonator and feedback circuits
42, 44.
The coupled portions 30, 32 and 30, 34 may include simple coplanar rectilinear
conductors of uniform width and spacing and combinations thereof. Additional
components may be included, such as chip capacitors, resistors or inductors or
the like
which are mounted on the substrate 22 and connected by bond wires or air
bridges or
other coplanar flip chip terminal connections.
The drain terminal 38 forms a common RF connection between the resonator 42
and the feedback circuit 44 at the connection point 30 a. The conductors 30,
32 and
30, 34 may be made arbitrarily short for a given source, drain and gate
terminal layout,
thereby minimizing parasitic inductances between the resonator circuit 42 and
the
gate-drain connections and between the feedback circuit 44 and the source-
drain
connections.
The parasitic elements of the active device are not shown, but are known to
form part of the equivalent circuit of the oscillator. A flip chip active
device inherently
has very low inductive parasitic elements compared to beam lead or wire bonded
devices. The parasitic elements of most importance are the capacitances
between
terminals, e.g., gate-drain, gate-source and drain-source, not shown here but
well
known to practitioners in the art.
The impedance characteristics of coplanar transmission lines or coplanar
waveguide (CPW) can be held constant as the dimensions of the CPW are scaled
up
or down to connect between coplanar circuits and small active components. It
is this
characteristic, along with the separation of the three-terminals into the
resonator pair
and the feedback pair, having a common drain (inverting) terminal, which
minimizes
parasitic inductances and radiation losses in the connections to the three-
terminal flip
chip active device.
With regard to Fig. 2, there is shown an alternative embodiment of the present
invention indicated by the numeral 20' in which like elements have like
reference

