Note: Descriptions are shown in the official language in which they were submitted.
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METHOD AND APPARATUS FOR A LATERAL RADIATION DETECTOR
CROSS-REFERENCE TO RELATED DOCUMENTS
This application claims the benefit of priority of U.S. Provisional Patent
Application
No. 61/202,962 filed April 23, 2009, and U.S. Provisional Patent Application
No. 61/213,589,
filed June 23, 2009.
FIELD OF THE DISCLOSURE
The disclosure is directly generally to radiation detectors and more
specifically to a
method and apparatus for a lateral radiation detector.
BACKGROUND OF THE DISCLOSURE
In modern microelectronics, there are two main photodetector (PD)
configurations,
namely vertical photovoltaic type PDs such as p-type intrinsic n-type (PIN or
PN) diodes and
lateral photoconductive type PDs such as metal-semiconductor-metal (MSM)
photoconductors.
In a photovoltaic-type detector, incident photons are absorbed in an active
semiconductor layer sandwiched between two electrodes one of which should be
transparent
to the photons such as transparent conductive oxides. The photovoltaic ¨type
detector works
under the reverse bias conditions in which the created electric field sweeps
the photogenerated
carriers to form the photocurrent.
In a photoconductive-type detector, incident light is absorbed directly by the
photoconductive layer and the photocurrent signal is obtained by applying an
electric field
across the photoconductive layer.
Generally, the photovoltaic-type detector has higher conversion efficiency and
larger
fill factor. However, the photoconductive-type detector is more advantageous
in terms of
integration simplicity, ease of fabrication, cost effectiveness and speed.
Typically, a lateral MSM PD includes Ohmic or Schottky contacts on a top or at
a
bottom of the semiconductor (e.g. amorphous silicon) layer which functions as
a
photoconductor instead of a diode. MSM PDs are biased such that one contact is
forward
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biased and the other one is in the reverse bias. Upon light illumination,
photons are
absorbed by the semiconductor layer and free carriers are generated due to
photoconductive effect and collected by the electric field across the
semiconductor layer
through biasing the contacts to leverage the potential energy of electrons in
the conduction
band and holes in the valence band and would then contribute to the
photocurrent.
In terms of photosensing materials, amorphous silicon has been used in most
current MSM PDs , however, the wavelength selectivity of such PDs is primarily
governed
by the thickness of the semiconductor layer. As a result, in current MSM PDs,
the leakage
current level still does not meet the stringent requirement for high-sensitive
and low-noise
indirect conversion X- ray imaging applications.
Therefore, there is provided a novel lateral radiation detector for using in a
charge
sensing system.
SUMMARY OF THE DISCLOSURE
The present disclosure is directed at a lateral photodetector (PD) which in
the
preferred embodiment is a metal-semiconductor-metal (MSM) PD with amorphous
selenium (a-Se). The same type of design is also applicable to other materials
including
those used in X-ray imaging such as Mercury Iodide, lead oxide, Indium
Phosphide, or the
like.
In one aspect, there is provided a lateral radiation detector comprising a
substrate
layer; a semiconductor layer; and a set of at least two contacts, located
between the
semiconductor layer and the substrate layer, wherein the set of at least two
contacts
includes at least one anode and at least one cathode, the anode and the
cathode spaced
laterally away from each other.
In another aspect, there is provided a method of manufacturing a lateral
radiation
detector comprising depositing a conductive layer on a substrate layer;
patterning a set of
least two contacts from an uppermost conductive layer, the at least two
contacts including
an anode and a cathode, the anode and the cathode spaced laterally from each
other; and
depositing a semiconductor layer on top of the substrate layer.
