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Patent 1097408 Summary

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Claims and Abstract availability

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(12) Patent: (11) CA 1097408
(21) Application Number: 256414
(54) English Title: INVERTER IN AN INTEGRATED INJECTION LOGIC STRUCTURE
(54) French Title: INVERSEUR DE CIRCUIT LOGIQUE A INJECTION INTEGRE
Status: Expired
Bibliographic Data
(52) Canadian Patent Classification (CPC):
  • 328/127
  • 328/158
(51) International Patent Classification (IPC):
  • H03K 19/08 (2006.01)
  • H01L 27/02 (2006.01)
  • H01L 27/07 (2006.01)
  • H01L 27/082 (2006.01)
  • H03K 19/091 (2006.01)
(72) Inventors :
  • KIRSCHNER, NIKOLAUS (South Africa)
(73) Owners :
  • SIEMENS AKTIENGESELLSCHAFT (Germany)
(71) Applicants :
(74) Agent: FETHERSTONHAUGH & CO.
(74) Associate agent:
(45) Issued: 1981-03-10
(22) Filed Date: 1976-07-06
Availability of licence: N/A
(25) Language of filing: English

Patent Cooperation Treaty (PCT): No

(30) Application Priority Data:
Application No. Country/Territory Date
P 25 30 292.5 Germany 1975-07-07

Abstracts

English Abstract






ABSTRACT OF THE DISCLOSURE

There is herein disclosed an inverter of an integrated logic
structure which is formed in a semiconductor device. More particularly, an
epitaxial layer is formed on a semiconductor substrate. This layer includes a
laterally arranged transistor and a vertically arranged transistor in side by
side relationship. The collector of the lateral transistor is connected
integrally with the base of the vertical transistor. The base of the lateral
transistor is connected integrally with the emitter of the vertical transistor.
Supply voltage terminals are provided, one of which is connected to the
emitter of the lateral transistor and the other of which is connected to the
base of the lateral transistor as well as to the emitter of the vertical
transistor. Diodes corresponding in number to the number of collectors in
the vertical transistor are connected respectively in parallel with each base-
collector junction of the vertical transistor and poled the same as the base-
collector junctions. The emitter of the vertical transistor is formed as a
buried layer in the semiconductor device. The lead from the outer surface to
this buried layer is a highly doped zone, preferably formed by ion implantation.
Each inverter is separated from an adjacent inverter in the same semiconductor
chip by suitable isolation means, such, for example, by an insulating guard
ring of SiO2 or by pn junction isolation. The output is taken from the
collectors of the vertical transistor.


Claims

Note: Claims are shown in the official language in which they were submitted.




THE EMBODIMENTS OF THE INVENTION IN WHICH AN EXCLUSIVE
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:

1. An inverter comprising a first transistor having an
emitter, a base and a collector, a second transistor having an
emitter, a base and at least two collectors, a pair of supply
voltage terminals, said collector of said first transistor
being connected to said base of said second transistor, said
emitter of said second transistor being connected to the base
of said first transistor and to one of said terminals, said
emitter of said first transistor being connected to the other
of said terminals, and diodes connected in parallel to the
junctions between the base and the collectors of said second
transistor, said diodes being poled the same as said collector-
base junctions.

2. An inverter in an integrated injection logic structure
comprising a substrate, an epitaxial layer on said substrate,
a lateral transistor having emitter, base and collector regions,
and a vertical transistor formed side by side in said epitaxial
layer having an emitter region, a base region and at least
two collector regions, a pair of supply voltage source
terminals, said collector region of said lateral transistor being
connected to said base region of said vertical transistor, said
emitter region of said vertical transistor and said base region
of said lateral transistor being connected to one of said
terminals of the supply voltage source, said emitter of said
lateral transistor being connected to the other of said
terminals of said supply voltage source, and a diode connected
in parallel to each base-collector junction of the vertical
transistor, said diode being poled the same as said base-
collector junctions.