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numbers. The oscillator 20' includes all the elements of the oscillator of
Fig. 1; in
addition, a segment 30 d of the conductor 30 passes between the terminals 36
and40- -
to connect to the feedback circuit 44 at distal end 30 c' on the opposite side
of
conductor 34. In this case also, there is minimal parasitic inductance in the
conductors
30, 32 and 30, 34.
The resonator and feedback circuits 42, 44 may be selected from, or be a
combination from the group of circuits including coplanar slotline circuits,
slot strip
circuits, coplanar waveguide circuits, coplanar strip circuits, coplanar
transmission line
circuits and other circuits employing coplanar conductors.
Larger arrays of circuits may be made by replicating and joining adjacent
mirror
images of the elemental circuits shown in Figs. 1 and 2. Fig. 3 shows an
example of
combining a pair of devices as instances of replication and joining mirror
image copies
of patterns of Fig. 1 or 2, and is described here below. Figs. 4-6 are
instances of
replication and joining mirror image copies of patterns of Figs. I or 2 as
described
below.
Referring to Fig. 3, there is shown another embodiment 20" of the circuit
structure shown in Fig. 1 in which like elements have the same reference
numbers. An
additional three-terminal device 28 is defined on the flip chip circuit 24.
Device 28 has
a gate electrode 28 a, and source electrode 28 c connected to the same control
terminal 36 and non-inverting terminal 40 respectively. An inverting or drain
electrode
28 b of device 28 connects to a second common drain flip chip terminal 39.
A fourth common conductor 30' has opposed distal ends 30 c' and 30 b' joined
at a common proximal point 30 a'. The distal end 30 c' connects to the
feedback circuit
44, and the distal end 30 b' connects to the resonator 42. The conductor 30'
is
connected to the flip chip terminal 39 at the common point 30 a'. A conductor
segment
d may be located between the gate terminal 36 and the source terminal 40 to
join
the two common drain terminals 38, 39.
The topology of the coplanar circuit terminals, coplanar conductors and the
device electrodes and terminals may be symmetrically arranged as shown in Fig.
3.
30 Symmetry of the topology urges signal currents to be divided and summed
equally in
associated device terminals and conductors. It is generally necessary for
equal
division of gate signal currents from the gate conductor 32 into the gate
electrodes 26
a and 28 a, and for equal summation of drain and source signal currents from
the drain
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and source electrodes 26 b, 28 b and 26 c, 28 c into the drain and source
conductors
30, 30' and 34 respectively.
The resonator 42 of Fig. 3 is configured with combined circuits including
conductors 30, 32 and 30', 32. The feedback circuit 44 of Fig. 3 is also
configured with
combined circuits including conductors 30, 34 and 30', 34. The size, shape and
spacing of the conductors 30, 32, 34, 30' and the electrodes of devices 26 and
28, in
combination with the circuits 42, 44 may be arranged to direct currents to
flow equally
in respective gate, drain and source electrodes.
Larger arrays of devices may be constructed in accordance with the invention.
With reference to Fig. 4, there is shown an embodiment of an array of
elemental
circuits to form a common-drain oscillator circuit 50 made in accordance with
the
invention. Oscillator 50 has a high Q gate-drain resonator 102 circuit
connected to
the gate-drain side of a FET array. Oscillator 50 includes a flip chip
integrated circuit
54 having a planar face 56. The circuit 54 includes a longitudinal array 52 of
J pairs
of adjacent three-terminal active devices, enumerated 1, 2, .., 2j-1, 2j, ....
2J. J is an
integer selected, for example, for the desired power output, size or phase
noise
relative to the signal of the oscillator 50, or other design consideration,
and j is an
index ranging from I to J.
For the purpose of this description, the active devices can be considered to
be
GaAs FETs. Other devices may also be used.
For descriptive purposes, another integer index, I, enumerates each device and
ranges from 1 to 2 J. Each pair, j, corresponds to individual devices 52 (I),
52 (1+1)
where I= 2j-1. Each device, I, includes a respective gate or current control
electrode
57 (I), a spaced apart drain or inverted phase current-carrying electrode 59
(I), and a
respective spaced apart source or in phase current-carrying electrode 64 (I).
The
respective device gate, drain and source electrodes are connected to
corresponding
gate terminals, 58(j) of gate terminal array 58, drain terminals 62(j) of
drain terminal
array 62, and source terminals 66(j) of source terminal array 66. The gate,
source
and drain terminals 58, 62 and 66 are defined on the face of the array 56 and
are
described further below.
In the descriptions hereinbelow, FET array terminals are defined to be
coplanar
such that they may be mounted to corresponding substrate conductor terminals
disposed on an adjacent planar surface, e.g., the mounting plane of a
substrate, by
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means of intermediate solder bumps, balls or the like.
The boundary of the circuit 54a defines a connection region enclosing the FFT-
-
electrodes and FET terminals. The circuit 54a is generally rectangular with
bilaterally
opposed sides and adjoining ends.
The first pair of devices 52 (1) and 52 (2) have each gate electrode 57 (1)
and
57 (2) connected to an electrically shared gate terminal 58 (1) disposed
therebetween.
The second pair of devices (not shown) have each gate electrode 57 (3) and 57(
4)
connected to a shared gate terminal 58 (2) disposed therebetween. Each
successive
pair of devices 52 (2j-1) and 52 (2j) has a respective gate electrode 57 (2j-
1), 57 (2j)
connected to a shared gate terminal 58 (j) disposed between the respective
devices.
The gate terminals 58 (j) are aligned such that the gate terminal array 58 is
disposed parallel to one side of the FET array 52. The gate electrodes 57(I)
are
commonly considered as input electrodes, although the oscillator's output
power may
be extracted from either the gate side or the source side. The one side of the
device
array 52 having the gate terminals array 58 is considered the resonator side.
The source electrodes 64 (2j-1) and 64 (2j) of the adjacent devices 52 (2j-1)
and
52 (2j) may be similarly connected to shared source terminals 66 Q) aligned to
form a
source terminal array 66. The source terminal array 66 is aligned parallel to
the array
52 and disposed on the opposite or feedback side of the array 52.
The drain electrodes 59 (2j-1) and 59 (2j) of each pair of gate and source
connected devices 52 (2j-1) and 52 (2j) are disposed offset from and disposed
between the respective gate and source electrodes, and located toward the
opposed
ends of the device array 52.
The first drain electrode 59 (1) is disposed at the one end of the array 52
and
the last drain electrode 59 (2J) at the opposed end of array 52. The first
drain
electrode 59 (1) is connected to a first drain terminal 62 (1) disposed at the
one end of
the array 52. The last drain electrode 59 (2J) is connected to a last drain
terminal 62
(J+1) disposed at the opposed end of the array 52.
Adjacent pairs of devices, j and j+1, are spaced apart such that the drain
electrode 59 (2j) of the second device 52 (2j) of the first pair, j, and the
drain electrode
59 (2j+1) of the first device 52 (2j+1) of the second pair, j+1, are adjacent
and
connected to a shared-drain terminal 62 {j+1) between the adjacent pair, j and
j+1.
The drain terminals 62 (k), 1< k< J+I, are aligned to form a drain terminal
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WO 99/56341 PCT/US98/08234
array 62 parallel with the sides of the array 52. The array 62 of drain
terminals is
disposed within the connection region 54 a between the gate terminal array 58
and.the
source terminal array 66.
An insulating substrate 82 having a planar face 86 includes three
interdigitated
longitudinal arrays 90, 92 and 94 of gate conductor segments 90 (j), drain
conductor
segments 92 (k), and source conductor segments 940), corresponding to the
terminal
arrays 58, 62 and 66 of the J pairs of devices above, where 1:5 k< J+1 and 1<
j< J,
as before.
Each drain conductor segment 92 (j) includes a drain conductor terminal 96 (j)
located within the connection region 54 a, generally centrally between opposed
distal
ends 92a and 92b. Each gate and source conductor segment 90 (j) and 94 (j) has
respective proximal and distal ends. Each gate and source conductor segment 90
(j)
and 94 (j) includes a respective gate conductor terminal 98 (j) and source
conductor
terminal 100 (j) connected to the respective proximal ends within the
connection
region 54 a. The respective gate conductor terminal 98 (j) and source
conductor
terminal 100 (j) are disposed adjacent between the drain conductor terminal 96
(j) and
drain conductor terminal 96 (j+1). A common-drain conductor segment 92 c Q)
may be
connected between the shared drain terminals 96 (j) and 96 (j+1) of each pair,
j, to
form a continuous backbone, 92 c. For all device pairs j = 1 to J.
The respective drain conductor terminal 96 (j), gate conductor terminal 98 (j)
and source conductor terminal 100 (j) are located such that, when the face 56
of flip
chip circuit 54 is aligned to the face 86 of the substrate 82, conductive
contact
between respective conductor terminals and chip terminals (e.g., gate
conductor
terminal 98(j) to gate electrode terminal 58(j), drain conductor terminal
96(j) to drain
electrode terminal 62(j), and source conductor terminal 100(j) to source
electrode
terminal 66(j) may be made by conductor interconnections such as conductive
bumps
or balls (not shown) placed therebetween.
Each respective gate conductor segment 90 (j) and source conductor 94 (j)
segment extends distally and oppositely away from the respective gate
conductor
terminal 98 (j) and source conductor terminal 100 (j) to the respective distal
ends.
The array of drain conductors 92 is aligned such that the distal end 92a (j)
of
conductor 92 0) extends in one direction away from the central terminal 96
(j), spaced
away from and adjacent to the gate conductor 90 (j) and the gate terminal 98
(j) . The
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distal end 92b (j) of conductor 92 (j) extends in the opposite direction away
from the
central terminal 96 (j), spaced away from and adjacent to the source conductor
94 (}) -
and source terminals, 66 (j). The gate conductor array 90 and source conductor
array
94 are arranged so that gate conductor 90 (j) and source conductor 94 (j) are
spaced
between drain conductors 92 0) and 92 (j+1).
A first coplanar combined resonator circuit 102 is also formed on the
substrate
surface 82 and connected to the distal ends of the gate segments 90 Q) and
drain
segments distal ends 92a (j). A second coplanar combined feedback circuit 104
is
similarly formed on the substrate surface 82 and connected to the distal ends
of the
source segments 94 (j) and the drain segment distal ends 92b (j).
Each gate segment 90 (j) in combination with drain segment 92 Q) forms a
portion of the combined circuit 102. Each gate segment 90 (j) in combination
with
drain segment 92 (j+1) forms another portion of the combined circuit 102.
Each source segment 94 (j) in combination with drain segment 92 (j) forms a
portion of the combined circuit 104. Each source segment 94 (j) in combination
with
drain segment 92 (j+1) forms another portion of the combined circuit 104.
Each conductor segment of the arrays 90, 92, 94 is dimensioned with width, Wi,
and length, Li. Between each pair of adjacent segments, I, j, there is spacing
Sij. The
dimensions, Li and Wi, of the individual segments of the arrays 90, 92, 94 and
their
respective spacing, Sij, to adjacent segments may be selected to provide
desired
impedance transformation (matching), series self inductance, coupling
inductance and
capacitance and shunt capacitance to adjacent segments and to adjacent common-
drain segments and to be incorporated as part of the respective gate-drain 102
or
source-drain 104 circuits.
The gate terminal array 58 is disposed on one side of the drain terminal array
62 and the source terminal array 66 is disposed on the opposite side of the
drain
terminal array 62. Conductive access along the surface of the substrate to any
common-drain terminal 62 0) is thus freely available from either side of the
drain
terminal array 62. This is important for minimizing parasitic inductances and
capacitances communicating with a common-drain terminal connected as part of a
common-drain connection for tuning or impedance transformation circuits
connected to
either the gate-drain or source-drain terminals of transistors in the array
52.
The circuits 102 and 104 may be selected from, or be a combination selected