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BRIEF DESCRIPTION OF THE DRAWINGS
Embodiments of the present disclosure will now be described, by way of example
only, with reference to the attached Figures, wherein:
Figure 1 is a schematic diagram of a system for charge sensing;
Figure 2a is schematic diagram of a first embodiment of a radiation detector;
Figure 2b is a schematic diagram of a second embodiment of a radiation
detector;
Figure 3a is a schematic diagram of a first embodiment of how electrodes can
be
set up in a lateral radiation detector;
Figure 3b is a schematic diagram of a second embodiment of how electrodes can
be set up in a lateral radiation detector;
Figure 3c is a schematic diagram of a third embodiment of how electrodes can
be
set up in a lateral radiation detector;
Figure 4a is a flowchart outlining a method of manufacturing a radiation
detector;
Figures 4b to 4e are schematic diagram illustrating the method of Figure 4a;
Figure 5a is a schematic diagram of a lateral radiation detector with a
coplanar
Frisch grid;
Figures 5b to 5e are schematic diagrams illustrating the process of
manufacturing
the detector of Figure 5a;
Figure 6a is a schematic diagram of a lateral radiation detector with an
insulated
coplanar Frisch grid;
Figures 6b to 6f are schematic diagrams illustrating the process of
manufacturing
the detector of Figure 6a;
Figure 7a is a schematic diagram of a lateral radiation detector with a buried
Frisch
grid;
Figures 7b to 7g are schematic diagrams illustrating the process of
manufacturing
the detector of Figure 7a;
Figure 8 is a schematic diagram of another embodiment of a lateral radiation
detector;
Figures 9a and 9b are schematic diagrams relating to the electric field
distribution
within the lateral detector with and without the top bias voltage applied;
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Figure 10 is a schematic diagram of another embodiment of a lateral radiation
detector; and
Figure 11 is a schematic diagram of another embodiment of a lateral radiation
detector.
DETAILED DESCRIPTION
Turning to Figure 1, an imager, or system for improving the resolution or
performance of a semiconductor based radiation detector is shown. The system
10
includes a lateral radiation detector portion 11 which is connected to a
readout portion 12.
In the current embodiment, which is used for photon counting, the embodiment
is
implemented using complementary metal-oxide semiconductor (CMOS) technology
such
that the readout portion 12 includes a preamplifier 14, a pulse shaper 16, a
discriminator
18 and data storage 20. Alternatively, polycrystalline silicon technology can
also be used
for the readout portion 12.
In an alternative embodiment, the readout portion 12 can also be used for
integration, as the radiation detector improves on lag and potential ghosting.
By masking
out slow moving carriers, image lag can be reduced or eliminated thereby
improving
image quality and reducing the time necessary to acquire the image. A faster
frame rate is
also experienced which improves overall operation and enables 3D and real-time
imaging
The signal to noise ratio is also improved for both the photon counting and
integration
systems. In an integration system, the detector can be used in a passive pixel
sensor (PPS)
or an active pixel sensor (APS). Further operation of the readout portion 12
of the system
will be well understood by one skilled in the art.
Turning to Figure 2a, a more detailed schematic view of a first embodiment of
the
radiation detector 11 is shown. In the current embodiment, the radiation
detector 11 is a
photoconductive-type photodetector (PD) or a lateral PD. The radiation
detector 11
includes a substrate layer 30 such as a thin film transistor (TFT) array or a
CMOS electron
pixilated array. Other substrate layers are contemplated and will be
understood by those
skilled in the art.
Atop the substrate layer 30 are a set of contacts 32 made of a metal such as
aluminum or the like. The contacts 32 can also be seen as electrodes with at
least one of
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the contacts being a cathode and at least one of the contacts being an anode.
In the current
embodiment, the contacts 32 are located directly on top of the substrate layer
30 and are
laterally spaced apart from each other. Although the set of contacts 32 are
shown to be at
extreme opposite ends from each other, the spacing between the contacts is
determined by
the applications for which the detector is designed. Between or encasing the
set of
contacts 32 is a layer of photoconductor material 34 such as amorphous
selenium (a-Se).
In order to allow for high energy photons (e. g. X-ray) to be transmitted into
the detector, a
phosphor layer 36 can be placed on top of the photoconductor layer 34. Signals
which are
received on the substrate can then be processed and transmitted to the readout
electronics
12, which in turn, transmits signals to a display 38 so that a user can view
the images
which are captured by the detector 11. In a preferred embodiment, the
radiation detector
11 of Figure 2a is used with a top-gate staggered thin film transistor.
In operation, X-rays are transmitted through the phosphor layer towards the
photoconductor layer. As will be understood, in the absence of the phosphor
layer, the x-
rays are transmitted directly into the photoconductor layer. As the voltages
connected to
the electrodes are activated, an electric field is created. As the x-rays
travel within the
photoconductor layer, positively and negatively charged carriers are generated
and travel
towards one of the electrodes 32. Negatively charged carriers collect at the
electrode
acting as the anode while positively charged carriers collect at the electrode
acting as the
cathode. Depending on which contact, or electrode is the collecting electrode,
the
collecting electrode transmits signals to the readout electronics for
processing and then
display on the display panel. In the current embodiment, a high voltage source
33a is
connected to one of the electrodes 32 while a low voltage source 33b is
connected to
another of the electrodes 32. Alternatively, the voltages 33a and 33b can be
connected to
the other of the electrodes 32.
