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(12) Patent Application: | (11) CA 2397760 |
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(54) English Title: | WAFER BONDING TECHNIQUES TO MINIMIZE BUILT-IN STRESS OF SILICON MICROSTRUCTURES AND MICRO-MIRRORS |
(54) French Title: | LIAGE DESTINE A MINIMISER LA CONTRAINTE INTEGREE DES MICROSTRUCTURES ET DES MICROMIROIRS EN SILICIUM |
Status: | Deemed Abandoned and Beyond the Period of Reinstatement - Pending Response to Notice of Disregarded Communication |
(51) International Patent Classification (IPC): |
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(72) Inventors : |
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(73) Owners : |
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(71) Applicants : |
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(74) Agent: | SMART & BIGGAR LP |
(74) Associate agent: | |
(45) Issued: | |
(86) PCT Filing Date: | 2001-01-18 |
(87) Open to Public Inspection: | 2001-07-26 |
Availability of licence: | N/A |
Dedicated to the Public: | N/A |
(25) Language of filing: | English |
Patent Cooperation Treaty (PCT): | Yes |
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(86) PCT Filing Number: | PCT/US2001/001758 |
(87) International Publication Number: | US2001001758 |
(85) National Entry: | 2002-07-17 |
(30) Application Priority Data: | |||||||||
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A bonded wafer fabrication mechanism for a micro-mirror structure provides for
oxidizing a device wafer instead of a handle wafer or splitting thermal
oxidation processing between the device wafer and the handle wafer prior to
etching. The flatness of mirrors in micro-mirror structures fabricated
according to such a mechanism is substantially improved.
L'invention concerne un procédé de fabrication d'une tranche liée pour une structure micromiroir destinée à réduire par l'oxyde une tranche de dispositif au lieu d'une tranche de manipulation ou à séparer le traitement d'oxydation thermique entre la tranche de dispositif et la tranche de manipulation avant la gravure. La planéité des miroirs dans les structures micromiroirs fabriquées selon ce procédé est sensiblement améliorée.
Note: Claims are shown in the official language in which they were submitted.
Note: Descriptions are shown in the official language in which they were submitted.
2024-08-01:As part of the Next Generation Patents (NGP) transition, the Canadian Patents Database (CPD) now contains a more detailed Event History, which replicates the Event Log of our new back-office solution.
Please note that "Inactive:" events refers to events no longer in use in our new back-office solution.
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Description | Date |
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Time Limit for Reversal Expired | 2006-01-18 |
Application Not Reinstated by Deadline | 2006-01-18 |
Deemed Abandoned - Failure to Respond to Maintenance Fee Notice | 2005-01-18 |
Letter Sent | 2004-05-10 |
Inactive: Delete abandonment | 2004-05-10 |
Inactive: Applicant deleted | 2004-05-07 |
Inactive: Abandoned - No reply to Office letter | 2004-03-15 |
Inactive: Correspondence - Transfer | 2004-03-02 |
Inactive: Transfer information requested | 2003-12-15 |
Inactive: Delete abandonment | 2003-11-28 |
Inactive: Single transfer | 2003-10-21 |
Inactive: Abandoned - No reply to Office letter | 2003-10-21 |
Inactive: Cover page published | 2003-01-15 |
Inactive: Courtesy letter - Evidence | 2002-12-10 |
Inactive: Notice - National entry - No RFE | 2002-12-03 |
Inactive: Applicant deleted | 2002-12-03 |
Application Received - PCT | 2002-09-21 |
National Entry Requirements Determined Compliant | 2002-07-17 |
Application Published (Open to Public Inspection) | 2001-07-26 |
Abandonment Date | Reason | Reinstatement Date |
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2005-01-18 |
The last payment was received on 2003-12-12
Note : If the full payment has not been received on or before the date indicated, a further fee may be required which may be one of the following
Patent fees are adjusted on the 1st of January every year. The amounts above are the current amounts if received by December 31 of the current year.
Please refer to the CIPO
Patent Fees
web page to see all current fee amounts.
Fee Type | Anniversary Year | Due Date | Paid Date |
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Basic national fee - standard | 2002-07-17 | ||
MF (application, 2nd anniv.) - standard | 02 | 2003-01-20 | 2003-01-03 |
Registration of a document | 2003-10-21 | ||
MF (application, 3rd anniv.) - standard | 03 | 2004-01-19 | 2003-12-12 |
Note: Records showing the ownership history in alphabetical order.
Current Owners on Record |
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XROS, INC. |
Past Owners on Record |
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TIMOTHY G. SLATER |