3. An inverter stage in an integrated logic structure
comprising a substrate, an n doped epitaxial layer on said
substrate, a pair of p doped regions in the surface of said
epitaxial layer spaced from each other, one of said p doped
regions forming the emitter of a lateral transistor, the



portion of said n type epitaxial layer lying between said p doped regions
forming the base of said lateral transistor, the portion of the other of said
pair of p doped regions which lies adjacent said base portion of said epi-
taxial layer forming the collector of said lateral transistor, the remaining
portion of said other of said pair of p doped regions forming the base of a
vertical transistor, the portion of said epitaxial layer lying below said
base of said vertical transistor forming the emitter of said vertical transis-
tor, at least two n doped regions formed in the surface of said p doped base
portion forming collectors, respectively of said vertical transistor, p+ doped
contacts formed in the surface portion of said emitter of the lateral tran-
sistor and said collectors of said lateral transistor, a p+ region between
said collectors of said vertical transistor which extends down to said base
of said vertical transistor which also forms pn junctions with said collectors,
a metal electrode in contact with said collectors of said vertical transistor
and also in contact with said p+ region leading to said base of said vertical
transistor and thereby providing Schottky diodes with said collectors of said
vertical transistor, a layer of insulating material surrounding said inverter
stage, a buried n+ doped buried layer partially in said substrate and
partially in said epitaxial layer which is interfaced with said n doped epi-
taxial layer and which reaches out to the surface through said insulating
layer, and an electrode on said p+ doped contact of the emitter of said
lateral transistor connected to one terminal of an electric potential source,
and an emitter electrode in contact with the surface portion of said buried
layer connected to the other terminal of said electric potential source.

4. An inverter stage in an integrated logic structure comprising a
substrate, a p doped epitaxial layer on said substrate, a pair of n doped
regions in the surface of said epitaxial layer spaced from each other, one
of said n doped regions forming the emitter of a lateral transistor, the
portion of said p type epitaxial layer lying between said n doped regions
forming the base of said lateral transistor, the portion of the other of said
pair of n doped regions which lies adjacent said base portion of said

11


epitaxial layer forming the collector of said lateral transistor, the re-
maining portion of said other of said pair of n doped regions forming the
base of a vertical transistor, the portion of said epitaxial layer lying
below said base of said vertical transistor forming the emitter of said
vertical transistor, at least two p doped regions formed in the surface of
said n doped base portion forming collectors, respectively, of said vertical
transistor, n+ doped contacts formed in the surface portion of said emitter
and said collector of said lateral transistor, an n+ region between said
collectors of said vertical transistor which extends down to said base of
said vertical transistor which also forms pn junctions with said collector
regions, a metal electrode in contact with said collectors of said vertical
transistor and also in contact with said n region leading to said base of
said vertical transistor and thereby providing Schottky diodes with said
collector regions of said vertical transistor, a layer of insulating material
surrounding each inverter stage, a buried p+ doped buried layer partially in
said substrate and partially in said epitaxial layer which is interfaced
with said p doped epitaxial layer and which reaches out to the surface
through said insulating layer, and an electrode on said n+ doped contact of
the emitter of said lateral transistor connected to one terminal of an
electric potential source, and an emitter electrode in contact with the sur-
face portion of said buried layer connected to the other terminal of said
electric potential source.

5. An inverter stage according to claim 3, in which said substrate is
of a p conductive type semiconductor material.

12


6. An inverter stage according to claim 4, in which said
substrate is of an n conductive type semiconductor material.

7. An inverter stage according to claim 3, in which said
substrate is formed of sapphire or spinel.

8. An inverter stage according to claim 4, in which said
substrate is formed of sapphire or spinel.

9. An inverter stage according to claim 3, in which said
buried layer and said n doped epitaxial layer consist of
silicon.

10. An inverter stage according to claim 4, in which said
buried layer and said p doped epitaxial layer consist of
silicon.

11. An inverter stage according to claim 3, in which oxide
insulations are provided for insulating in said inverter stage.

12. An inverter stage according to claim 4, in which pn
junction isolation is provided for insulating in said inverter
stage.

13

Description

Note: Descriptions are shown in the official language in which they were submitted.