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from the group of circuits including coplanar slotline circuits, coplanar
slotline strip
circuits, coplanar waveguide circuits, coplanar strip transmission line
circuits and -
other circuits employing coplanar conductors.
The circuits 102 and 104 and the dimensions and spacing of the conductor
segments may be selected to provide nearly equal amplitude and phase current
signals to each gate electrode 57 (I) such that the common-drain connections
62 (j) are
effectively in phase.
In the oscillator embodiment 50 of the present invention, the gate resonator
circuit 102 determines the frequency and may be arranged to provide input
impedance
transformation to the respective gate-drain segment pairs 90 Q), 92a (j), and
90 (j),92a
(j+1). The source circuit 104 is a drain-source feedback combined circuit that
provides
feedback and drain-source capacitance augmentation between respective source
and
drain segment pairs 94 (j), 92 (j) and 94 Q), 92 0+1).
Output power may be extracted from the oscillator 50 by either or both
inductive
and capacitive coupling to one or more of the conductive segments 90 (j), 92
0) or 94
(j), or by bonding a lead to one or more segments (not shown). Parallel
combinations
or push-pull combinations of multiple pairs of the devices 52 (I), may be
enabled by
adding cross coupled resistors between adjacent pairs, and by suitably
combining the
power output of adjacent pairs with Wilkenson combiners and the like.
FETs with symmetrical source and drain structures, i.e. those having channel
dimensions and doping concentrations between the source and gate identical to
those
between gate and drain are typically made with central terminal pads
designated as
source pads located between the gate and drain pads. In order to use such FETs
in
embodiments of the present invention, the voltage bias to the FET must be
changed to
enable the central pads to be operated as common-drain instead of common-
source.
Some FETs may have asymmetrical source and drain structures, i.e., having
modified lateral geometry or doping profiles to increase drain-source voltage
breakdown without increasing source resistance. The metal layout on such
asymmetrical FETS may be arranged so that the drain electrodes may be
centrally
located with respect to the gate and source terminals to be bonded to the
respective
substrate conductor terminals.
The drain conductor segment 92 c(j) may be omitted in cases where decreased
coupling capacitance is desired between drain and gate or drain and source.
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The drain backbone provided by the continuous connection of segments 92 c(j)
provides a shared conductor to both the gate circuit 102 and the source
circuit 104 for --
suppressing unwanted oscillation modes. One or more intermediate drain
conductor
segments 92 c(j) may also be deleted as required by the frequency determining
circuitry 102 and 104.
Push-pull or series outputs may be obtained by suitably combining signals in
the
feedback source circuit 104 as is well known in the art. Larger arrays may be
constructed by contiguous replication of such combinations to build
oscillators having
better phase noise.
The common-drain terminal connections, 96 0), interposed between the gate
and source terminal connections, 98 (j), 100 (j), and connected to the drain
conductor
segments 92 (j) extending distally along with the respective gate and source
conductor
segments 90 (j), 94 (j), provided by this invention thus enable multiple cells
of common-
drain transistors to be connected with tuning, combining and matching circuits
at
source-drain and gate-drain connections with minimal loss and delay
contributed by
the excess circuit path lengths along the common-drain conductor segments.
With reference to Fig. 5, there is shown an oscillator 300 which is a variant
of
the oscillator 50 of Fig. 4. The oscillator 300 includes an integrated circuit
chip 302
disposed as a linear array of adjacent pairs of FETs. The array 302 has
opposed ends
defining a gate-drain side and an opposed source-drain side between the
opposed
ends and defines a connection region 302 a.
A substrate 301 having a planar face 301 a has a coplanar gate drain tuning
circuit 305 and a source-drain feedback circuit 307 formed thereon. The gate-
drain
tuning circuit 305 is comprised of coplanar drain conductors 312(1), 312(3),
312(5)
connecting to shared drain terminals 306(1), 306(3) and 306(5) within the
connection
region 302 a. Opposite distal ends 312(1)a, (2)a, (3)a and 312(1)b, (2)b, (3)b
extend
in different directions away from the contacts 306(1), (3), (5).
The drain conductors 312(1), 312(3), 312(5) are separated by gate conductors
314(1) and 314(2) respectively. The gate conductors 314(1), 314(2) have
proximal
and distal ends, the proximal ends each joined to one of the shared ends of
oppositely
directed branches 318(1) a, 318(1) b and 318(2) a, 318(2) b. The other ends of
branches 318(1) a, 318(1) b, 318(2) a and 318 (2) b are connected to shared
gate
terminals 308(1), 308(2) and 308(3), 308(4) respectively. Coplanar tuning
elements T1
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are disposed between conductors 312(1), 314(1) and 312(3), 314(1) and 312(3),
314(2) and 314(2), 312(5). The coplanar drain conductors 312(1), 312(3),
312(5) and- -
the gate conductors 314(1) and 314(2) form part of the multi-conductor
coplanar
waveguide gate-drain circuit 305.
The drain conductors 312(1), 312(3), 312(5) extend toward the source-drain
circuit 307 to distal ends 312(1)b, 312(3)b, 312(5)b. Two additional drain
conductors
312(2) and 312(4) are connected at proximal ends to additional shared drain
terminals
306(2) and 306(4) within the connection region 302 a. Conductors 312(2) and
312(4)
extend distally toward and form part of the source circuit 307.
Coplanar source conductors 316(1, 2, 3, 4) having proximal and distal ends are
respectively spaced between the pairs of coplanar drain conductors 312(1),
312(2);
312(2), 312(3); 312(3), 312(4); and 312(4), 312(5). Spaced apart tuning
elements T2
are disposed between the coplanar source conductors 316(1, 2, 3, 4). The
proximal
ends of source conductors 316(1, 2, 3, 4) are connected to shared source
terminals
310(1, 2, 3, 4) respectively within the connection region 302 a. Distal ends
of source
conductors 316 are connected to a shared field metal 320. The coplanar drain
conductors 312(1,2,3,4,5) and source conductors 316(1, 2, 3, 4), field metal
320 and
tuning elements T2 form part of the multi-coplanar waveguide feedback circuit
307.
The planar chip array 302 has four pairs of FETs, each pair with shared gates
and shared sources flip chip bonded to respective shared gate-source terminal
pairs
308(1), 310(1); 308(2), 310(2); 308(3), 310(3); 308(4), 310(4). Each pair of
FETs has
the respective drains flip chip bonded to adjacent drain terminal pairs
306(1), 306(2);
306(2), 306(3); 306(3), 306(4); 306(4), 306(5).
A coplanar common-drain backbone 312 connects between the coplanar drain
conductors 312(1), 312(2), 312(3), 312(4), 312(5). This forms an effective RF
common for the oscillator circuit 300.
Output power, Po, can be coupled out by a printed trace, a lead wire or an air
bridge, a segment of transmission line or the like, coupled to the gate
circuit 305 or
source circuit 307.
The dimensions, W, L, and spacing, S, of the segments 312, 314, 316, 318 and
tuning elements T1, T2 may be selected to achieve the desired feedback and the
desired tuning frequency.
Alternative tuning circuits may be used in place of the multi-coplanar
waveguide
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305 of Fig. 5 for other embodiments of the present invention, such as a single
open-
circuit half wave or quarter wave transmission line or a shorted quarter-wave -
resonator (Colpitts-like).
An alternative example of a coplanar common-drain oscillator 400 in
accordance with the present invention is shown with regard to Fig. 6 where
like
elements have like reference numbers as in Fig. 5.
The proximal ends of gate conductors 314 are shorted to a conducting frame
320' having an interior which surrounds gate resonator circuit 305', the FET
array 302
and source circuit 307'.
Longitudinal outer drain conductor segments 312'(l)a,b and 312'(3)a,b replace
the previous outer drain segments 312(1) and 312(5) of Fig. 5. Opposite distal
ends of
segments 312'(1)a and 312'(3)a connect between opposed ends of vertical end
segment 320'a and the drain terminals 306(1) and 306(5) respectively. Opposite
distal
ends of segments 312'(1)b and 312'(2)b connect between opposed ends of
vertical
end segments 320'b and the drain terminals 306(1) and 306(5) respectiveiy.
This
forms the continuous conducting frame 320'.
The gate conductors 314(1), 314(2) have the distal ends shorted to the end
segment 320'a. The central drain conductor segment 312(3) also has the distal
end
shorted to the end segment 320'a, forming a shorted quarter-wave multi-
coplanar
waveguide resonator with the adjacent gate segments 314(1), 314(2) and the
outer
drain segments 312'(1)a and 312'(3)a.
The source circuit 307' is surrounded by the interior of the outer drain
conductor
segments 312'(1)b and 312'(3)b having respective distal ends connecting to the
opposed ends of frame segment 320'b. The source terminals 310(1) and 310(2)
are
connected to proximal ends of source branches 322(1)a, 322(1)b and the source
terminals 310(3) and 310(4) are connected to proximal ends of source branches
322a(2)b, 322(2)b respectively.
Distal ends of branches 322(1)a, 322(1)b are joined together at a proximal end
of source conductor 316'(1). Distal ends of branches 322(2)a, 322(2)b are
joined
together at a proximal end of source conductor 316'(2). The source conductor
316'(1)
is centrally and uniformly spaced between the outer ground drain segment
312'(1)b
and the central drain segment 312'(2). The source conductor 316'(2) is
centrally and
uniformly spaced between the drain segment 312'(3)b and the centrai drain
segment
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312'(2).
Source tuning elements T2 are collinear with and spaced between the -
respective distal ends of source segments 316'(1) and 316'(2) and the interior
of frame
segment 320'b. This forms the multi-coplanar waveguide augmented source-drain
capacitance feedback circuit 307'.
The source circuit 307' may also be implemented as shorted coplanar strip
transmission lines or shorted or open parallel slotlines with lengths adjusted
to provide
a desired capacitance between source and drain at the desired oscillation
frequency.
It can be seen through the above examples that various configurations of
common-drain oscillator circuits may be developed by modifying the gate and
source
circuits. It is also clear that additional subsections may be added to the FET
array with
corresponding circuit subsections to increase the power output and/or improve
the
phase noise.
Coupling elements such as T1 and T2 can be used for tuning and removing
power from the oscillator. The common-drain oscillators of this invention can
operate
in push pull with similar coupling as shown, or may be operated in-phase with
injection
locking of the two halves by in-phase coupling as is well known.
Alternative coplanar common-drain structures which can accommodate FET
arrays having electrode source terminals located between the gate electrode
and drain
electrode terminals are also included in the present invention. Two examples
are
shown with reference to Figs 7 and 8.
Fig. 7 illustrates a portion of a coplanar common-drain oscillator 500 having
a
FET array 501 bonded to a conductive patterned substrate 503 as previously
described. The array 501 defines a connection region 501 a thereon. The
oscillator
500 includes a coplanar waveguide gate resonator circuit having open-circuit
terminations described below.
The FET array 501 has source, drain, and gate electrode arrays 510, 512, 514
connected to corresponding array terminals 510', 512', 514' (not shown). The
array
terminals are connected by solder bumps or balls to respective source, drain
and gate
conductor terminals 510, 512, 514 mounted on the substrate 503.
The source conductor terminals 510(1, 2, 3) are connected to proximal ends of
parallel coplanar source conductor segments 504(1, 2, 3) respectively. The
segments
504(1, 2, 3) extend distally in one direction outward from the array 501 to
terminate at