Turning to Figure 2b, a schematic view of a second embodiment of a lateral
radiation detector 11 is shown. In this embodiment, the detector 11 includes a
substrate
layer 30 which is connected to the readout electronics 12, which, in turn, are
connected to
the display 38. On top of the substrate layer 30 is a photoconductor layer 34
such as a-Se,
with a set of contacts 32, laterally spaced from each other, located on top of
the
photoconductor layer 34. In operation, the radiation detector 11 of Figure 2b
is preferably
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used with a tri-layer bottom gate staggered thin film transistor.
Alternatively, the set of
contacts 32 can be located in a top portion of the photoconductor layer 34
(Figure 2c) or
adjacent the photoconductor layer 34 (Figure 2d). The voltage sources 33a and
33b are
connected to the electrodes 32 to provide the necessary electric field for in
which the high
energy photons travel.
In each embodiment, the contacts 32 are preferably implemented using a finger
or
spiral shape.
Turning to Figures 3a to 3c, various top views of how the contacts may be set
up
within the photoconductor layer are shown. In Figure 3a, bases 40 of the
contacts 32 are
spaced apart from each other on either side of the photoconductor layer 34.
Spiraling
fingers 42 extend from each base 40 towards the middle of the photoconductor
layer 34
and serve to collect the carriers depending on the voltage being supplied to
the contact. As
discussed above, one of the contacts 32a is seen as an anode while the other
contact 32b is
seen as a cathode. Therefore, if the carriers being collected are negatively
charged, the
collecting contact (or electrode) is the anode and the common electrode is the
cathode.
Alternatively, if the carriers being collected are positively charged, such as
holes, the
collecting electrode is the cathode and the common electrode is the anode.
Alternatively, as shown in Figure 3b, the set of contacts 32 may include six
contacts. Although shown as being evenly divided with three anodes 32a and
three
cathodes 32b, it will be understood that the contacts can be set up in other
arrangements.
In Figure 3b, the set of anodes 32a include the base portion 40a with an
individual finger
42a extending from each of the base portions 40a. Similarly, each of the set
of cathodes
32b includes a base portion 40b with an individual finger 42b extending into
the
photoconductor layer 34.
In a further embodiment, as shown in Figure 3c, the anode 32a includes the
base
portion 40a which has a finger 42a extending therefrom into the photoconductor
layer 34.
The finger 42a further comprises a set of offshoots, offsets or overlaps, or
perpendicular
portions 44a. Similarly, the cathode 32b includes the base portion 40b which
has a finger
42b extending therefrom into the photoconductor layer 34. The finger 42b
further
comprises a set of offshoots or perpendicular portions 44b.
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The benefit of a lateral PD with a-Se provides a photodetector which has an
improved leakage current which means that the detector 11 is able to operate
to sense a
small amount of light. The lateral PD also uses less parts than a
corresponding vertical PD
which is geared towards an improved leakage current operation. Further
advantages of the
current disclosure include, but are not limited to, an improved dynamic range
and also that
the detector requires less power consumption in use.
Turning to Figure 4a, a flowchart outlining one method of manufacturing a
lateral
radiation detector is shown. Figures 4b to 4f are schematic representations of
the method
of Figure 4a.
Assuming that a substrate layer is already provided as a foundation for the
radiation detector, a metal layer is deposited 200 atop the substrate layer
(Figure 4b).
After depositing the metal layer, the contacts (or electrodes) can then be
patterned 202
using any known methods, including, but not limited to, photolithography,
shadow
masking, printing, and nanoimprinting (Figure 4c). The electrodes are
patterned such that
they are located in the same plane with a lateral spacing therebetween so that
a lateral
radiation detector can be achieved. An isolation, or insulation, layer 35 is
then deposited
204 over the contacts (Figure 4d). It will be understood that the inclusion of
the isolation
layer is optional. In one embodiment, the isolation layer is a Silicon Nitride
thin film,
however, like materials can also be used. Contact vias can then be opened 206
(Figure
4e). The inclusion of the isolation layer and the contact vias reduces the
likelihood that
the photoconductor can hamper operation of the contacts as a portion of the
contacts are
isolated from the photoconductor (or a-Se). The photoconductor layer can then
be
deposited 208 over the isolation layer and the contacts (Figure 4f).