~97~8

This invention relates to an inverter in an integrated
injection loyic (,I L) structure which includes a bipolar lateral
transistor and a vertical transistor. Inyerters of this type
are kno~n. For example, in the publication of "N.C. Troye
Integrated Injection Logic - Present and Future", IEEE ISSCC,
1974, an arrangement of this type is. described. An integrated
injection logic of this type is a saturated logic. This means
that the storage time i.n the determination of its speed is a
decisive factor. The lessening o~ the storage time has the
highest significance attached to it ins.ofar as it implies a :
higher speed which has: great.signi.fi.cance in large scale
integxation (LSI).
A principal object of the present inYention consists
accordingly in providing an inverte:r stage in ~hich the storage
time is considerabl~ reduced as compared ~ith the inverter
stages of the prior art.
Thi:s objecti.ve i.s accompli,shed by an inverter stage .:
structure h.erei,nafte~ to be des.cribed. In parti.cular, the
inverter stage of the present inventiQn compri.ses a substrate, .
an epitaxial layer on the substrate, a lateral transi,stor
h.aying emittexr base and collector regions and a yertical
transistor formed s~ide b~ side in the epitaxial layer having an ~.
emitter region, a base region and at least two collector
regions, a pair of supply voltage source terminals, the
collector regi,on of the lateral transistor b.eing connected to
the base region of the vertical transistor, the emitter region
of the vertical transistor and the base region of the lateral
transistor being connected to one of the terminals. of the supply
voltage source, the emitter of the lateral transistor being
connected to the other of the terminals of said supply voltage

7~08

source, and a diode connected in parallel to each base-
collector junction of the vertical transistor, the diode being
poled the same as the base-collector junctions.
An essential advantage of the invention consists in
the fact that, as a result of the production of the base region
of the vertical npn transistor of the inverter stage by means
of ion implantation, a drift field is simultaneously produced
which reduces the switching time of the inverter.
Advantageously the inverse current amplification is
further increased by the greater collector surface of the
additional collector area.
Advantageousl~r, no substantially greater surface
requirement is necessary for the construction of the inventive
inverter than for the construction of the in~erter of the prior
art.
A further advantage of the invention consists in the
fact that the production process need only be substantially
altered by an add~tional standard process, and it is thus
largely compatible with other circuits.
Advantageously, the inverter of this inyention can be
applied in an~ desired logic circuit for inyersely operated
transistors.
According to a broad aspect of the invention there is
provided an inverter comprising a first transistor having an
emitter, a base and a collector, a second transistor having an
emitter, a base and at least two collectors, a pair of supply
voltage terminals, said collector of said first transistor
being connected to said base of said second transistor, said
emitter of said second transis-tor being connected to the base
of said first transistor and to one of said terminals, said



--2

~7~

emitter of said first transistor bein~ connected to the other
of said terminals, and diodes connected i.n parallel to the
junctions between the bas-e and the collectors of said second
transistor, said diodes being poled the same as said collector-
base junctions.
The invention is explained in the following with the
help of the Figures and the specification.
Figure 1 is a cireuit diagram of one preferred
embodiment of an inverter stage having the features of the
present invention; ~-~
Figure 2 is a partial secti.onal vie~ diagrammatically .
illustrating an inverter stage whose circuit diagram is formed
in Figure l; and
Figure 3 shows the transmi.ssion eharaeteri.stie of a
eonventional inverter and also the transmission eharaeteristics ;
of an inverter aeeording to this invention.
The eleetrieal eireuit of an inverter stage in an
integrated injeetion logie of this invention is shown in
Figure 1. Th~s includes a lateral bipolar pnp junction
transistor 1 and a verti.eal bipolar npn junction transistor 2.
Voltage supply source terminals 111 and 131 are provided, the
: terminal 13I being the reference potential such as ground.
The emitter 11 of the lateral transistor 1 is connected
to the voltage terminal 111, while the base 13 of this
transistor is connected to the reference voltage terminal 131.
The collector 12 o~ the transistor 1 is directly connected to
the base 24 of the vertical transistor 2. The emitter ~ of
the transistor 2 is connected to the reference voltage terminal
131. The transistor 2 is provided with two or more collectors
~, 23, which are connected to output terminals 25. Schottky