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equal length open-circuit distal ends.
The drain conductor terminals 512(1, 2) are disposed along one side of the
array 501 and connected to proximal ends of parallel coplanar drain conductor
segments 506(1, 2)b respectively. The drain conductor segments 506(1, 2)b are
disposed symmetrically between the source segments 504(1,2) and 504(2, 3)
respectively. The drain conductor segments 506(1, 2)b extend distally in the
one
direction from the array.
The source conductor segments 504 and the drain conductor segments 506b
form the source-drain multi-coplanar waveguide feedback circuit for the
oscillator 500.
Augmentation of the drain-source capacitance may be provided by additional
length of
the conductors 504 and 506 or by microwave integrated circuit (MMIC) chip
capacitors
or the like.
The drain conductor terminals 512(1, 2 )are joined to a proximal base end of y-
shaped coplanar conductor branches 508 a, b respectively within the connection
region 501 a. Branches 508 a, b have branching arms 508(1, 2)a and 508(1, 2)b
having distal ends, which diverge distally from the base end 508 a, b toward
the other
side of the array 501.
Branches 508(1)a and 508(2)a are disposed between the gate terminal 514(1)
and respective source terminals 510(1) and 510(2). Branches 508(2)a and
508b(2)
are disposed between the gate terminal 514(2) and the respective source
terminals
510(2) and 510(3). The distal end of the branch 508(1)a joins a proximal end
of a
drain conductor segment 506(1)a within the connection region 501 a. The distal
end of
the branch 508(2)a joins a proximal end of a drain conductor segment 506(2)a.
The
distal end of the branch 508b(1) also joins the proximal end of segment
506(2)a. The
distal end of the branch 508b(2) joins a proximal end of a drain conductor
segment
506a(3).
The gate terminals 514(1, 2) are connected to proximal ends of parallel gate
conductor segments 502(1, 2) respectively. Segments 502(1,2) extend distally
away
from the other side of the array.
The conductor segments 506(1,2)a are disposed around the gate conductor
segment 502(1). The conductor segments 506(2, 3)a are disposed around the gate
conductor segment 502(2). Segments 506(1, 2, 3)a extend distally from their
proximal
ends away from the array 501.
21