Turning to Figure 5a, another embodiment of a lateral radiation detector is
shown.
In the current embodiment, the lateral radiation detector includes a Frisch
grid which may
provide for a further embodiment of a lateral radiation detector 11. As shown,
the detector
50 includes a substrate layer 52 and a set of contacts, or electrodes 54. In
Figure 5a, one
of the contacts represents an anode while the other contact represents a
cathode. A
coplanar Frisch grid 56 is also located on the substrate. The detector 50
further includes a
photoconductor, or semiconductor layer 58 such as a-Se or amorphous silicon.
On top of
the semiconductor layer is a phosphor layer 60, such as, but not limited to
Sodium Iodide.
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In operation, X-ray radiation (as represented by arrows 62), travel within the
phosphor
layer results in optical beams (represented by arrows 64) travelling between
the phosphor
layer 58 and the semiconductor layer 56. The optical beams are absorbed and
create the
carriers which are then collected at their corresponding electrodes 54 in
order for the
image to be processed.
By including a Frisch grid, the final charge measurement is therefore less
sensitive
to the movement, trapping and detrapping of low-mobility carriers and
therefore can
decrease signal risetime and increase the operating speed.
In one embodiment, the Frisch grid is an additional electrode which can block
charge induction from the slow-mobility carriers. Furthermore, the addition of
the Frisch
grid may also improve or produce avalanche-multiplication gain.
In the manufacture of this embodiment, which can also be termed a lateral
radiation detector with a coplanar Frisch grid, there is an initial assumption
that there is an
existing substrate layer. Figures 5b to 5d outline various stages of the
manufacture of the
lateral radiation detector with coplanar Frisch grid.
On top of the substrate layer, a conductor layer can be deposited using known
techniques, such as, but not limited to, sputtering. In the preferred
embodiment, the
conductor material is a metal such as aluminum or chromium, however other
materials
having similar characteristics may be contemplated. The set of contacts, or
electrodes, and
the Frisch grid can then be patterned from the conductor layer using a
technique such as
photolithography. As can be see, the outer electrodes can be seen as the
contacts, or pixel
electrodes, such as the anode and the cathode while the interior electrode is
the Frisch grid.
After the electrodes are patterned, a semiconductor layer can then be
deposited over the
structure. In one embodiment, the semiconductor material is amorphous selenium
which
can be deposited via vapor deposition. Figure 5d shows a lateral metal-
semiconductor-
metal optical photoconductor with a lateral coplanar Frisch grid. If
necessary, for indirect
X-ray detection, a phosphor layer can then be either deposited or interfaced
with the
semiconductor layer. If the detector is to be used in a large area fast
optical detector or a
digital camera, there is no need for the phosphor layer.
Turning to Figure 6a, a schematic diagram of a lateral radiation detector with
a
coplanar isolated Frisch grid is shown. The lateral radiation detector 70
includes a
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substrate layer 72, an insulator layer 74 a semiconductor layer 76 and a
phosphor layer 78.
As discussed above, various materials can be selected for each of the layers.
Within the
insulator layer 74 is a set of contacts, or electrodes 80 along with a Frisch
grid 82. As with
the embodiment of Figure 5a, X-ray radiation (represented by arrows 84)
travels down
through the phosphor layer towards the semiconductor layer which then receives
optical
beams (seen as arrows 86) having negatively and positively charged carriers.
Depending
on their charges, the carriers then travel through the semiconductor layer
towards their
corresponding electrode with the slow-mobility carriers being trapped by the
Frisch grid
82. As will be understood, if negatively charged carriers are being collected
and analyzed
for the image, the Frisch grid is located proximate the anode and if
positively charged
carriers are being collected, the Frisch grid is located proximate the
cathode.
During the manufacturing process, it is assumed that there is an existing
substrate
layer on which the lateral radiation detector is built. Figures 6b to 6f
provide schematics
of the manufacture of the lateral radiation detector with a coplanar isolated
Frisch grid.
Similar to the manufacture of the other lateral radiation detectors, a layer
of conductive
material, such as aluminum, chromium or the like, is deposited on top of the
substrate
layer via a known technique, such as sputtering. A set of at least three
electrodes can then
be patterned into the conductive layer using photolithography with the
outermost
electrodes representing the pixel electrodes and the inner electrode
functioning as a Frisch
grid. A layer of insulator material can then be deposited over the electrodes
on top of the
substrate. In one embodiment, the insulator material is Silicon Nitride and
the deposition
technique may be chemical vapor deposition although other materials and
deposition
techniques are known.