4~8

diodes 31 and 33 are connected parallel to the base-collector
junction of the transistor 2 and are poled the same as the
base-collector junction. The output of the preceding stage is
connected to terminal 241, which is connected to the base 24 of
transistor 2.
The following considerations are attributed to the
invention. A lowering of the storage time of the inverter can
be achieved in that the over-excitation of the vertical npn-
transistor 2, located in the saturation region, is either
lessened or prevented. The over-excitation can be inventively
reduced with the aid of a Schottky diode 31 to 33, which is,
in each case, arranged parallel to a collector-base junction
-~, 24, and 23, 24, respectively.
In Figure 2, the substrate on which the inventive
circuit is constructed is des'ignated as 10. Pre~erably, the
substrate involved here is a p doped silicon substrate. The
inventive circuit can, however, be constructed in a ESFI ~ -
(,SOS)-technique. ESFI stands for Epitaxial Silicon Films
- on Insulators and SOS stands for Silicon on Sapphire. In this
case, the substrate 10 would consist of sapphire or spinel.
On the substrate 10, an n~ conductive layer 132 ~hich will
later become a buried layer, is arranged by means of diffusion.
On the layer 132, a layer 22 of n type conductivity is
epitaxially deposited. By up diffusion, the thickness of the
layer 132 is enlarged by causing the adjacent portion of the
layer 22 to be changed from n type doping to n~ type doping.
With the aid of an ion implantation step, the p conductive
areas 11 and 12, 24 are formed in the surface of layer 22 in
the manner to be seen from Figure 2.
The zone 11 forms the emitter region 11 of the lateral

J.lD974~l!3

pnp transistor 1, and the zone 12 forms the collector. The ;
base 13 of this transistor is a part of the epitaxial layer 22,
which is left between the emitter 11 and the collector 12.
As seen in Figure 2, it will be noted that the collector 12 is,
in effect, part of the diffused zone 24, which becomes the
base of the vertical transistor 2, while the portion 22 lying
below the base 24 forms the emitter of the transistor 2. Into
the upper surface of the portion 24 of p type conductivity, an
n type conductivity diffused zone 21/23 is formed to provide
the collector 21 and 23 of the vertical transistor 2. In order
to form an ohmic contact to the emitter 11, a p+ electrode 110
is formed in the upper surface of the emitter 11. In order to
form an ohmic contact with -the collector 12 of transistor 1, a
p+ zone 2~2 extends down from the outer surface into contact
with the diffused region 24 which includes the upwardly rising
n portion 12, which forms the collec:tor of the transistor 1.
n~ regions 250 provide ohmic contact.s to the diffused region 22,
which provides the collectors of the vertical transistor 2.
An insulating layer 20 is applied to the device around
the two transistors to provide isolation. This insulation may,
for example, be silicon dioxide. The huried layer 132 extends
out to one side of the vertical transistor 2, and then rises
: to the surface where a metal contact, preferably aluminum is
in contact wi.th. it. Aluminum contacts are also pro~ided for
the areas 110, 250 and 242. Electrodes 110, 250 and 242 are
connected, respectively, to terminals 111, 25 and 241.
The n type conductive layer or region 22 may also be
produced by ion implantation.
Seen electrically, it will be noted that the base 13
is part of the layer 22, and is hence electrically connected to




--5--
~ .

1~74(~

the buried layer 132. Thus, the buried layer 132 represents
the base connection regi.on for the lateral transistor 1, and
i.s connected to the reference potential terminal 131. The
collector area 12 of the lateral transistor 1 is, at the same
time, connected to the base area 24 of the verti.cal transistor
2. Beneath the p doped base area 24, the n doped emitter area
22 i.s interfaced therewith, and thus provides the emitter of
the inversely operated yerti.cal transistor 2. As hereinbefore
stated, the emitter area ~ is connected directly to the buried
layer 132, s~ince it is interfaced th:erewith..
It will also be observed that during the process of
construction of the disclosed device, the p~ areas 110 and 242
may be produced at the same time.
. In the place of oxide insulation ~eing used for
isolation, pn isolation may be used.
In arrangements in which only pure integrated injection
logic structures are arranged on a substrate, the isolating
~ provided by insulation 20 may be dispensed w;.th, since there
i the layer 132 is al~ays connected to the reference potential.
In this situation, it ~s preferable that the reference potential
be ground.
Since only yerX small voltages occur with integrated
injection loglcs, p doped protective rings, which, in Schottky
junctions- in other logic arrangements, are provided in a
blocking direction for improving the diode characteristics, are
unnecessary-in th.e $chottky junctions.
In Figure 2, for the sake of simplicity, only the
collector regions 21 and 23 are represented. In reality, many
more collector regi.ons may be provided which together form the
output 25.