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
Segments 506(1, 2, 3)a and 502(1,2) form part of an open-circuit terminated
multi-coplanar waveguide gate tuning circuit for the common-drain oscillator
500. .-
The contiguous conductor structure 512, 508, 506 defines a common-drain
connection for the FETs of the array 501, separating the gate and source
terminals
from one another. Inverted phase RF signals provided by the drain electrodes
of the
array 501 FETs are thus combined with minimum path length and minimum
parasitic
inductances and capacitances for return to respective gate or source circuits.
Circulating gate-drain currents for each gate-drain conductor pair such as
506(1)a, 506(2)a and 502(1) have only the short drain conductor segments
508(1)a,b
coupling to circulating source-drain currents for each source-drain conductor
pair, such
as 504(1), 512(1) and 504(2).
Regarding Fig. 8, there is shown an embodiment of a common-drain oscillator
circuit 600 in accordance with the present invention, having an RF short-
circuit
terminated gate tuning circuit with like elements having iike reference
numbers as
shown in Fig. 7.
An end conductor segment 522 joins the distal ends of the drain conductor
segments 506(1, 2, 3)a. The end conductor segment 522 is connected to the
distal
ends of gate conductor segments 502(1,2) by RF coupling capacitors 520(1,2)
respectively. The capacitors 520 may be chip capacitors, thin film capacitors
or the
like which may provide tuning elements or essentially zero RF impedance
between the
distal ends of segments 502(1,2) and the conductor segment 522.
The drain-source circuit may also be a resonator circuit in which the
capacitive
feedback between source and drain is provided when the drain-source resonator
is off
resonance; above resonance for parallel type resonance, and below resonance
for
series type resonance.
Varactor tuning of the common-drain oscillator 600 can be achieved by
electromagnetic coupling of a varactor in either the gate-source tuning
circuit or in the
source-drain tuning circuit.
A broader tuning range can be achieved by tuning in both the gate-drain
circuit
and the source-drain circuit. In the common-drain configuration of the present
invention, low inductance connections from the gate or source conductors and
the
common-drain conductors to single or multiple varactors are easily made.
Another embodiment of the present invention is illustrated with reference to
22

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
Figs. 9 and 10 of a common-drain oscillator having an interdigitated capacitor
resonator gate circuit. Fig. 9 is an equivalent circit schematic 700 of the
oscillator of -
Fig. 10. Equivalent circuit 702 represents a gate-drain (input) resonator of
Fig. 10.
Equivalent circuit 704 represents the gate-drain circuit of the FETs of Fig.
10 with a
source-drain feedback circuit connected and is described further herebelow.
Cl is the capacitance of the interdigitated coplanar cavity resonator
capacitor
described below and Cg the equivalent capacitance of the equivalent input
(gate-drain)
combination 704 of the FETs with the source-drain circuit connected (the
combination
shown as 803, 825(1-5), 826(1-4), 830(1-4) and 845(1-4) in Fig. 10).
The conditions for oscillation of the circuit 700 are that the equivalent loss
resistance, here represented by re of gate resonator input circuit 702
comprised of CV,
Leq, re and Cl, must be smaller in magnitude than the equivalent small signal
series
negative resistance of input 704 of the active devices (in this case, FETs).

represents the capacitance of a tuning varactor, connected between the gate
circuit
and the common drain, Leq the series inductance of the input circuit 702. C,
is the
capacitance of the interdigitated coplanar cavity resonator capacitor
described below
and Cg the capacitance of the equivalent input 704 of the FETs connected to
the
source-drain circuit of Fig. 10.
If the capacitance of C, is too small, there will be too little tuning range
afforded
by varactor Cõ or, if Cõ is made smaller to increase the tuning range, it is
possible that
the increased series resistance of the varactor will cause re to be larger in
magnitude
than ri (the equivalent negative input resistance of the FETs as connected to
the
source-drain circuit of Fig. 10), thereby preventing oscillation.
If the capacitance of C, is too large, such that resonator 702 is coupled too
strongly to the input 704 to the FETs, the noise-induced reactance
fluctuations in C9
will cause large fluctuations in oscillation frequency resulting in excessive
phase noise.
The Leq of the input circuit 702 must be reasonably low to allow high
frequency
operation. If the return path for currents circulating in the input circuit is
too long,
series inductance will be too large to achieve high tuning frequencies when C,
is in its
desired range.
A coplanar interdigitated capacitor "coplanar cavity" resonator oscillator
circuit
800 is shown in Fig. 10. The term coplanar cavity is used here as an analog to
the
conventional cavity known in oscillator use. It is a two-dimensional analog of
the
23