The layer of insulator material can then be patterned to expose the pixel
electrodes.
A layer of semiconductor can then be deposited over the structure to complete
the lateral
radiation detector with an isolated lateral coplanar Frisch grid. As with the
embodiment of
Figure 5a, a phosphor layer can also be deposited on or interfaced with the
semiconductor
layer for indirect x-ray detection.
Turning to Figure 7a, a schematic diagram of yet another embodiment of a
lateral
radiation detector is shown. In this embodiment, the lateral radiation
detector includes a
buried Frisch grid. The detector 90 includes substrate layer 91 along with an
insulator
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layer 92 which includes a Frisch grid 94 located within the insulator layer
92. On top of
the insulator layer 92 is a semiconductor layer 96 which includes a set of
contacts, or
electrodes 98, located within. If necessary, phosphor layer 100 is located on
top of the
semiconductor layer 96.
In the manufacture of this lateral radiation detector with buried Frisch grid,
it is
assumed that there is an existing substrate layer to build on top of Figures
7b to 7g
provide diagrams of some stages of the manufacturing process. Initially, a
first conductor
layer is deposited on top of the substrate layer via known techniques such as
sputtering.
The Frisch electrode can then be patterned out of the first conductive layer.
In this
embodiment, the Frisch grid or electrode is isolated from collection
electrodes and
therefore, does not collect signal charge. After the Frisch electrode has been
patterned, an
insulator layer is deposited on top of the Frisch electrode and the substrate
using chemical
vapor deposition in one embodiment. A second conductive layer is then
deposited on top
of the insulator layer and then patterned to be the contacts, or collection
electrodes. The
electrode patterning can be performed via photolithography. The semiconductor
layer can
then be deposited on top of the second conductive layer, thereby enclosing the
set of
contacts to create the lateral radiation detector with buried Frisch grid. As
before, if
necessary, the detector can then be interfaced with a phosphor layer for
indirect
conversion x-ray detection. In this embodiment, the Frisch gird is located
underneath the
collection electrodes to reduce or prevent the photons from collecting at the
Frisch grid.
Turning to Figure 8, yet a further embodiment of a lateral radiation detector
is
shown. In this embodiment, the radiation detector 11 can be seen as a lateral
cascade
detector which allows a lateral detector to be used in a direct conversion X-
ray detection
without the need for a scintillator or a phosphor layer. The radiation
detector 11 includes a
substrate layer 110 along with a set of contacts, or electrodes 112 which are
spaced apart
laterally. The radiation detector 11 further includes an insulator layer 114
in contact with
the electrodes 112 and a photoconductor layer 116 such as amorphous selenium.
Other
materials that can be used are Lead Oxide (Pb0), Mercury Iodide (HgI2) or
Indium
Phosphide (InP). A top layer of metal 118, such as aluminum can then be
deposited on top
of the amorphous selenium layer. The amorphous selenium can be divided into
two layers:
the carrier cascade layer (top) and carrier drifting layer (bottom). A voltage
120 may also
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be applied to the cascade carrier layer 118 to improve the carrier separation.
Figures 9a
and 9b provide images relating to the electric field distribution within the
lateral detector
with and without the top bias voltage applied. Figure 9a reflects the
simulation without
the voltage potential applied and Figure 9b reflects the simulation with the
voltage
potential applied.
As can be seen, without the voltage potential applied, the carriers generated
by the
carrier cascade layer 118 require long distance diffusion to reach the
contacts while with
the voltage potential applied, the carrier travel towards the electrodes in a
more efficient
manner.
In operation, the amorphous selenium layer is used for X-ray absorption while
the
carrier cascade layer 118 assists to generate or separate the carriers in the
X-rays so that
they can travel through the amorphous selenium layer to be collected by the
laterally
spaced apart electrodes 112.
Turning to Figure 10, yet a further embodiment of a lateral radiation detector
is
shown. In this embodiment, the radiation detector 11 is similar to the
embodiment of
Figure 8. The main difference between the two embodiments is the inclusion of
a Frisch
grid 122. The Frisch grid 122 may enhance the speed of the detector as it is
able to block
slower moving carriers from being detected.
Benefits of the lateral radiation detector embodiments of Figures 8 and 10
include,
but are not limited to, small pixel size capability, fast operation and large
area fabrication
without blocking the contacts.