740~ .

By means of the arrangement of the base connection
electrode region 242 depicted in the Figure, it is achieved
that areas 21 and 23 are insulated from one another.
The manner of functioning of the vertical npn trans-
istor 2 with a Schottky clamp diode does not change statically
in the active and in the blocking regions, since the Schottky
diode is also biased in blocking direction. Then, only the
capacitance of the diode is paralleI to the collector-base
capacitance, and only has a disad~antageous influence on the
rise times and deIa~ times as long as the charge exchange of
the capacitances is decisive. In the saturation region, on the `~
other hand, not only the collector-base junction, but also the
Schottky diode is biased in the flow direction. I~ the
threshold voltage of the Schottky diode is smaller than that
across the collector-base junction, then the back injection
current flows for the most part through the Schottky diode.
Since the effect of the charge storage in the Schottky diode
is smaller by several orders of magnitude, the storage time
is considerabl~ reduced. The Schottk~ dioae has the further
effect that, because of its smaller threshold voltage, the
collector-emitter saturation voltage is increased. In this
way, the yoltage difference between the logical states is
reduced.
In Figure 3, this is depicted on th~ basis of the
characteristic curves of an inverter of the prior art and of
the inverter of the present invention, i.e. output voltage
(at 25 in Figure l~ vs. input voltage (at 241 in Figure 1).
Therein, the characteristic curve of the prior art inverter is
represented b~ a broken line, and the characteristic curve of
the inventive inverter by an unbroken line. The voltage rise

~974i~8

change referred to amounts to U~SO-U~so~ The smaller voltage
rise with the inventi~e circuit does: not h.ave a disadvantageous
effect on the noise margin of the circuit, since, in this
circuit, only the greater noise margin U'SO is reduced and not
the critical s~aller noise margin Usl. This noise margin
corresponds exactly to tl~e noise margin of the prior art
circuits. The smaller voltage rise, on the other hand, has an
advantageous effect on the decay and rise times, since the
capacitances in the collector-base junction of the transistor 2
and other line capacitances having more rapid charge exchange.
Advantageously, the smaller voltage rise which has
the above described effect on the rise and decay time,
compensates against the effect, described further above, of the
. additional capacitance of the Schottky diode.
By means of the inventive arran~ement of the base
connection region 242, which connects directly to the collector
regions 21 and 23, it is achieved that the ratio between the
collector-base junction surface to the base-emitter junction
surface becomes more favourable than this ratio is in the prior
art arrangements. This ratio is more favourable there, since
there the collector areas are separately diffused-in, whereas,
in the present invention, they are ini.tiall~ diffused-in as
one area, which i.s subsequently separated by the base connection
area 242.
It will be apparent to those ski.lled in the art that
many modifications and variati.ons may be effected without
departing from the spirit and scope of the novel concepts of
the present invention.




,

:

Representative Drawing

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Administrative Status

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Administrative Status

Title Date
Forecasted Issue Date 1981-03-10
(22) Filed 1976-07-06
(45) Issued 1981-03-10
Expired 1998-03-10

Abandonment History

There is no abandonment history.

Payment History

Fee Type Anniversary Year Due Date Amount Paid Paid Date
Application Fee $0.00 1976-07-06
Owners on Record

Note: Records showing the ownership history in alphabetical order.

Current Owners on Record
SIEMENS AKTIENGESELLSCHAFT
Past Owners on Record
None
Past Owners that do not appear in the "Owners on Record" listing will appear in other documentation within the application.
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Document
Description 
Date
(yyyy-mm-dd) 
Number of pages   Size of Image (KB) 
Drawings 1994-03-09 2 56
Claims 1994-03-09 5 180
Abstract 1994-03-09 1 38
Cover Page 1994-03-09 1 16
Description 1994-03-09 8 356