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
regular three dimensional cavity. The shape of the resonator somewhat
resembles a
cross-section taken along an axis of a reentrant cylindrical cavity resonator,
having.an- -
internal center post (located on the axis) protruding from one inner wall,
spaced away
from the inside of an opposite inner wall.
A varactor 807 connects the equivalent of the reentrant post to the equivalent
of
one inner wall of the coplanar cavity. A coplanar interdigitated capacitor 802
and FET
inputs in series correspond to the capacitive gap between the equivalent post
and the
equivalent opposite inner wall. The circuit 800 provides low series resistance
and
inductance at the FET input 702 (cf., re, Leq of Fig. 9) , while allowing
sufficient series
capacitance C, for successful common-drain oscillator operation.
A copianar interdigitated capacitor coplanar cavity resonator circuit 801 is
connected to one side of a FET array 822. A second coplanar circuit 803 is
connected
to the opposite side of the FET array 822. A common-drain connection
(described
further below) to both the circuit 801 and 803 is disposed between the circuit
801 and
circuit 803. The circuits 801 and 803 are formed as described before by
patterning a
conductive sheet on an insulating substrate 816 in the conventional manner.
The gate circuit 801 includes the coplanar interdigitated capacitor 802 within
a
coplanar conductive frame 806, the frame having an intemal perimeter 804. The
source circuit 803 may be one of a number of coplanar circuits, such as open
circuit,
nearly quarter-wave length transmission lines and the like, suitable for
providing
sufficient capacitive feedback between the source and drain of related FETs.
The frame 806 is comprised of two opposed outer legs 808 and 810 contiguous
at one pair of opposed ends with a drain terminal common conductor segment 812
and
contiguous at the opposite pair of opposed ends with a varactor conductor
segment
814.
The coplanar capacitor 802 is surrounded by the internal perimeter 804 of the
coplanar conductive frame 806. The perimeter 804 defines a coplanar cavity
section
804a and a varactor inset section 804b. A portion of perimeter 804 of coplanar
cavity
section 804a is shaped as a slightly elongated hexagonal polygon enclosing the
capacitor 802. The aspect ratio of height to width for the coplanar cavity
804a shown
in Fig. 10 is about 1.3:1. The dimensions and aspect ratio of the coplanar
cavity
section 804a may vary over a considerable range. The dimensions and aspect
ratio of
the coplanar cavity section 804a are selected to provided resonance at a
suitable
24

CA 02328942 2000-10-16
WO 99/56341 PCT/US98108234
frequency.
The varactor inset section 804b may be a generally square or rectangular shape
-
defined in the segment 814 for receiving a tuning varactor 807, having a
cathode 807a
and an anode 807b (not shown).
In other embodiments of the present invention, the resonator may be shaped
other than hexagonal (e.g.. circular, polygonal and the like), and the
varactor need not
be inset. The aspect ratio of the resonator coplanar cavity 804a can vary
considerably. Where spatial constraints are not a probiem, an aspect ratio of
approximately 1:1 is desirable to minimize losses.
The dimensions of the perimeter of the coplanar cavity section 804a and the
spacing of the perimeter from the capacitor 802 are selected by using a
commercial
electromagnetic simulation software package, such as Zeland Software's "IE3D",
subject to the constraints of the desired tuning frequency (i.e., smaller for
higher
frequency) and sufficiently low loss ( i.e., lower for larger size).
The coplanar capacitor 802 is comprised of a set of spaced apart coplanar gate
conductor segments 820(1:4) interdigitated with a subset of spaced apart
conductor
furcations 840a, b, c. (1:4 indicates the sequence of index numbers 1, 2, 3,
4). The
furcations 840a, b, c are joined at a common central conductor input junction
840e at a
proximal end of a base conductor segment 840. Conductor 840 has a contact 840d
at
a distal end. The furcation 840b is disposed between furcations 840a and 840c.
The
contact 840d extends distally into the varactor inset 804b and connects to the
varactor
anode 807b (not shown). The conductor 840 and the conductor furcations 840a,
b, c
are disposed symmetrically along a line A-A passing through the furcation 840b
and
the contact 840d such that the furcation 840a extends distally for a length,
L1, between
proximal ends of the oppositely adjacent gate conductors 820(1) and 820(2),
the
furcation 840b extends distally for a length, L2, between proximal ends of the
oppositely adjacent generally parallel and uniformly spaced gate conductors
820(2)
and 820(3), and the furcation 840c extends distally for a length, L3, between
proximal
ends of oppositely adjacent and generally parallel and uniformly spaced gate
conductors 820(3) and 820(4).
The portion of the conductor 840 between the junction 840e and the contact
840d forms an inductive reactance coupling element contributing to part of the
inductance, Leq of Fig. 10, over the frequency range of interest.

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
The extension dimensions L1, L2, L3 and spacings between the adjacent
furcations 840 and the conductors 820 are arranged such that signal currents
in the --
central conductor 840 are divided equally by capacitive and electromagnetic
coupling
to the individual gate electrodes 832(1,2)a and 832(1,2)b. Selection of the
spacings
and dimensions for the frequency range of interest may be made with the use of
commercially available electromagnetic simulation tools.
Spaced apart coplanar gate conductor terminals 818(1:4) are defined on a
respective proximai end of the coplanar gate conductor segments 820(1:4). The
notation 1:4 indicates a sequence of index numbers, 1, 2, 3, 4. The terminals
818(1:4)
are bonded to respective FET gate terminals 818'(1:4) (not shown) of FET array
822.
Spaced apart coplanar common-drain conductor terminals 824(1:5) are defined
on the coplanar common-drain terminal common conductor segment 812. The
terminals 824(1:5) are bonded to coincident FET common-drain terminals
824'(1:5)
(not shown) on the FET array 822. The FET common-drain terminals 824'(1:5)
connect
to drain electrodes 828(1:8) in the sequence 1 to 1; 2 to 2,3; 3 to 4,5; 4 to
6,7 and 5 to
8; where the first index is the drain terminal index number and the second
index is a
drain electrode index number.
The FET array 822 includes two C-shaped FET gate metalization segments
832a, b having extended arms 832(1,2)a and 832(1,2)b connecting to the gate
fingers
that control the current in drain electrodes 828(1,2), 828(3,4), 828(5,6) and
828(7,8)
respectively.
Signals from the drain electrodes 828 are combined by the common connection
through the common drain segment 812.
Spaced apart coplanar source conductor terminals 826(1:4) are defined on
source conductor segments 830(1:4) for bonding to FET source terminals
826(1:4) on
the FET array 822.
A varactor electrode (cathode or anode) connector layer 842 is disposed in the
inset 804b and connects to overlapping conductor tabs 809 from the perimeter
of the
inset section 804b of the frame 806.
Tuning voltages are applied to the varactor anode 807a (not shown) by a RF
choke 844 connected to a variable power supply (not shown).
Coplanar source circuit 803 is connected to the source terminals 826 to
provide
suitable source-drain feedback to the FETs as required. The circuit 803 may be
26