Turning to Figure 11, another embodiment of a lateral MSM photodetector is
shown. More specifically, Figure 11 relates to a lateral amorphous selenium (a-
Se) MSM
photodetector is shown. In the preferred embodiment, this photodetector is
used for
indirect detection of high-energy radiation.
As shown in Figure 11, a unipolar photodetector 130 is shown having an
interaction region 132 where no gain is realized and a detection region 134
where gain is
realized. The photodetector 130 includes a substrate layer 134 having a
blocking layer
136 located or deposited on top of the substrate layer 134. Deposited atop the
blocking
layer 136, such as Cerium Oxide, is an insulator layer 138 such as Silicon
Nitride. Within
the blocking layer 136 is a lateral Frisch grid 140 which is embedded between
a set of
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contacts, one of the contacts presenting a non-collecting electrode 142a and
another of the
contacts representing a collecting electrode 142b. The set of contacts are
located within a
semiconductor layer 144 which is deposited on top of the insulator layer 138
during
manufacture. A scintillator layer, such as Sodium Iodide, is deposited on top
of the
semiconductor layer 144.
Use of the lateral Frisch grid reduces the photocurrent lag which can thereby
increase the frame rate of the x-ray imager to which the photodetector is
connected.
In one embodiment, with a specific biasing conditions high-field detection
region
for avalanche multiplication gain can be created and therefore the
photodetector can be
designed as a photomultiplier for higher signal to noise ratio and single
phone-counting
gamma ray imaging. In the current embodiment shown in Figure 11, the avalanche
region
is precisely defined such as etching via photolithography to provide a more
stable, reliable
and repeatable detector architecture.
Some applications in which the current radiation detector can be used are
described
below. It will be understood that other applications are contemplated.
For instance, the lateral radiation detector can be used in indirect
conversion X-ray
imaging. The deployment of new generation chest radiography, mammography, and
computed tomography demands extensive research and development on flat-panel
imagers
(FPI). Currently, the majority of FPIs are based on amorphous silicon
technologies and
indirect conversion mechanism, where pixel electronics includes photodetectors
and
switching TFTs. Photodetectors are required particularly for indirect
conversion X-ray
imaging devices where X-ray is firstly absorbed and converted to optical
photons by
scintillator materials, then further converted to electrical signals by
photodetectors
underneath. Therefore, emitting spectra of scintillators or phosphors and
sensing
wavelengths of these PDs should be matched in order to achieve the best
performance.
Since those scintillators such as sodium iodide and sodium-doped cesium iodide
have
much higher emission efficiency in blue (420 nm) than thallium-doped cesium
iodide in
green (550 nm), imaging devices with the use of blue-sensing photodetetors are
expected
to yield better performance. However, due to the fact that most photodetctors
used in the
indirect conversion X-ray imagers are made of amorphous silicon, green-
emitting
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scintillators such as thallium-doped cesium iodide are widely used to
compromise the
optical absorption of amorphous silicon.
Different from commonly-used PIN photodiodes as PDs in FPIs, a lateral
radiation
detector with amorphous selenium as the photoconductor layer has a high
photoconductive
gain (greater than unity) at blue to UV wavelengths and are compatible with
more efficient
sodium-doped cesium iodide scintillators as discussed previously. The
photoconductor has
very low dark current, which is especially well- suited for low-level or low-
dose X-ray
detection.
Another application for the radiation detector is in UV imaging. By taking
advantage of strong short-wavelength responsivity of a lateral radiation
detector with a-Se
as the semiconductor, an improved detector for UV imaging can be designed. UV
imagers
have been paid a lot of attention in the recent years mostly for biomedical
applications
such as DNA fragment sizing, DNA sequencing, and amino acid analysis. Since
the
responsivity is mainly determined by thickness of a-Se layer and channel
length. It is
believed that there exists an optimum thickness and length for achieving high
resposivity
at 260 nm as it is the wavelength absorbed significantly by DNA and the low
dark current
of such MSM PDs provides high signal to noise ratio and sensitivity.
In the preceding description, for purposes of explanation, numerous details
are set
forth in order to provide a thorough understanding of the embodiments of the
disclosure.
However, it will be apparent to one skilled in the art that these specific
details are not
required in order to practice the disclosure.
The above-described embodiments of the disclosure are intended to be examples
only. Alterations, modifications and variations can be effected to the
particular
embodiments by those of skill in the art without departing from the scope of
the
disclosure, which is defined solely by the claims appended hereto.
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