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
typically a combined circuit connected to the FETs by multiple source
conductor
segments 845(1:4) between adjacent drain segments 825(1:5).
The interdigitated capacitor 802 of this invention adds the optimum amount of
input series capacitance with minimal parasitic series inductance to minimize
the
deleterious effect of capacitance fluctuations in the FET on the operating
frequency of
the oscillator circuit. This minimizes the phase noise of the output signal
from the
oscillator.
Referring again to Fig. 9, the capacitance Cõ corresponds to the capacitance
of
the varactor 807, re to the series resistance in the resonator (including the
series
resistance of the capacitor 802, the inductor 840e and the varactor 807), -ri
to the
equivalent negative resistance of the FET input at resonance, and Leq to the
inductive
component of the central conductor leg 840 between the furcations 840a, b, c
and the
contact 840d along with the self inductance of the capacitor 802, the varactor
807 and
the frame return legs 808, 810.
The compact nature of the interdigitated capacitor 802 and the consequent
short
segments 820(1:4), and 840 a:c, provide minimum parasitic self inductance and
therefore higher attainable tuning frequencies for oscillator performance.
It can be shown that by joining the inductive leg 840 into parallel furcations
840a, b, and c capacitively coupled to parallel multiple conductors 820(1:4),
in many
cases the series inductance of the parallel furcations and conductors is less
than it
otherwise would be if summed length of the parallel furcations and conductors
were a
single parallel conductor pair capacitively coupled together.
It is a further advantage of the interdigitated capacitor 802 to have multiple
conductor terminal pads 818 which allow interconnection with corresponding
multiple
FET terminals for obtaining increased power output and lower phase noise.
With reference to Fig. 11, there is shown a double resonator embodiment 900 of
a common-drain interdigitated capacitor coplanar cavity resonator oscillator
in
accordance with this invention.
First and second coplanar cavities 902 a and 902 b are defined in a coplanar
conductive frame 908. The frame 908 is deposited and patterned by a
conventional
process as described before, on a substrate 910. The frame 908 may be circular
or
generally rectangular and defines two opposed ends 908 a, b connected to
orthogonal
opposed sides 908 c, d.
27

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
First and second interdigitated capacitors 904 a and 904 b are disposed '
symmetrically about a center line B, in the symmetrically disposed cavities
902 a, b,
respectively.
The cavities 902 a, b are defined by internal perimeters 912 a, b of the frame
908 surrounding the capacitors 904 a, b respectively. The perimeters 912 a, b
are
spaced sufficiently far from the capacitors 904 a, b to minimize deleterious
capacitive
coupling effects but are sufficiently limited in spacing to achieve high
tuning frequency.
A coplanar cavity center conductor 914 has opposed edges 914 a, b disposed
symmetrically about the center line B, the edges forming part of the perimeter
912 a, b
of the tuning cavities 902 a, b.
The interdigitated capacitors 904 a and 904 b include alternate capacitor
conductor segments 917 a, b spaced apart from alternate gate conductor
segments
919 a, b, c.
Central capacitor conductor 906a of first capacitor 904a forks at junction
916a
into the branching capacitor conductor segments 917 a, b. The segments 917 a,
b
extend proximally toward FET array 922, and distally toward a varactor anode
connection 924, generally extending parallel to and spaced uniformly between
the
altemate adjacent gate capacitor conductor segments 919 a, b, c respectively.
The gate capacitor conductor segments 919 a, b, c extend proximally toward the
FET array 922 to connect at one end in gate conductor terminals 918 a, b, c
respectively. The segments 919 extend distally between altemate segments 917
and
terminate in open-circuit ends. The terminals 918 a, b, c are connected to
respective
gate terminals 918'a, b, c (not shown) of FETs 920 a, b, c in one half of flip
chip FET
array 922.
Bias may be provided to the gates of the FETs by a connection from a bias
supply (not shown) to a pad located on one of the segments 919, for example at
the
distal end of segment 919 a. A gate bias cross connection 921 a on the chip,
connects
the three-terminais 918 a, b, c together. Separate connection could be made to
each
segment independently, at the cost of additional pads and bonding wires. The
cross
connection 921 a also may help to suppress odd mode oscillations between the
connected FETs.
The altemating sequence of capacitively coupled segments 917 and gate
segments 919 are connected at opposing proximal and distal ends to form an
28

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
interdigitated capacitor structure.
The extension dimension and spacings between adjacent branching segments --
917 and gate conductor segments 919 are selected such that signal current in
the
central conductors 906 a, b is capacitively and electromagnetically divided
into gate
currents of essentially equal magnitude and phase into each respective FET.
The second capacitor 904 b is a mirror image of capacitor 904a and divides
signal current from conductor 906b equally in magnitude and phase into FETs
920 d,
e, f of the array 922.
FET source connections 923 are made to a source-drain interdigitated capacitor
feedback circuit structure (not shown) as described before, to add the optimum
amount
of source-drain feedback capacitance to optimize oscillations over the tuning
range.
FET drain terminals 934 a, b, c, d of the FETs 920 a, b, c, d, e and f are
connected to the opposite side 908 b of the frame 908 forming a common-drain
RF
ground at the drain of the FETs. The placement of the common-drain 908 b
between
the gate terminals 918 and source terminals 923 acts to direct the signal
currents
common to the gate-drain and gate-source circuits in a controlled manner
providing
minimum parasitic inductance and capacitance to the common point.
Capacitor conductors 906a, b extend distally and join to make contact with the
flip mounted tuning varactor anode 924. The conductors 906a, b act inductively
to
couple the capacitors 904a, b through the varactor 924 and returning through
the
frame 908 and 914 to the common drain conductor 908 b.
In order to achieve high resonant Q with wide tunability and subject to the
negative resistance limitation of the FET array 922, the inductance of the
resonator
900 must have minimal distributed capacitance and minimal conductor
resistance. If
the coplanar cavity central return conductor 914 is too narrow, the
resistance,
contributing to re, becomes too high. If the conductor 914 is too wide, the
distributed
capacitance becomes too high. The width of the conductor 914 must be optimized
for
best performance.
Conductive tabs 926 extending from the one side 908 a in the frame 908 are
connected to a conductive electrode layer 930 of the varactor 935. An RF choke
932
connected to the other varactor electrode layer 924 provides bias voltage for
tuning the
varactor from an external power supply (not shown).
With reference to Fig. 11, the double resonator 900 functions in a fashion
29

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
similar to the single resonator of Fig. 10 except that gate current to the
FETs are
divided into two parallei in-phase paths over a portion of the resonator 900
between --
the varactor 924 and the FET array 922, i.e., split by the conductors 906a, b
into the
two capacitors 904a, b and returned by the coplanar cavity frame 908 and
coplanar
cavity center conductor 914.
Measurements show that a coplanar common-drain interdigitated capacitor dual
coplanar cavity oscillator of the present invention using a pseudomorphic high
electron
mobility transistor (PHEMT) can achieve a tuning range greater than 2 GHz at a
center
frequency of about 40 GHz with a phase noise of better than about 76 dBc
(decibels
below carrier) per Hertz at a frequency 100 kHz offset from the center
frequency of
oscillation. The PHEMT has a gate length about 0.15 microns, and a total gate
width
about 900 microns. The PHEMT is divided into 6 cells with 2 gate fingers per
cell,
each cell having its own gate pad and its own source pad, the source/drain
having a
series of 7 pads, with one source pad between each pair of cells, and one
source pad
on each end of the array. The source, drain and gate pads are configured large
enough for flip chip bounding, about 2 mils in diameter.
This PHEMT was combined with a resonator tuned by electrostatic barrier
varactors to form the oscillator as described in recently filed patent
application S/N
08/555,777 incorporated herein by reference.
It should be noted that in alternative embodiments of the invention the
coplanar
interdigitated capacitors 904a, b and the coplanar cavity 908 may be placed on
the
surface of the FET array 922 if suitable conductor coating and patterning
capability
exists. Placing the capacitors 904 and coplanar cavity 908 on the surface of a
GaAs
FET integrated circuit would result in smaller oscillator circuits at the same
frequency
and/or higher operating frequency. The improved performance is due to the
higher
dielectric constant of the GaAs, and the resulting lower parasitic of the
capacitor when
it is patterned on the chip along with elimination of some bond connections
(e.g.. ball
or bump) between the FET and the capacitor/planar cavity.
The capacitors 904a, b may also be realized by a metal insulator-metal (MIM)
structure instead of an interdigitated circuit. The source-drain capacitor can
also be
placed on the surface of the FET chip and/or fabricated as an MIM capacitor.
Other
flip mounted components such as inductors, capacitors, multiple diodes and the
like
may be mounted on the substrate to realize alternative oscillators in
accordance with

CA 02328942 2000-10-16
WO 99/56341 PCT/US98/08234
this invention.
Other active devices may be used in alternative embodiments of the invention, -
-
e.g. bipolar transistors, heterojunction transistors, field effect
transistors, bipolar
transistors, resonant tunneling transistors, real-space transfer devices,
permeable
base transistors, solid state triodes, vacuum triodes, controlled avalanche
triode
devices, and superconducting triode devices. It is also contemplated that two-
terminal devices such as Gunn diodes, tunnel diodes and the like could be used
in
embodiments of this invention without a feedback circuit.
In accordance with this invention, it is to be understood that the above
description is illustrative only and not limiting of the disclosed invention.
It will be
appreciated that it would be possible to modify the size, shape and appearance
and
methods of manufacture of various elements of the invention or to include or
exclude
various elements within the scope and spirit of this invention. Thus the
invention is to
be limited only by the claims as set forth below.
31

Representative Drawing
A single figure which represents the drawing illustrating the invention.
Administrative Status

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Event History

Description Date
Time Limit for Reversal Expired 2011-04-26
Letter Sent 2010-04-26
Grant by Issuance 2007-07-17
Inactive: Cover page published 2007-07-16
Inactive: Office letter 2007-05-10
Amendment After Allowance (AAA) Received 2007-04-05
Pre-grant 2007-04-05
Inactive: Amendment after Allowance Fee Processed 2007-04-05
Inactive: Final fee received 2007-04-05
Notice of Allowance is Issued 2007-02-02
Letter Sent 2007-02-02
4 2007-02-02
Notice of Allowance is Issued 2007-02-02
Inactive: Approved for allowance (AFA) 2007-01-03
Letter Sent 2003-06-02
Request for Examination Requirements Determined Compliant 2003-04-10
All Requirements for Examination Determined Compliant 2003-04-10
Request for Examination Received 2003-04-10
Letter Sent 2001-02-23
Letter Sent 2001-02-23
Letter Sent 2001-02-23
Inactive: Cover page published 2001-02-16
Inactive: First IPC assigned 2001-02-13
Inactive: Notice - National entry - No RFE 2001-02-01
Application Received - PCT 2001-01-26
Inactive: IPRP received 2000-10-17
Application Published (Open to Public Inspection) 1999-11-04

Abandonment History

There is no abandonment history.

Maintenance Fee

The last payment was received on 2007-04-12

Note : If the full payment has not been received on or before the date indicated, a further fee may be required which may be one of the following

  • the reinstatement fee;
  • the late payment fee; or
  • additional fee to reverse deemed expiry.

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Owners on Record

Note: Records showing the ownership history in alphabetical order.

Current Owners on Record
ENDWAVE CORPORATION
Past Owners on Record
CLIFFORD A. MOHWINKEL
EDWARD B. STONEHAM
Past Owners that do not appear in the "Owners on Record" listing will appear in other documentation within the application.
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Document
Description 
Date
(yyyy-mm-dd) 
Number of pages   Size of Image (KB) 
Representative drawing 2001-02-15 1 8
Description 2000-10-15 31 1,870
Abstract 2000-10-15 1 42
Claims 2000-10-15 4 176
Drawings 2000-10-15 6 244
Cover Page 2001-02-15 1 39
Description 2007-04-04 32 1,899
Representative drawing 2007-06-11 1 8
Cover Page 2007-07-02 1 37
Notice of National Entry 2001-01-31 1 194
Courtesy - Certificate of registration (related document(s)) 2001-02-22 1 113
Courtesy - Certificate of registration (related document(s)) 2001-02-22 1 113
Courtesy - Certificate of registration (related document(s)) 2001-02-22 1 113
Reminder - Request for Examination 2002-12-26 1 113
Acknowledgement of Request for Examination 2003-06-01 1 174
Commissioner's Notice - Application Found Allowable 2007-02-01 1 161
Maintenance Fee Notice 2010-06-06 1 171
PCT 2000-10-15 4 170
Fees 2003-03-13 1 39
Fees 2002-02-20 1 38
Fees 2004-03-23 1 40
Fees 2005-03-23 1 36
Fees 2006-04-10 1 35
PCT 2000-10-16 3 126
Correspondence 2007-04-04 1 32
Correspondence 2007-05-09 1 13
Fees 2007-04-11 1 37
Fees 2008-03-25 1 35